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CN-224231215-U - Equipment for testing performance of semiconductor vacuum valve

CN224231215UCN 224231215 UCN224231215 UCN 224231215UCN-224231215-U

Abstract

The utility model discloses equipment for testing the performance of a semiconductor vacuum valve, which comprises a CDA controller, a vacuum gauge, a frame, a main body, a vacuum gauge, at least two first valve external interfaces and at least one nitrogen interface, wherein the vacuum structure is electrically connected with the CDA controller, the frame is arranged at intervals with the vacuum structure, the main body is connected to the frame and communicated with the vacuum gauge and used for connecting at least one tested valve, the middle position of the main body is provided with a hollow space, the side wall of the main body is provided with the at least two first valve external interfaces and the at least one nitrogen interface, the first valve external interfaces are used for connecting the tested valve, the nitrogen interfaces are used for introducing nitrogen into the hollow space, and the structures of the two first valve external interfaces are identical or different, so that the technical problems of low valve performance testing efficiency and poor equipment use flexibility are solved, and the high-efficiency intensification of the testing equipment is realized.

Inventors

  • SHAO JIA
  • LI HUAN

Assignees

  • 靖江佳晟真空技术有限公司

Dates

Publication Date
20260512
Application Date
20250718

Claims (10)

  1. 1. The device for testing the performance of the semiconductor vacuum valve comprises a CDA controller and a vacuum gauge, and is characterized by further comprising: The vacuumizing structure (10) is electrically connected with the CDA controller; the frame (20) is arranged at intervals with the vacuumizing structure (10); The main body (30) is connected to the frame (20) and connected with the vacuum gauge, and the main body (30) is communicated with the vacuumizing structure (10) and is used for being connected with at least one valve (100) to be tested; The middle position of the main body (30) is provided with a hollow space, the side wall of the main body is provided with at least two first valve external interfaces (31) and at least one nitrogen interface (32), the first valve external interfaces (31) are used for connecting the tested valve (100), and the nitrogen interface (32) is used for introducing nitrogen into the hollow space; The two first valve outer interfaces (31) are identical or different in structure.
  2. 2. An apparatus for testing the performance of a semiconductor vacuum valve according to claim 1, wherein the vacuum pumping structure (10) comprises a dry pump (11), a first corrugated expansion joint (12) with one end connected with the dry pump (11), a pipeline (13) with one end connected with the first corrugated expansion joint (12) and the other end extending towards the main body (30), a second corrugated expansion joint (14) connected with the pipeline (13) and arranged at intervals with the first corrugated expansion joint (12), a first angle valve (15) connected with the pipeline (13) and connected with the second corrugated expansion joint (14), a butterfly valve (16) connected with the pipeline (13) and arranged at intervals with the first angle valve (15), and a second angle valve (17) connected with the pipeline (13) and connected with the main body (30).
  3. 3. An apparatus for testing the performance of a semiconductor vacuum valve according to claim 2, wherein the frame (20) comprises a frame body (21) with the top connected to the main body (30), and four universal wheels (22) connected to the bottom of the frame body (21) at intervals.
  4. 4. An apparatus for semiconductor vacuum valve performance test according to claim 2, wherein the main body (30) comprises a cavity (33) having a square shape with the hollow space in the middle, an open top, a through hole in the bottom, the first valve outer port (31) and the nitrogen port (32) in the side wall, a side door assembly (34) connected to one side wall of the cavity (33) opposite to the second angle valve (17) for opening or closing the hollow space, a cover (35) connected to the top of the cavity (33) for closing the hollow space, an adapter flange (36) connected to the bottom of the cavity (33) for surrounding the through hole, and a blank plate (37) connected to the adapter flange (36) for closing the through hole.
  5. 5. An apparatus for semiconductor vacuum valve performance testing according to claim 4, wherein the number of said first valve external ports (31) is four, and is disposed between said side opening assembly (34) and said second corner valve (17), two being a group, disposed opposite each other from group to group, and one group of said first valve external ports (31) being disposed on one side wall of said chamber (33).
  6. 6. The apparatus for testing the performance of a semiconductor vacuum valve according to claim 5, wherein the number of the nitrogen ports (32) is three, and the nitrogen ports are arranged on one side of the second angle valve (17) and are spaced from the second angle valve (17).
  7. 7. An apparatus for testing the performance of a semiconductor vacuum valve as set forth in claim 6, wherein said side-opening assembly (34) comprises a door body (34-1) having one end connected to said cavity (33) by a hinge, and a plurality of horizontal toggle clamps (34-2) connected to said cavity (33), said door body (34-1) being compressed when said door body (34-1) is in contact with said cavity (33), said door body (34-1) closing said hollow space.
  8. 8. The apparatus for testing the performance of a semiconductor vacuum valve according to claim 7, wherein the upper cover (35) is provided with a plurality of second valve external interfaces (35-1), and the second valve external interfaces (35-1) are arranged in two rows at parallel intervals.
  9. 9. The apparatus for testing the performance of a semiconductor vacuum valve as set forth in claim 4, wherein said blank (37) is of oval configuration and is bolted to said adapter flange (36).
  10. 10. The apparatus for testing the performance of a semiconductor vacuum valve according to any one of claims 1 or 9, further comprising a heating belt connected to the main body (30) for heating the main body (30).

Description

Equipment for testing performance of semiconductor vacuum valve Technical Field The utility model relates to the technical field of valve performance test, in particular to equipment for testing the performance of a semiconductor vacuum valve. Background The vacuum valve is a core element in a semiconductor vacuum system, plays roles of opening and closing, controlling flow/flow direction, regulating pressure and the like, and has various types such as an angle valve, a ball valve, a pendulum valve, a butterfly valve, a transmission valve, a rectangular valve, a diaphragm valve and the like, The performance of the vacuum valve affects the reliability of the semiconductor vacuum system or the fluid system, and in order to ensure the performance of the vacuum valve, performance test is generally required to be carried out on the vacuum valve, wherein the test contents generally comprise tightness, leakage rate, switch life, high temperature resistance and the like; The traditional performance test equipment can only test one type of vacuum valve due to the interface, has poor use flexibility and relatively low test efficiency. Disclosure of utility model In view of the above-mentioned shortcomings in the related art, an object is to provide an apparatus for testing performance of a semiconductor vacuum valve, so as to solve the technical problems of relatively low efficiency and relatively poor flexibility of use in the related art. The technical scheme for realizing the aim is that the equipment for testing the performance of the semiconductor vacuum valve comprises a CDA controller and a vacuum gauge, and further comprises: the vacuumizing structure is electrically connected with the CDA controller; the frame is arranged at intervals with the vacuumizing structure; The main body is connected to the rack and connected with the vacuum gauge, and the main body is communicated with the vacuumizing structure and is used for connecting at least one valve to be tested; the middle position of the main body is provided with a hollow space, the side wall of the main body is provided with at least two first valve external interfaces and at least one nitrogen interface, the first valve external interfaces are used for connecting the tested valve, and the nitrogen interface is used for introducing nitrogen into the hollow space; the structures of the two first valve external interfaces are the same or different. The vacuum pumping structure further comprises a dry pump, a first corrugated expansion joint, a pipeline, a second corrugated expansion joint, a first angle valve, a butterfly valve and a second angle valve, wherein one end of the first corrugated expansion joint is connected with the dry pump, one end of the pipeline is connected with the first corrugated expansion joint, the other end of the pipeline extends towards the direction of the main body, the second corrugated expansion joint is connected to the pipeline and is arranged at intervals with the first corrugated expansion joint, the first angle valve is connected to the pipeline and is connected with the second corrugated expansion joint, the butterfly valve is connected to the pipeline and is arranged at intervals with the first angle valve, and the second angle valve is connected to the pipeline and is connected with the main body. The frame further comprises a frame body, wherein the top of the frame body is connected with the main body, and four universal wheels are connected to the bottom of the frame body at intervals. The main body further comprises a cavity body, a side opening assembly, an upper cover, an adapter flange and a sealing plate, wherein the cavity body is in a square structure, the hollow space is arranged in the middle, the top of the cavity body is open, a through hole is formed in the bottom of the cavity body, the side wall of the cavity body is provided with the first valve external interface and the nitrogen interface, the side opening assembly is connected to one side wall of the cavity body and is opposite to the second angle valve and used for opening or closing the hollow space, the upper cover is connected to the top of the cavity body and seals the hollow space, the adapter flange is connected to the bottom of the cavity body and surrounds the through hole, and the sealing plate is connected to the adapter flange and seals the through hole. The number of the first valve external interfaces is four, the first valve external interfaces are arranged between the side opening assembly and the second angle valve, two first valve external interfaces are arranged in a group, the first valve external interfaces are arranged opposite to each other, and one first valve external interface is arranged on one side wall of the cavity. And the number of the nitrogen interfaces is three, and the nitrogen interfaces are arranged on one side of the second angle valve and are arranged at intervals with the second angle valve. The side door o