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CN-224231796-U - Scanning probe microscope laser measuring head capable of adjusting light path

CN224231796UCN 224231796 UCN224231796 UCN 224231796UCN-224231796-U

Abstract

The utility model discloses a scanning probe microscope laser probe capable of adjusting a light path, which comprises a light source emitting module, a light source receiving module, a scanning probe, a first reflector and a second reflector, wherein light rays emitted by the light source emitting module are reflected by the first reflector and then fall onto the second reflector, the second reflector reflects the received light rays onto the light source receiving module, the second reflector is arranged on a mounting substrate, and a first position adjusting module for adjusting the direction of the reflected light rays of the second reflector is further arranged on the mounting substrate. According to the scheme, the first reflective mirror and the second reflective mirror are arranged, the nanoscale deflection of the cantilever can be converted into the micron-scale change of the light spot displacement under the optical lever amplification effect, the detection sensitivity is remarkably improved, the longitudinal resolution can reach the sub-nanoscale, and meanwhile, in the scheme, the position of the first reflective mirror and the position of the second reflective mirror are adjusted through the position adjusting module, so that the deviation of the cantilever angles of different probes can be effectively corrected.

Inventors

  • PANG LIANG
  • HUANG LIANGJUN
  • QIU YUHAN

Assignees

  • 苏州铭显精密仪器有限公司

Dates

Publication Date
20260512
Application Date
20250523

Claims (7)

  1. 1. The scanning probe microscope laser measuring head capable of adjusting the light path comprises a mounting table, wherein a light source emitting module, a light source receiving module and a scanning probe (6) are arranged on the mounting table, and the scanning probe microscope laser measuring head is characterized by also comprising a first reflecting mirror (4) and a second reflecting mirror (10), wherein light rays emitted by the light source emitting module are reflected by the first reflecting mirror (4) and then fall onto the second reflecting mirror (10), and the second reflecting mirror (10) reflects the received light rays onto the light source receiving module; The mounting table is also provided with a light path adjusting module for adjusting the direction of the light reflected by the second reflective mirror (10).
  2. 2. The scanning probe microscope laser probe capable of adjusting an optical path according to claim 1, wherein the optical path adjusting module comprises a rotating shaft supporting seat (7) and a rotating shaft (9), the rotating shaft supporting seat (7) is installed on the installation table, the rotating shaft (9) is rotatably connected to the rotating shaft supporting seat, and the second reflecting mirror (10) is arranged on the rotating shaft (9) and rotates along with the rotating shaft.
  3. 3. The scanning probe microscope laser probe capable of adjusting an optical path according to claim 2, wherein the optical path adjusting module further comprises an adjusting screw (15), a first tension member (13) and a connecting sleeve (11), the connecting sleeve (11) is fixed on the rotating shaft (9), the adjusting screw (15) is in threaded connection with a threaded seat, the threaded seat is arranged on the mounting table, the first tension member (13) is connected with the connecting sleeve (11) and applies tension to the connecting sleeve, one end of the adjusting screw (15) is abutted with the connecting sleeve (11) to balance the tension of the first tension member, and the adjusting screw (15) is abutted against the connecting sleeve (11) to rotate the rotating shaft (9).
  4. 4. A scanning probe microscope laser probe capable of adjusting an optical path according to claim 3, wherein an extension rod (14) is further arranged between the connecting sleeve (11) and the first adjusting screw rod (15), the extension rod (14) slides on a limiting sliding seat, the limiting sliding seat is arranged on the mounting table, one end of the extension rod (14) is abutted against the connecting sleeve (11), and the other end of the extension rod is abutted against one end of the first adjusting screw rod (15).
  5. 5. The scanning probe microscope laser probe capable of adjusting an optical path according to claim 2, wherein the mounting table is further provided with a position adjusting module for adjusting the position of the light source receiving module, the position adjusting module comprises a four-quadrant fixing seat (18) provided with the light source receiving module, a second adjusting screw (22), a second threaded seat, a second tension member (21), a guide rail (16) and a sliding table (17), the guide rail is mounted on the mounting table, the sliding table slides on the guide rail, the four-quadrant fixing seat is mounted on the sliding table, the second threaded seat is mounted on the mounting table, the second adjusting screw (22) is in threaded connection with the second threaded seat, the second tension member (21) can apply a force enabling the sliding table to slide, and one end of the second adjusting screw (22) is abutted to the sliding table to achieve the effect of balancing the tension of the second tension member (21).
  6. 6. The scanning probe microscope laser probe capable of adjusting an optical path according to claim 1, wherein the first reflector (4) is located between the second reflector (10) and the light source receiving module, and the first reflector is fixed on the mounting table through a reflector fixing seat (3).
  7. 7. The scanning probe microscope laser probe capable of adjusting an optical path according to claim 6, wherein the scanning probe (6) is located below the first reflecting mirror (4), and the scanning probe (6) is mounted on the mounting table through a probe positioning seat (5).

Description

Scanning probe microscope laser measuring head capable of adjusting light path Technical Field The utility model belongs to the technical field of scanning probe microscopes, and particularly relates to a scanning probe microscope laser gauge head capable of adjusting a light path. Background The scanning probe microscope detects the deformation or vibration of the micro-cantilever through the laser measuring head, thereby indirectly measuring the appearance or physical property of the sample surface. The working principle of the laser probe is that the laser beam emitted by the laser is focused on the back surface of the micro cantilever of the scanning probe, the reflected light spot position is received by a Position Sensitive Detector (PSD) or a four-Quadrant Photodiode (QPD), and the high-resolution scanning is realized under the calculation of a control system by detecting the movement amount of the light spot. In the prior art, when the scanning probe microscope is used for a long time, the situation of replacing the probe is faced, the light path needs to be frequently and manually adjusted after the probe is replaced, and automatic measurement is difficult to realize, meanwhile, the light path is finally deviated from the four-quadrant target surface due to the deviation of the assembly position of the probe in different types or the deviation of the angle of the cantilever of the probe, and the light path needs to be repeatedly adjusted through a high-precision displacement and angle adjusting device, so that the adjustment process is time-consuming, and therefore, a structure or method capable of improving the problems is needed. Disclosure of utility model The utility model aims to provide a scanning probe microscope laser probe capable of adjusting an optical path so as to solve the problems in the background technology. In order to achieve the above purpose, the utility model adopts a technical scheme that: the utility model provides a scanning probe microscope laser gauge head that can adjust light path, includes the mount table, be provided with light source emission module, light source receiving module and scanning probe on the mount table, its characterized in that: the light source module is used for emitting light rays, and the light source module is used for receiving the light rays; The mounting table is also provided with a light path adjusting module for adjusting the direction of the two reflected light rays of the reflector. Preferably, the optical path adjusting module comprises a rotating shaft supporting seat and a rotating shaft, the rotating shaft supporting seat is installed on the installation table, the rotating shaft is rotatably connected to the rotating shaft supporting seat, and the second reflective mirror is arranged on the rotating shaft and rotates along with the rotating shaft. Preferably, the optical path adjusting module further comprises a first adjusting screw, a first tension member and a connecting sleeve, the connecting sleeve is fixed on the rotating shaft, the first adjusting screw is in threaded connection with a first threaded seat, the first threaded seat is installed on the installation table, the first tension member is connected with the connecting sleeve and applies tension to the connecting sleeve, and one end of the first adjusting screw is in butt joint with the connecting sleeve to balance the tension of the first tension member. Preferably, an extension rod is further arranged between the connecting sleeve and the first adjusting screw, the extension rod slides on a limiting sliding seat, one end of the extension rod is abutted against the connecting sleeve, and the other end of the extension rod is abutted against one end of the first adjusting screw. Preferably, an extension rod is further arranged between the connecting sleeve and the first adjusting screw, the extension rod slides on a limiting sliding seat, the limiting sliding seat is arranged on the mounting table, one end of the extension rod is in interference with the connecting sleeve, and the other end of the extension rod is in interference with one end of the first adjusting screw. Preferably, the mounting table is further provided with a position adjustment module, the position adjustment module comprises a four-quadrant fixing seat, a second adjusting screw, a second screw seat, a second tensile force, a guide rail and a sliding table, wherein the four-quadrant fixing seat is provided with a light source receiving module, the guide rail is arranged on the mounting table, the sliding table slides on the guide rail, the four-quadrant fixing seat is arranged on the sliding table, the second screw seat is arranged on the mounting table, the second adjusting screw is in threaded connection with the second screw seat, the second tensile force can apply acting force enabling the sliding table to slide, and one end of the second adjusting screw is in butt joint with the sliding table t