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CN-224231802-U - Test frame structure for detecting performance of component

CN224231802UCN 224231802 UCN224231802 UCN 224231802UCN-224231802-U

Abstract

The utility model provides a test frame structure for detecting performance of a component, which comprises a first mounting frame for mounting a device to be tested, wherein the first mounting frame comprises a first supporting plate, a plurality of U-shaped frames and straight plate frames with different sizes, which are horizontally arranged, a mounting platform of the component to be tested is built through the plurality of U-shaped frames and the straight plate frames, the U-shaped frames comprise an upper plate and a lower plate which are parallel and opposite, the surfaces of the lower plate and the straight plate frames are provided with mounting hole groups, each mounting hole group comprises n-level through holes arranged in the center and a plurality of n+i-level through holes uniformly distributed around the n-level mounting holes, and i is a positive integer. The utility model can be provided with a detection component with cooperative operation of multiple components so as to detect the working performance of the detection component.

Inventors

  • WANG XIAOCHEN
  • ZHANG BINBIN
  • WANG BIN

Assignees

  • 天津维普泰克科技发展有限公司

Dates

Publication Date
20260512
Application Date
20250331

Claims (7)

  1. 1. The test frame structure for detecting the performance of the assembly is characterized by comprising a first mounting frame for mounting a device to be tested, wherein the first mounting frame comprises a first supporting plate (5) which is horizontally arranged, a plurality of U-shaped frames (6) and straight plate frames (7) with different sizes, and a mounting platform of the assembly to be tested is built through the plurality of U-shaped frames (6) and the straight plate frames (7); The U-shaped frame (6) comprises an upper plate and a lower plate which are parallel and opposite, a mounting hole group (602) is formed in the surfaces of the lower plate and the straight plate frame (7), the mounting hole group (602) comprises an n-level through hole (621) arranged in the center and a plurality of n+i-level through holes (622) uniformly distributed around the n-level mounting hole, and i and n are positive integers.
  2. 2. The test rack structure for detecting component performance according to claim 1, wherein a plurality of support rods (501) are fixedly installed on the bottom surface of the first support plate (5), the support rods (501) comprise inner rods (512) with cylindrical structures and outer rods (511) with circular ring cylindrical structures, and the outer rods (511) are in threaded sleeve connection with the outer sides of the inner rods (512).
  3. 3. The test rack structure for detecting the performance of a component according to claim 2, wherein the upper end of the outer rod (511) is provided with an internal thread.
  4. 4. A test rack structure for testing the performance of a component according to claim 1, wherein the upper plate surface of the U-shaped rack (6) is provided with trapezoidal holes (601) to match with connectors of multiple sizes.
  5. 5. The test frame structure for detecting component performance according to claim 4, wherein a plurality of mounting hole groups (602) are formed on the surfaces of the lower plate and the straight plate frame (7) of the U-shaped frame (6).
  6. 6. The test frame structure for detecting component performance according to claim 1, wherein the test frame comprises a second mounting frame, the second mounting frame comprises a second supporting plate (1) for supporting the first mounting frame and tested equipment, a first mounting plate (2) and a second mounting plate (4) are vertically and oppositely arranged at the left end and the right end of the second supporting plate (1), and a plurality of mounting holes for fixing test devices are uniformly formed in the first mounting plate (2) and the second mounting plate (4).
  7. 7. The test frame structure for detecting component performance according to claim 6, wherein the clamping plate (3) is fixedly installed on the first installation plate (2) or the second installation plate (4), long holes (301) matched with the installation holes are horizontally formed in the middle section of the clamping plate (3), and the upper end and the lower end of the clamping plate (3) are arranged at intervals with the first installation plate (2) or the second installation plate (4).

Description

Test frame structure for detecting performance of component Technical Field The utility model relates to the technical field of wafer processing equipment detection, in particular to a test frame structure for detecting component performance. Background Wafer processing equipment is core equipment in the field of semiconductor manufacturing, and complex processes such as wafer transmission, positioning, etching, deposition and the like are completed through the cooperative action of a plurality of precise components. Because the wafer has the characteristics of being thin and crisp (the thickness is usually hundreds of micrometers), when the action precision of an actuating mechanism in equipment exceeds an allowable range, the problems of uneven stress, local stress concentration and the like of the wafer are extremely easy to occur, thereby causing wafer cracking or microcrack defects and obviously reducing the product yield. In the prior art, maintenance for equipment accuracy generally adopts a "selective component detection" strategy, i.e., based on experience or historical fault data, only a part of high-risk components (such as a manipulator end effector, a vacuum chuck positioning module, etc.) are independently calibrated for accuracy before equipment is started. However, the method has significant limitations, and the stability of the wafer processing process depends on the time sequence coordination and space coupling of the multi-component action, and the local error of a single component can cause the system-level precision deviation through the dynamic superposition effect, so that the conventional independent detection mode cannot evaluate the interaction influence among multiple error sources. In addition, periodic inspection of all parts can improve coverage, but can greatly increase equipment downtime and maintenance costs. Thus, there is a need for an apparatus that can test the operational performance of a component in which multiple components are co-operating. Disclosure of utility model In view of the above, the present utility model is to provide a test rack structure for testing the performance of components, which is capable of installing a test component operated cooperatively by multiple components to test the performance thereof. In order to solve the technical problems, the utility model adopts the following technical scheme: The test frame structure for detecting the performance of the assembly comprises a first mounting frame for mounting a device to be tested, wherein the first mounting frame comprises a first supporting plate which is horizontally arranged, a plurality of U-shaped frames and straight plate frames with different sizes, and a mounting platform of the assembly to be tested is built through the plurality of U-shaped frames and the plurality of straight plate frames; The U-shaped frame comprises an upper plate and a lower plate which are parallel and opposite, wherein the surfaces of the lower plate and the straight plate frame are provided with a mounting hole group, the mounting hole group comprises n-level through holes arranged in the center and a plurality of n+i-level through holes uniformly distributed around the n-level mounting holes, and i and n are positive integers. Further, the bottom surface fixed mounting of first backup pad a plurality of bracing pieces, the bracing piece includes the interior pole of cylinder structure and the outer pole of ring post structure, outer pole screw thread cup joints in the interior pole outside. Further, the upper end of the outer rod is provided with an internal thread. Furthermore, the surface of the upper plate of the U-shaped frame is provided with a trapezoid hole so as to be matched with the connecting pieces with multiple sizes. Further, a plurality of mounting hole groups are formed on the surfaces of the lower plate and the straight plate frame of the U-shaped frame. Further, the test frame comprises a second mounting frame, the second mounting frame is including the second backup pad that is used for supporting first mounting frame and equipment under test, the vertical relative first mounting panel and the second mounting panel that is equipped with in both ends about the second backup pad, evenly offered a plurality of mounting hole that is used for fixed test device on first mounting panel and the second mounting panel. Further, a clamping plate is fixedly installed on the first installation plate or the second installation plate, a long hole matched with the installation hole is horizontally formed in the middle section of the clamping plate, and the upper end and the lower end of the clamping plate are arranged at intervals with the first installation plate or the second installation plate. The utility model has the advantages and positive effects that: Through setting up U-shaped frame and straight grillage, trapezoidal hole is seted up on the upper plate surface of U-shaped frame to match the connec