CN-224231990-U - Substrate surface foreign matter detection device

Abstract

The utility model provides a substrate surface foreign matter detection device, which belongs to the technical field of substrate detection devices, and comprises a cooling platform and a cooling plate for placing a substrate, wherein the cooling plate is arranged on the cooling platform and comprises a light beam blocking sensor, a sliding rail positioning sheet, a gap sensor and a transfer assembly, the light beam blocking sensor comprises an infrared emitter and an infrared receiver, the infrared emitter and the infrared receiver are respectively arranged on two sides of the cooling plate, and the transfer assemblies for moving the infrared emitter and the infrared receiver are respectively arranged on two sides of the cooling platform.

Inventors

• SHI YONGKANG
• FENG XIAOMENG
• XU YACHEN
• YE ZIYUN
• YIN JINLIN

Assignees

• 南京迪视泰光电科技有限公司

Dates

Publication Date

20260512

Application Date

20250716

Claims (8)

1. 1. The device for detecting the foreign matters on the surface of the substrate comprises a cooling platform and a cooling plate for placing the substrate, wherein the cooling plate is arranged on the cooling platform and is characterized by comprising a light beam interruption type sensor, a slide rail positioning piece, a gap sensor and a transfer assembly, wherein the light beam interruption type sensor comprises an infrared emitter and an infrared receiver which are respectively arranged on two sides of the cooling plate, the two sides of the cooling platform are respectively provided with the transfer assembly for moving the infrared emitter and the infrared receiver, the two ends of the transfer assembly are respectively provided with the slide rail positioning piece, the slide rail positioning piece is arranged above the substrate, and the gap sensor is arranged above the slide rail positioning piece.
2. 2. The device for detecting foreign matters on a substrate surface according to claim 1, wherein the slide rail positioning plate is made of transparent glass sheets with smooth upper and lower surfaces.
3. 3. The apparatus for detecting foreign matter on a substrate surface according to claim 1, wherein the infrared emitter emits infrared rays, the infrared receiver receives infrared rays, and the bottom surface of the slide rail positioning piece are positioned at the same height.
4. 4. The apparatus for detecting foreign matter on a substrate surface according to any one of claims 1 to 3, wherein the transfer assembly comprises a horizontal transfer assembly, a vertical transfer assembly, and a slide assembly, both ends of the slide assembly are respectively disposed on the vertical transfer assembly, and the vertical transfer assembly is vertically disposed on the horizontal transfer assembly.
5. 5. The device for detecting foreign matters on the surface of a substrate according to claim 4, wherein the sliding assembly comprises a sliding motor, a ball screw, a sliding table and a shell, sliding rail positioning pieces are respectively arranged at two ends of the shell, the ball screw is arranged in the shell, two ends of the ball screw are movably connected with the shell, the ball screw is driven by the sliding motor, the sliding table is arranged on a nut of the ball screw, the shell is provided with an opening for moving the sliding table, and the sliding table is provided with an infrared emitter or an infrared receiver.
6. 6. The apparatus of claim 4, wherein the cooling stage is provided with a moving member for moving the gap sensor, the moving member including a vertical moving member and a horizontal moving member, the horizontal moving member being provided on the vertical moving member.
7. 7. The apparatus for detecting foreign matter on a substrate surface according to claim 6, wherein the horizontal transfer member, the vertical transfer member, and the horizontal transfer member each employ a linear transmission mechanism.
8. 8. The apparatus of claim 6, wherein the gap sensor is connected to an input of a controller, and an output of the controller is connected to the light beam interruption sensor, the transfer assembly, and the moving assembly, respectively.

Description

Substrate surface foreign matter detection device Technical Field The utility model relates to a substrate surface foreign matter detection device, and belongs to the technical field of substrate detection devices. Background PMOLED (Passive Matrix OLED) is a passive matrix organic light emitting display, which is used in a wider and wider range of fields. In the yellow light production and manufacturing process, a mask plate is covered on the surface of glass coated with photoresist, and selective irradiation is carried out by ultraviolet light, so that the photoresist at the illuminated part is subjected to chemical reaction, and the solubility of the part of the adhesive film in a developing solution is changed. After development, the photoresist develops a pattern corresponding to the mask. Positive-transition photoresists are required in the fabrication of metal or ITO patterns. Firstly, photoresist with the shape required by the process is left on the substrate after exposure and development, then the metal layer or the ITO layer becomes a photoresist protection pattern after baking and etching, and then the photoresist is removed by an alkaline agent. Finally, baking the substrate with the pattern, and etching and photoresist removing to complete all the working procedures of the current process. In the production and manufacture of yellow metal or ITO (indium tin oxide) manufacturing process, if a substrate has larger foreign matters on the film surface after gluing, spin coating and pre-baking, leakage points appear on the pattern at the corresponding position after development, and then pattern missing or side etching is caused during etching. In addition, there is a possibility that foreign matters adhere to the reticle at the time of exposure. In the process of PMLOED yellow light, the photoresist film surface is adhered with foreign matters to cause bad products, including various defects such as wire breakage of metal wires, side etching of metal wires, ITO array connection, black spots of pixel areas in the surface, and the like. The cleaning of the cleaner at regular intervals to all equipment before exposure and the cleaning of the glue applicator head before glue application cannot completely avoid this abnormal situation. At present, whether the foreign matters exist on the film-coated surface of the substrate before development under a strong light is inspected by a human eye in a spot mode generally, but the efficiency is low under a large number of continuous production modes, and the substrate with the bad foreign matters on the film surface is easily missed. Disclosure of utility model The utility model aims to provide a substrate surface foreign matter detection device which solves the problems of low efficiency and easy omission in detection of substrate surface foreign matters in the prior art. The technical scheme of the utility model is as follows: The utility model provides a base plate surface foreign matter detection device, including cooling platform and the cooling plate that is used for placing the base plate, the cooling plate is located on the cooling platform, including light beam interruption type inductor, slide rail spacer, gap sensor and transfer the subassembly, light beam interruption type inductor includes infrared transmitter and infrared receiver, infrared transmitter and infrared receiver locate the both sides of cooling plate respectively, cooling platform's both sides are equipped with the transfer subassembly that removes infrared transmitter and infrared receiver respectively, transfer the both ends of subassembly and are equipped with the slide rail spacer respectively, and the slide rail spacer locates the top of base plate, gap sensor locates the top of slide rail spacer. Further, the slide rail locating plate adopts a transparent glass plate with smooth upper and lower surfaces. Further, the infrared emitter emits infrared rays, the infrared receiver receives the infrared rays and the bottom surface of the slide rail positioning sheet are positioned at the same height. Further, the transfer assembly comprises a horizontal transfer assembly, a vertical transfer assembly and a sliding assembly, wherein two ends of the sliding assembly are respectively arranged on the vertical transfer assembly, and the vertical transfer assembly is vertically arranged on the horizontal transfer assembly. Further, the slip subassembly includes motor, ball, slip table and shell slide, and the both ends of shell are equipped with slide rail spacer respectively, and ball locates in the shell, and ball's both ends swing joint shell, and ball is by motor drive that slides, and the slip table is located on ball's the nut, and the shell is equipped with the opening that is used for the slip table to remove, and the slip table is equipped with infrared transmitter or infrared receiver. Further, the cooling platform is provided with a moving assembly for moving the gap sensor, the