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CN-224232100-U - LED light source structure for photoetching machine

CN224232100UCN 224232100 UCN224232100 UCN 224232100UCN-224232100-U

Abstract

The utility model discloses an LED light source structure for a photoetching machine, which relates to the technical field of photoetching machine light sources and comprises a heat sink heat dissipation part, wherein a light source plate is arranged below the heat sink heat dissipation part, an optical collimating part is arranged below the light source plate, a focusing assembly is arranged below the optical collimating part, a heat dissipation water tank is arranged inside the heat sink heat dissipation part, an e-shaped water tank partition plate for partitioning the heat dissipation water tank into a unidirectional water channel is arranged inside the heat dissipation water tank, a plurality of heat conducting columns are arranged on the inner wall of the lower bottom of the heat dissipation water tank, a sealing cover is arranged above the heat sink heat dissipation part, and a water outlet pipe interface and a water inlet pipe interface are arranged on the upper surface of the sealing cover. The problems that the existing light source structure is more in heat dissipation components and inconvenient to maintain, water flow cannot be guided inside, and the light path collimation is poor due to the fact that the existing light source structure is not provided with an optical collimation component are solved.

Inventors

  • TAN JUN
  • PANG CHAOQUN
  • ZHU KAI

Assignees

  • 张家港奇点光电科技有限公司

Dates

Publication Date
20260512
Application Date
20250624

Claims (7)

  1. 1. The LED light source structure for the photoetching machine comprises a heat sink heat dissipation part (1) and is characterized in that a light source plate (2) is arranged below the heat sink heat dissipation part (1), an optical collimating part (3) is arranged below the light source plate (2), and a focusing assembly (4) is arranged below the optical collimating part (3).
  2. 2. The LED light source structure for the photoetching machine according to claim 1, wherein a heat dissipation water tank (104) is arranged in the heat sink heat dissipation part (1), an e-shaped water tank partition plate (105) for dividing the heat dissipation water tank (104) into one-way water channels is arranged in the heat dissipation water tank (104), and a plurality of heat conduction columns (106) are arranged on the inner wall of the lower bottom of the heat dissipation water tank (104).
  3. 3. The LED light source structure for the photoetching machine according to claim 2, wherein a sealing cover (101) is arranged above the heat sink radiating piece (1), a water outlet pipe interface (102) and a water inlet pipe interface (103) are arranged on the upper surface of the sealing cover (101), the water outlet pipe interface (102) and the water inlet pipe interface (103) are respectively positioned at two ends of a unidirectional water channel, and the water outlet pipe interface (102) and the water inlet pipe interface (103) are connected with the water cooling machine through pipelines.
  4. 4. The LED light source structure for a lithography machine according to claim 1, wherein the light source plate (2) comprises a copper substrate (201), and a plurality of LED lamp beads (202) are mounted on the lower surface of the copper substrate (201).
  5. 5. An LED light source structure for a lithographic machine according to claim 1, characterized in that the optical collimator (3) comprises a first mounting plate (301), a first optical collimator (302) being mounted in a middle position of the first mounting plate (301).
  6. 6. An LED light source structure for a lithographic apparatus according to claim 5, wherein a second mount plate (303) is mounted below said first mount plate (301), a second optical collimator (304) is mounted in the middle of said second mount plate (303), said second optical collimator (304) being smaller than said first optical collimator (302).
  7. 7. An LED light source structure for a lithography machine according to claim 6, wherein said focusing assembly (4) comprises a mount (401), said mount (401) being mounted on the lower surface of the second mount (303), and a focusing mirror (402) being mounted at an intermediate position of the lower end of said mount (401).

Description

LED light source structure for photoetching machine Technical Field The utility model relates to the technical field of photoetching machine light sources, in particular to an LED light source structure for a photoetching machine. Background The photoetching machine, also called a mask alignment exposure machine, an exposure system, a photoetching system and the like, is core equipment for manufacturing chips, adopts a photo-printing-like technology, prints fine patterns on a mask plate on a silicon wafer through light exposure, and when the photoetching machine is used, light rays are required to be emitted through a light source device, so that the specially treated silicon wafer is irradiated, and the purpose of etching the silicon wafer is achieved. For example, the publication number CN210954608U is named as a photoetching machine light source device, the photoetching machine light source device comprises a cooling device, and further comprises a layered inner partition plate, a cooling plate III, a cooling plate IV, a circulating water channel plate B, a cooling plate V, a cooling plate VI, a circulating water channel plate C and a water outlet pipe, wherein one end of the cooling plate V is fixedly connected with the cooling plate IV through a screw, the other end of the cooling plate V is fixedly connected with the cooling plate VI through a screw, one end of the cooling plate V is fixedly connected with the layered inner partition plate through a screw, one end of the cooling plate IV is fixedly connected with the cooling plate III through a screw, one side of the layered inner partition plate is fixedly connected with the water outlet pipe flange, one side of the cooling plate III is fixedly connected with the circulating water channel plate B through a screw, one side of the cooling plate V is fixedly connected with the circulating water channel plate C through a screw, and one side of the cooling plate V is fixedly connected with the circulating water channel plate C through a screw. When the conventional light source structure is used, the defects that 1, the light source structure is provided with a heat dissipation structure, but the heat dissipation structure has more components, the maintenance is inconvenient, water flow cannot be guided inside, and 2, the light source structure is not provided with an optical collimation component, so that the light path collimation is poor, the conventional requirement is not met, and an LED light source structure for a photoetching machine is provided. Disclosure of utility model The utility model aims to provide an LED light source structure for a photoetching machine, which solves the problems that the prior light source structure proposed in the background art is provided with a heat dissipation structure, but the heat dissipation structure has a plurality of components, is inconvenient to maintain and cannot guide water flow inside. The LED light source structure for the photoetching machine comprises a heat sink radiating piece, wherein a light source plate is arranged below the heat sink radiating piece, an optical collimating piece is arranged below the light source plate, and a focusing assembly is arranged below the optical collimating piece. Preferably, a heat dissipation water tank is arranged in the heat sink heat dissipation part, an e-shaped water tank partition plate used for dividing the heat dissipation water tank into one-way water channels is arranged in the heat dissipation water tank, and a plurality of heat conduction columns are arranged on the inner wall of the lower bottom of the heat dissipation water tank. Preferably, a sealing cover is arranged above the heat sink radiating piece, a water outlet pipe interface and a water inlet pipe interface are arranged on the upper surface of the sealing cover, the water outlet pipe interface and the water inlet pipe interface are respectively positioned at two ends of the unidirectional water channel, and the water outlet pipe interface and the water inlet pipe interface are connected with the water cooling machine through pipelines. Preferably, the light source plate comprises a copper substrate, and a plurality of LED lamp beads are mounted on the lower surface of the copper substrate. Preferably, the optical alignment member includes a first mounting plate, and a first optical alignment mirror is mounted at a middle position of the first mounting plate. Preferably, a second mounting plate is mounted below the first mounting plate, and a second optical collimating lens is mounted at a middle position of the second mounting plate, and the second optical collimating lens is smaller than the first optical collimating lens. Preferably, the focusing assembly comprises a mounting seat, the mounting seat is arranged on the lower surface of the second mounting plate, and a focusing lens is arranged at the middle position of the lower end of the mounting seat. Compared with the prior art, the ut