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CN-224231903-U - Closed gas test cabin for probe station

CN224231903UCN 224231903 UCN224231903 UCN 224231903UCN-224231903-U

Abstract

The utility model discloses a closed gas test cabin for a probe station, which comprises a test cabin, a chip base, a sealing pressing mechanism and a probe, wherein the test cabin comprises a transparent observation plate and a cabin body, the cabin body is square, the cabin body is hollow, the top of the cabin body is connected with the transparent observation plate in a sealing way, the bottom of the cabin body is connected with the chip base in a detachable and sealing way, the centers of four side surfaces of the cabin body are respectively provided with a probe interface, the test end of the probe extends inwards into the cabin body through the probe interfaces, the center of the chip base is provided with a test groove for accommodating a chip, the chip to be detected is embedded in the test groove, the test end of the probe is contacted with a chip pin to test the chip, four corners of the cabin body are respectively provided with an installation plane, a group of opposite installation planes are provided with the sealing pressing mechanism, and the sealing pressing mechanism presses and seals the cabin body and the chip base at the bottom.

Inventors

  • ZUO JIALIN

Assignees

  • 建木电子(苏州)有限公司

Dates

Publication Date
20260512
Application Date
20250224

Claims (7)

  1. 1. The sealed gas test cabin for the probe station is characterized by comprising a test cabin, a chip base, a sealing pressing mechanism and a probe, wherein the test cabin comprises a transparent observation plate and a cabin body, the cabin body is square, the cabin body is hollow, the top of the cabin body is connected with the transparent observation plate in a sealing manner, the bottom of the cabin body is connected with the chip base in a detachable sealing manner, the centers of four side surfaces of the cabin body are respectively provided with a probe interface, the test end of the probe extends into the cabin body inwards through the probe interfaces, the center of the chip base is provided with a test groove for accommodating the chip, the chip to be detected is embedded in the test groove, the test end of the probe is contacted with the chip pins to test the chip, four corners of the cabin body are respectively provided with an installation plane, and a group of opposite installation planes are provided with the sealing pressing mechanism which presses and seals the cabin body and the chip base at the bottom.
  2. 2. The airtight gas test chamber for the probe station of claim 1, wherein TPU rubber sealing rings are arranged on the top surface and the bottom surface of the chamber body, and sealing oil is smeared on the TPU rubber sealing rings.
  3. 3. The sealed gas test cabin for the probe station, as set forth in claim 2, wherein the cabin body is provided with a connecting hole at the center of each of four sides, the probe interface is covered on the connecting hole from the outside, the probe interface is connected with the cabin body through a screw in a sealing manner, the probe interface comprises a flange chassis, a connecting cylinder and a flexible sealing plug, the flange chassis is connected to the side of the cabin body, one end of the connecting cylinder is connected to the flange chassis, the other end of the connecting cylinder is folded toward the center to form a small hole, the flexible sealing plug is embedded in the small hole, the center of the flexible sealing plug is provided with a jack corresponding to the diameter of the probe, and the probe extends inwards through the jack.
  4. 4. A closed gas test chamber for a probe station according to claim 3, wherein a gas inlet and outlet nozzle is provided on an installation plane of the corner of the chamber body, the inner end of the gas inlet and outlet nozzle extends into the chamber body, and the gas inlet nozzle can vacuumize the chamber body or input gas into the chamber body.
  5. 5. The sealed gas test chamber for a probe station of claim 4, wherein the chamber body is made of stainless steel and the transparent observation plate is made of toughened glass.
  6. 6. The sealed gas test chamber for the probe station as set forth in claim 5, wherein the sealing and pressing mechanism comprises a handle, a U-shaped locking arm and a pressing plate, wherein two opposite installation planes are respectively provided with a connecting piece, the bottom of the handle is hinged to the connecting piece, a movable shaft crossing the handle is arranged above the hinged part of the handle, two ends of the U-shaped locking arm are vertically and fixedly connected to two ends of the movable shaft, the handle is pulled from the top, the handle can drive the U-shaped locking arm to move up and down, the pressing plate is tightly attached to the bottom of the chip base, two ends of the pressing plate respectively extend into the U-shaped locking arms on two sides, and the handle rotates to drive the two U-shaped locking arms to move upwards to clamp, so that the chip base and the bottom of the chamber body are tightly pressed and fixed.
  7. 7. The sealed gas test chamber for a probe station of claim 6, wherein an observation microscope is arranged above the transparent observation plate, and the observation microscope can monitor lap joint and test conditions in the chamber in real time.

Description

Closed gas test cabin for probe station Technical Field The utility model belongs to the technical field of chip testing equipment, and particularly relates to a closed gas testing cabin for a probe station. Background The gas test chamber used for the chip sealing test is equipment used for testing the performance and reliability of the chip under a specific gas environment in the semiconductor manufacturing process. Such test pods require precise control of gas concentration, temperature, humidity, etc. parameters to simulate different environmental conditions. The existing gas test cabin mainly has the following defects that the tightness of the cabin body is poor, external air can enter, internal test gas can leak, the test result and even the safety problem are affected, the state of a chip in the test process is difficult to observe, the real-time monitoring in the test process is insufficient, high-precision cabin equipment is high in price and large in volume and is difficult to cooperate with probe platforms of various specifications, and meanwhile, the problems of difficult maintenance and high maintenance cost exist, so that improvement of the existing gas test cabin is needed. Disclosure of utility model Aiming at the problems and the technical requirements, the utility model provides the airtight gas test cabin for the probe station, which has small volume, wide use, good tightness and observability and is suitable for probe stations with various specifications. The technical scheme is that the airtight gas test cabin for the probe station comprises a test cabin, a chip base, a sealing pressing mechanism and probes, wherein the test cabin comprises a transparent observation plate and a cabin body, the cabin body is square and hollow, the top of the cabin body is connected with the transparent observation plate in a sealing manner, the bottom of the cabin body is detachably and hermetically connected with the chip base, the centers of four side surfaces of the cabin body are respectively provided with a probe interface, the test ends of the probes extend inwards into the cabin body through the probe interfaces, the center of the chip base is provided with a test groove for accommodating the chips, the chips to be tested are embedded in the test groove, the test ends of the probes are contacted with the chip pins to test the chips, four corners of the cabin body are respectively provided with an installation plane, a group of opposite installation planes are provided with the sealing pressing mechanism, and the sealing pressing mechanism presses and seals the space between the cabin body and the chip base at the bottom. In the scheme, the test cabin and the chip base are pressed to form a sealed test area, the probe extending into the four sides can test the chip inside, the test cabin is small in size and good in sealing effect, and the test cabin is suitable for operation of various probe platforms. Furthermore, TPU rubber sealing rings are arranged on the top surface and the bottom surface of the cabin body, and sealing oil is smeared on the TPU rubber sealing rings. The TPU rubber sealing ring and the sealing oil are adopted for coating, so that the sealing effect of the top and the bottom of the cabin body can be enhanced, and the conditions of internal gas leakage and insufficient vacuum degree are avoided. Further, a connecting hole is respectively formed in the centers of four sides of the cabin body, a probe interface covers the connecting hole from the outer side, the probe interface is connected with the cabin body in a sealing mode through screws, the probe interface comprises a flange base plate, a connecting cylinder and a flexible sealing plug, the flange base plate is connected to the side of the cabin body, one end of the connecting cylinder is connected to the flange base plate, the other end of the connecting cylinder is folded towards the center to form a small hole, the flexible sealing plug is embedded into the small hole, a jack corresponding to the diameter of the probe is arranged in the center of the flexible sealing plug, and the probe stretches inwards through the jack. The flexible sealing plug can be replaced according to the diameter of the probe, the probe is fixed in the process that the probe stretches inwards, and the butt joint precision of the probe and the chip is improved. Further, a gas inlet and outlet pipe orifice is arranged on one mounting plane of the corner of the cabin body, the inner end of the gas inlet and outlet pipe orifice extends into the cabin body, and the gas inlet pipe orifice can vacuumize the cabin body or input gas into the cabin body. Furthermore, the cabin body is made of stainless steel, and the transparent observation plate is made of toughened glass. The toughened glass material has very high strength and good visibility, and can conveniently observe the contact condition of the internal probe and the chip while ensuring the struct