CN-224231692-U - Integral glow discharge sample cell

CN224231692UCN 224231692 UCN224231692 UCN 224231692UCN-224231692-U

Abstract

The utility model relates to the technical field of mass spectrometry, in particular to an integrated glow discharge sample cell which comprises a cathode, an anode and an argon gas inlet pipe arranged on the upper end surface of the anode, wherein the anode and the cathode are fixed in an insulating way through two ceramic plates, the anode comprises a discharge cell and gaskets arranged on two sides of the discharge cell, the cathode comprises a glow discharge sample, a spring pressing tool and a cavity, the glow discharge sample is arranged in the cavity through the spring pressing tool, and the argon gas inlet pipe comprises a gas pipe, a joint and an air inlet adapter.

Inventors

KANG PINCHUN
XU ZHOUYI
LU QIAO
HANG LE
RUAN YUJIAO
TANG ZHUOJUN
ZHANG CHENTAO

Assignees

厦门市计量检定测试院
厦门大学

Dates

Publication Date: 20260512
Application Date: 20250523

Claims (6)

1. The utility model provides an integral type glow discharge sample cell, its characterized in that includes negative pole, positive pole and sets up the argon gas intake pipe at the positive pole up end, insulating fixed is carried out through two potsherds between positive pole and the negative pole, the positive pole includes the battery and sets up the gasket in the battery both sides that discharges, the negative pole includes glow discharge sample, spring pressure tool and cavity, glow discharge sample is arranged in the cavity through the spring pressure tool, the argon gas intake pipe includes trachea, joint and air inlet adapter.
2. The integrated glow discharge sample cell according to claim 1, wherein the center through hole of the discharge cell is 15-25mm, the height is 5-10mm, the diameter of the center through hole of the gasket on the side close to the cathode of the gaskets on the two sides of the discharge cell is 8-12mm, the thickness is 0.3-0.7mm, the gasket on the other side is used as an ion outlet of an ion source, and the diameter of the center through hole is 0.2-0.6mm, and the thickness is 0.3-0.7mm.
3. The integrated glow discharge sample cell according to claim 1, wherein said ceramic plate has a thickness of 0.3-0.7mm, a diameter of a central through hole of the ceramic plate in close contact with the cathode of 8-12mm, and a diameter of a central through hole of the ceramic plate in close contact with the anode of 14-18mm.
4. The integrated glow discharge sample cell of claim 1, wherein said cathode and anode are integrally assembled.
5. The integrated glow discharge sample cell according to claim 1, wherein a through hole is formed in the middle of the upper end surface of said discharge cell.
6. The integrated glow discharge sample cell according to claim 1, wherein said discharge cell and said gasket are made of high purity tantalum.

Description

Integral glow discharge sample cell Technical Field The utility model relates to the technical field of mass spectrometry, in particular to an integrated glow discharge sample cell. Background In the field of film material analysis, glow discharge technology can accurately reveal the relation of element components along with the depth change by virtue of the unique advantages of the glow discharge technology, so that the glow discharge technology is widely applied to the depth analysis of a film structure. However, the existing glow discharge technology still has a plurality of shortfalls to be solved in practical application. First, there are significant drawbacks to the design of conventional glow discharge sample cells. The anode and the cathode are designed as separate parts, the anode being fixed in the vacuum chamber and the cathode being removable. This design presents a number of inconveniences in practical operation. When the anode needs to be cleaned, the vacuum environment must be destroyed, which is not only cumbersome to operate, but also easy to introduce external impurities. Once impurities are mixed, the accuracy and stability of subsequent analysis are directly affected, so that the reliability of an analysis result is reduced, and difficulties are brought to accurate characterization of the film material. Second, conventional glow discharge techniques have a bottleneck in degrading depth resolution. It is difficult to achieve nanometer scale ablation depth resolution, which is a severe short plate for thin film materials in the nanometer to hundred micron thickness range. Along with the continuous progress of technology, the film material is widely applied, the thickness of the film material is thinner, and the requirement on analysis precision is higher. The detection effect of the prior art cannot meet the increasing high-precision thin film material analysis requirement, particularly under the nanoscale, the composition and structure information of the thin film material are often more critical, but the traditional technology is difficult to provide accurate deep analysis, so that the development of research and application of the thin film material is limited to a great extent. Therefore, in view of these shortcomings of the existing glow discharge technology, improvements and optimization are needed to improve the performance and reliability of the glow discharge technology in thin film material analysis, and better meet the requirements of modern thin film material research. Disclosure of utility model The utility model aims to overcome the defects of the prior art, provides an integrated glow discharge sample cell, realizes synchronous in-out and out-in of a vacuum cavity through the integrated design of an anode and a cathode, conveniently cleans the anode on the premise of not damaging vacuum, optimizes a discharge structure and control parameters, realizes the nano-scale ablation depth resolution, and meets the high-precision component detection requirement of a thin-layer material. The technical scheme adopted for solving the technical problems is as follows: The utility model provides an integral type glow discharge sample cell, includes negative pole, positive pole and sets up the argon gas intake pipe at the positive pole up end, insulating fixed is carried out through two potsherds between positive pole and the negative pole, the positive pole includes the battery and sets up the gasket in the battery both sides that discharges, the negative pole includes glow discharge sample, spring clamp and cavity, glow discharge sample is arranged in the cavity through the spring clamp, the argon gas intake pipe includes trachea, joint and air inlet adaptor. In a preferred embodiment of the utility model, the center through hole of the discharge cell is 15-25mm, the height is 5-10mm, the diameter of the center through hole of the gasket on one side close to the cathode of the gaskets on two sides of the discharge cell is 8-12mm, the thickness is 0.3-0.7mm, the gasket on the other side is used as an ion outlet of an ion source, the diameter of the center through hole is 0.2-0.6mm, and the thickness is 0.3-0.7mm. In a preferred embodiment of the utility model, the thickness of the ceramic plate is 0.3-0.7mm, the diameter of the central through hole of the ceramic plate, which is close to the cathode, is 8-12mm, and the diameter of the central through hole of the ceramic plate, which is close to the anode, is 14-18mm. The discharge cell and gaskets arranged at two sides of the discharge cell together form an anode of glow discharge. The anode is tightly attached to the copper block cooled by liquid nitrogen through the pressing block, so that the anode is grounded and the whole discharge system is kept in a low-temperature state, and the aim is to cool C, N, O and other gas impurities, reduce the chances of collision and ionization of the gas impurities in plasma and further minimize inter