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CN-224231848-U - Current sensor

CN224231848UCN 224231848 UCN224231848 UCN 224231848UCN-224231848-U

Abstract

The utility model discloses a current sensor which comprises a substrate, wherein a substrate, a magnetic sensing unit and a first conductor are arranged in the substrate, the magnetic sensing unit is arranged on one side of a first surface of the substrate, the first conductor is arranged on one side, away from the substrate, of the magnetic sensing unit, a part of the first conductor is exposed relative to the substrate and is used for receiving current to be detected, the magnetic sensing unit is used for sensing a signal magnetic field corresponding to the current to be detected so as to generate a sensing signal, and the first surface is the upper surface or the lower surface of the substrate. The current sensor provided by the utility model can enhance the intensity of the signal magnetic field received by the magnetic sensing unit, improve the sensitivity of the sensor, reduce the volume, adapt to various packaging forms and reduce the packaging cost.

Inventors

  • YUAN FUDE
  • ZHAO JIA

Assignees

  • 苏州纳芯微电子股份有限公司

Dates

Publication Date
20260512
Application Date
20250429

Claims (15)

  1. 1. The current sensor is characterized by comprising a substrate, wherein the substrate is internally provided with: The substrate is provided with a plurality of holes, A magnetic sensor unit disposed on the first surface side of the substrate, and The first conductor is arranged on one side of the magnetic sensing unit, which is away from the substrate, and part of the first conductor is exposed relative to the substrate and is used for receiving current to be measured; The magnetic sensing unit is used for sensing a signal magnetic field corresponding to the current to be detected so as to generate a sensing signal; Wherein the first surface is an upper surface or a lower surface of the substrate.
  2. 2. The current sensor according to claim 1, wherein the substrate is provided with: A second conductor disposed proximate to the first conductor and coupled to the first conductor by a conductive element; When the current to be measured is input into the first conductor, the first conductor and the second conductor transmit the current to be measured.
  3. 3. The current sensor of claim 2, wherein the substrate is configured according to at least one of: the second conductor is arranged on one side of the first conductor, which is close to the magnetic sensing unit; The first conductor is arranged on one side of the magnetic sensing unit in a first direction, M wiring layers are arranged on the substrate in parallel to the first direction, at least one layer of the M wiring layers is used for forming the first conductor, and at least another layer of the M wiring layers is used for forming the second conductor, wherein the first direction is perpendicular to the first surface of the substrate.
  4. 4. The current sensor according to claim 2, wherein the conductive elements for coupling the first and second conductors are arranged in an array in a direction parallel to the first surface of the substrate.
  5. 5. The current sensor according to claim 1, wherein the first conductor is provided on a first direction side of the magnetic sensor unit, the substrate is provided with M wiring layers and N insulating layers in parallel to the first direction, the M wiring layers and the N insulating layers are alternately provided in the first direction, wherein the first direction is perpendicular to a first surface of the substrate, the substrate is configured according to at least one of: The wiring layers far away from the magnetic sensing unit are used for forming the first conductor; The wiring layer with the largest thickness among the M wiring layers is used for forming the first conductor; The insulating layer is internally provided with a conductive unit for coupling with a conductive structure adjacent to the insulating layer; The N insulating layers comprise a fifth insulating layer positioned on one side of the first conductor away from the magnetic sensing unit, and the fifth insulating layer is provided with a first opening for exposing part of the first conductor corresponding to the first opening relative to the substrate; The N insulating layers comprise fifth insulating layers far away from the magnetic sensing unit, the M wiring layers comprise fourth wiring layers positioned on one side of the fifth insulating layers close to the magnetic sensing unit, the fifth insulating layers are provided with second openings, and parts, corresponding to the second openings, of the fourth wiring layers are exposed relative to the substrate so as to form electrodes of the current sensor; The M wiring layers comprise first wiring layers close to the magnetic sensing units, first devices are arranged in the substrate, and the magnetic sensing units are coupled with the first devices through the first wiring layers; the M wiring layers comprise first wiring layers close to the magnetic sensing units, the N insulating layers comprise first insulating layers positioned on one sides of the first wiring layers close to the magnetic sensing units, first devices are further arranged in the substrate, and conducting units are arranged in the first insulating layers and used for coupling the magnetic sensing units with the first wiring layers or used for coupling the first wiring layers with the first devices.
  6. 6. The current sensor of claim 1, wherein the first direction is perpendicular to the first surface of the substrate, the second direction and the third direction are parallel to the first surface of the substrate, the substrate being configured according to at least one of: The first conductor comprises a first conductor section extending along a second direction, and the magnetic sensing unit comprises a first sensing unit arranged at one side of the first conductor section in the opposite direction of the third direction; The magnetic sensing unit comprises a second sensing unit arranged at one side of the first conductor section in the third direction; the first conductor comprises a second conductor section extending along a third direction, a first end of the second conductor section is used for receiving current to be tested, and a second end of the second conductor section is coupled with the first end of the first conductor section; The first conductor comprises a third conductor section extending along a third direction, a first end of the third conductor section is coupled with a second end of the first conductor section, and the second end of the third conductor section is used for outputting current to be tested; The first end of the first conductor segment is the end of the first conductor segment in the opposite direction of the second direction, and the second end of the first conductor segment is the end of the first conductor segment in the second direction.
  7. 7. The current sensor of claim 6, wherein the substrate is configured according to at least one of: A third sensing unit and a magnetic field generating unit are arranged in the substrate, the third sensing unit is arranged at one side of the first direction of the first conductor, the sensing direction of the third sensing unit is parallel to the first direction, the magnetic field generating unit is used for generating a reference magnetic field, the third sensing unit is used for sensing the reference magnetic field to generate a third signal, and the third signal is used for calibrating the sensing signal of the magnetic sensing unit; The current sensor is used for calibrating the sensing signal of the magnetic sensing unit according to the difference between the third signal and a preset threshold value, and the preset threshold value is determined according to the preset magnetic field intensity of the reference magnetic field.
  8. 8. The current sensor of claim 6, wherein the substrate is configured according to at least one of: The first conductor comprises a fourth conductor segment extending in the second direction, the magnetic sensing unit comprises a first sensing unit arranged at one side of the fourth conductor segment in the third direction, The magnetic sensing unit comprises a fourth sensing unit arranged at one side of the fourth conductor section in the opposite direction of the third direction; the first conductor comprises a fifth conductor section extending along a third direction, a first end of the fifth conductor section is used for receiving current to be tested, and a second end of the fifth conductor section is coupled with a first end of the fourth conductor section; The first conductor comprises a sixth conductor segment extending in the second direction, the magnetic sensing unit comprises a second sensing unit arranged at one side of the sixth conductor segment opposite to the third direction, The magnetic sensing unit comprises a fifth sensing unit arranged at one side of the sixth conductor section in the third direction; The first conductor comprises a seventh conductor segment extending along a third direction, a first end of the seventh conductor segment is coupled to a second end of the sixth conductor segment, and the second end of the seventh conductor segment is used for outputting current to be measured.
  9. 9. The current sensor of claim 1, wherein the first direction is perpendicular to the first surface of the substrate, the second direction and the third direction are parallel to the first surface of the substrate, the substrate being configured according to at least one of: The first conductor comprises a first conductor segment, and the magnetic sensing unit comprises a first sensing unit arranged on one side of the first conductor segment in the direction parallel to the first surface of the substrate; The magnetic sensing unit comprises a second sensing unit which is arranged on the other side of the direction parallel to the first surface of the substrate of the first conductor section; a second conductor is arranged in the substrate, and the second conductor is at least partially positioned at one side of the first conductor in the first direction or the opposite direction; the first end of the first conductor is used for receiving current to be measured, and the second end of the first conductor is coupled with the first end of the second conductor; The second end of the second conductor is used for outputting current to be measured; A third conductor is arranged in the substrate and is at least partially positioned at one side of the second conductor in the first direction or the opposite direction; The second end of the second conductor is coupled with the first end of the third conductor; The second end of the third conductor is used for outputting current to be measured.
  10. 10. The current sensor of claim 9, wherein the substrate is configured according to at least one of: the second conductor is positioned at one side of the first conductor close to the magnetic sensing unit; The third conductor is positioned at one side of the second conductor close to the magnetic sensing unit; the substrate is provided with M wiring layers parallel to a first direction, and at least M1 wiring layers in the M wiring layers are used for forming the first conductor; at least M2 of the M wiring layers are used to form the second electrical conductor; at least M3 of the M wiring layers are used to form the third electrical conductor; An insulating layer is arranged between the first conductor and the second conductor, and a conductive unit is arranged in the insulating layer and is used for coupling the second end of the first conductor and the first end of the second conductor; A conductive unit is arranged in the insulating layer between the first conductor and the second conductor and is used for coupling other parts except for the end parts of the first conductor and the second conductor; An insulating layer is arranged between the second conductor and the third conductor, and a conductive unit is arranged in the insulating layer and is used for coupling the second end of the second conductor and the first end of the third conductor; An insulating layer between the second conductor and the third conductor is provided with a conductive unit for coupling other parts of the second conductor and the third conductor except for the end portions.
  11. 11. The current sensor of claim 9, wherein the substrate is configured according to at least one of: The first conductor includes a first conductor segment extending in a second direction, an eighth conductor segment extending in a third direction, a ninth conductor segment extending in an opposite direction to the second direction, a tenth conductor segment extending in an opposite direction to the third direction; the first conductor is used for forming at least a single-turn coil; The first sensing unit is arranged on one side of the first conductor section in the opposite direction of the third direction; the second conductor includes an eleventh conductor segment extending in a reverse direction of the third direction, a twelfth conductor segment extending in the second direction, a thirteenth conductor segment extending in the third direction, a fourteenth conductor segment extending in a reverse direction of the second direction, a fifteenth conductor segment extending in a reverse direction of the third direction; the second conductor is used for forming at least a single-turn coil; the first sensing unit is arranged on one side of the twelfth conductor section in the opposite direction to the third direction; The third conductor includes a sixteenth conductor segment extending in a direction opposite to the third direction, a seventeenth conductor segment extending in the second direction, an eighteenth conductor segment extending in the third direction, a nineteenth conductor segment extending in a direction opposite to the second direction; the third conductor is used for forming at least a single-turn coil; the first sensing unit is arranged on one side of the seventeenth conductor section in the opposite direction to the third direction; the second sensing unit is arranged at the hollow part formed by the single-turn coil.
  12. 12. The current sensor of claim 1, wherein the current sensor is configured according to at least one of: The substrate is provided with an electrode, and the electrode is coupled with the first conductor or the magnetic sensing unit; The current sensor comprises a lead wire, wherein the lead wire comprises a first lead wire segment for coupling an electrode and a second lead wire segment extending away from the substrate; the current sensor includes a package for packaging a substrate and a first lead segment.
  13. 13. The current sensor of claim 12, wherein the current sensor is configured according to at least one of: the leads are arranged at least at two sides of the substrate, and the second lead sections of the two leads at least comprise lead sections extending along the direction vertical to the first surface respectively; The first lead segment is coupled with the electrode through a wire bonding; the first lead segment is coupled with the electrode through a conductive bump; the first lead segment is coupled with the electrode through a welding pad and a solder ball.
  14. 14. The current sensor of claim 1, wherein the magnetic sensing unit comprises a hall unit.
  15. 15. The current sensor of claim 14, wherein the first direction is perpendicular to the first surface of the substrate, the second direction and the third direction are parallel to the first surface of the substrate, the current sensor configured according to at least one of: The magnetic sensing unit comprises a first sensing unit, the first sensing unit comprises a first Hall unit and a second Hall unit, the first end of the first Hall unit is coupled with a power supply end, the second end of the first Hall unit is coupled with a grounding end, the first end of the second Hall unit is coupled with the power supply end, the second end of the second Hall unit is coupled with the grounding end, the third end of the second Hall unit is coupled with the third end of the first Hall unit, the fourth end of the second Hall unit is coupled with the fourth end of the first Hall unit, The first and second ends of the first hall element are disposed along a third direction, The third and fourth ends of the first hall element are disposed along the second direction, The first and second ends of the second hall element are disposed along a second direction, The third end and the fourth end of the second Hall unit are arranged along a third direction; The magnetic sensing unit comprises a first sensing unit and a second sensing unit, the direction of the magnetic field component of the signal magnetic field at the first sensing unit is opposite to the direction of the magnetic field component of the signal magnetic field at the second sensing unit, the first sensing unit comprises a third Hall unit, the second sensing unit comprises a fourth Hall unit, The first end of the fourth Hall unit is coupled with the power supply end, the second end of the fourth Hall unit is coupled with the ground end, the third end of the fourth Hall unit is coupled with the fourth end of the third Hall unit, and the fourth end of the fourth Hall unit is coupled with the third end of the third Hall unit; The current sensor comprises a first amplifier, a second amplifier and an operation unit, wherein the first end of a third Hall unit is coupled with a power supply end, the second end of the third Hall unit is coupled with a grounding end, the third end of the third Hall unit is coupled with the first input end of the first amplifier, the fourth end of the third Hall unit is coupled with the second input end of the first amplifier, the second end of the fourth Hall unit is coupled with the power supply end, the second end of the fourth Hall unit is coupled with the grounding end, the third end of the fourth Hall unit is coupled with the first input end of the second amplifier, and the fourth end of the fourth Hall unit is coupled with the second input end of the second amplifier; The magnetic sensing unit comprises a first sensing unit, a second sensing unit and a fifth sensing unit, the direction of the magnetic field component of the signal magnetic field at the first sensing unit is opposite to the direction of the magnetic field component of the signal magnetic field at the second sensing unit and is the same as the direction of the magnetic field component of the signal magnetic field at the fifth sensing unit, the first sensing unit comprises a third Hall unit, the second sensing unit comprises a fourth Hall unit, the fifth sensing unit comprises a fifth Hall unit, The first end of the third Hall unit is coupled with the power supply end, the second end of the third Hall unit is coupled with the grounding end, the first end of the fourth Hall unit is coupled with the grounding end, the third end of the fourth Hall unit is coupled with the fourth end of the third Hall unit, the fourth end of the fifth Hall unit is coupled with the power supply end, the second end of the fifth Hall unit is coupled with the grounding end, the third end of the fifth Hall unit is coupled with the third end of the third Hall unit, and the fourth end of the fourth Hall unit is coupled with the fourth end of the third Hall unit.

Description

Current sensor Technical Field The utility model relates to the technical field of test and measurement, in particular to a current sensor. Background The current sensor is used for sensing current and has rich application scenes. The current sensing process may be based on the current magnetic effect, converted to sensing of a magnetic field, and thus, current sensing may be accomplished using a module that is sensitive to a magnetic field. In the prior art, when measuring the current in the energized conductor, the packaged current sensor is arranged close to the energized conductor, but the part of the current sensor sensitive to the magnetic field is always separated from the energized conductor by materials such as a package body, a substrate and the like, so that the distance between a current transmission path and the current sensor is large, the strength of the magnetic field generated by the current is weak at the current sensor, and the sensitivity of the current sensor to the current is low. In other schemes, in order to shorten the distance, the current sensor is configured into a metal loop structure and is used for measuring the magnetic flux change formed by the current in the electrified conductor so as to sense the current, but the technical scheme does not generate output on a steady-state current signal, if the steady-state current is required to be correspondingly generated, an integrating circuit is required to be matched, so that noise is introduced into the signal output, the output signal generates accumulated error, the measurement precision is lost, and the cost of the sensor is increased. Disclosure of utility model The utility model aims to provide a current sensor so as to solve the technical problems of low sensor sensitivity and poor measurement accuracy when steady-state current sensing is realized in the prior art. In order to achieve one of the above objects, an embodiment of the present utility model provides a current sensor, including a substrate, a magnetic sensing unit disposed on a first surface side of the substrate, and a first conductor disposed on a side of the magnetic sensing unit facing away from the substrate, wherein a portion of the first conductor is exposed to the substrate and is used for receiving a current to be measured, and the magnetic sensing unit is used for sensing a signal magnetic field corresponding to the current to be measured to generate a sensing signal. Compared with the prior art, the current sensor provided by the utility model has the advantages that the first conductor is arranged in the substrate, the conductor can be formed through the hierarchical structure in the substrate, and the strength of the signal magnetic field corresponding to the current to be detected at the magnetic sensing unit is enhanced based on the great shortening of the distance between the conductor for receiving the current to be detected and the magnetic sensing unit, so that the sensitivity of the current sensor is greatly improved. In addition, the electric conductor is arranged in the substrate, and can receive current through partial exposure, so that the whole volume of the device or the system can be effectively reduced, the device or the system can adapt to various packaging form requirements, no additional structure is required, and the packaging cost is reduced. Drawings Fig. 1 is a schematic diagram of a current sensor according to an embodiment of the present utility model. Fig. 2 is a schematic view of a substrate according to an embodiment of the present utility model. FIG. 3 is a graph showing the distance between a conductor and a magnetic sensing unit in a circuit sensor according to the prior art and the present utility model as a function of signal magnetic field strength. Fig. 4 is a schematic structural diagram of a first sensing unit according to an embodiment of the utility model. Fig. 5 is a schematic structural diagram of a magnetic sensor unit according to an embodiment of the present utility model. Fig. 6 is a schematic structural diagram of a magnetic sensing unit according to another embodiment of the present utility model. Fig. 7 is a schematic view of a substrate according to an embodiment of the present utility model. Fig. 8 is a schematic diagram of a current sensor according to an embodiment of the present utility model. Fig. 9 is a schematic diagram of a current sensor according to an embodiment of the utility model. Fig. 10 is another schematic view of a current sensor according to an embodiment of the present utility model. Fig. 11 is a schematic structural view of a magnetic sensor unit according to an embodiment of the present utility model. Fig. 12 is a schematic diagram of a current sensor according to an embodiment of the present utility model. Fig. 13 is a schematic view of a current sensor according to an embodiment of the present utility model. Fig. 14 is a schematic view of a current sensor according to an embodimen