CN-224232456-U - Common mode inductor, filter circuit and semiconductor process equipment

Abstract

The application relates to the technical field of inductors, and discloses a common-mode inductor, a filter circuit and semiconductor process equipment. The common mode inductor comprises a magnetic core and two groups of inductance harnesses, wherein the two groups of inductance harnesses are wound on the magnetic core in parallel, each inductance harness comprises a wrapping sleeve and at least two groups of inductance wires, the wrapping sleeve wraps and fixes the inductance wires, and two ends of each inductance wire extend from two ends of the wrapping sleeve respectively. The embodiment of the application can adapt to more application scenes and reduce the complexity of the manufacturing process of the common-mode inductor.

Inventors

• YANG PEIZHENG
• HUANG XIAODONG

Assignees

• 深圳市恒运昌真空技术股份有限公司

Dates

Publication Date

20260512

Application Date

20250512

Claims (12)

1. 1. A common mode inductor comprising a magnetic core and two groups of inductive strands; The two groups of inductance harnesses are wound on the magnetic core in parallel; The inductance harness comprises a wrapping sleeve and at least two groups of inductance wires, the inductance wires are wrapped and fixed by the wrapping sleeve, and two ends of the inductance wires extend from two ends of the wrapping sleeve respectively.
2. 2. The common mode inductor of claim 1, wherein the number of cores is at least two, each of the cores is stacked, and two groups of the inductance strands are wound around each of the cores.
3. 3. The common-mode inductor of claim 1, further comprising: A mounting seat provided with a mounting cavity, and The assembly column is arranged in the assembly cavity and is in nested fit with the magnetic core.
4. 4. A common mode inductor according to claim 3, wherein the mounting socket comprises: fitting part for opening the fitting cavity, and And a stopper detachably connected to the fitting and shielding an end of the fitting post when connected to the fitting.
5. 5. A common mode inductor according to claim 3, wherein the mounting socket and/or the mounting post is made of teflon material.
6. 6. The common mode inductor of claim 1, wherein a terminal is connected to an end of the inductor line.
7. 7. The common mode inductor according to any one of claims 1 to 6, wherein each set of the inductance strands comprises six sets of the inductance strands.
8. 8. A filter circuit, comprising: The common mode inductor of any one of claims 1 to 7, and And the at least two groups of differential mode filtering topologies are respectively connected with one group of inductance wires in one inductance wire harness and one group of inductance wires in the other inductance wire harness.
9. 9. The filter circuit of claim 8, further comprising: And a bypass common mode filtering topology connected with one differential mode filtering topology.
10. 10. A semiconductor processing apparatus, comprising: Ac load, and The filter circuit of claim 8 or 9, connected to the ac load, for switching in an external ac source and outputting a filtered ac signal to the ac load.
11. 11. The semiconductor processing apparatus of claim 10, further comprising a radio frequency power source and a reaction chamber, wherein the radio frequency power source is configured to provide power for plasma excitation in the reaction chamber, the number of ac sources is the same as the number of ac loads, and the ac sources and the ac loads are connected in a pair-wise matching manner through the filter circuit.
12. 12. The semiconductor process apparatus of claim 10, further comprising a radio frequency power source and a reaction chamber, the radio frequency power source configured to provide power for plasma excitation within the reaction chamber, the number of ac sources being less than the number of ac loads, the ac sources being connected to one set of ac loads through the filter circuit or to several sets of ac loads through a splitter and the filter circuit.

Description

Common mode inductor, filter circuit and semiconductor process equipment Technical Field The application relates to the technical field of inductors, in particular to a common mode inductor, a filter circuit and semiconductor process equipment. Background When the input end of the load is connected to the alternating current source, a common mode inductor is usually connected to reduce common mode noise interference in the alternating current source, so that the load meets the requirement of electromagnetic compatibility (EMC). In the related art, a common mode inductor is obtained by winding one or more pairs of inductor wires around the same core. However, the common mode inductor manufactured by a pair of inductors can only perform common mode filtering on one alternating current source, so that the application scene is less, the common mode inductor manufactured by a plurality of pairs of inductor wires can be manufactured and completed by winding for a plurality of times, and the winding process of the inductor wires is time-consuming. Disclosure of utility model The application aims to provide a common-mode inductor, a filter circuit and semiconductor process equipment, and aims to solve the technical problems that the common-mode inductor is less in application scene and the process of winding an inductance wire is more time-consuming. The embodiment of the application provides a common mode inductor, which comprises a magnetic core and two groups of inductance harnesses; The two groups of inductance harnesses are wound on the magnetic core in parallel; The inductance harness comprises a wrapping sleeve and at least two groups of inductance wires, the inductance wires are wrapped and fixed by the wrapping sleeve, and two ends of the inductance wires extend from two ends of the wrapping sleeve respectively. In one embodiment, the number of the magnetic cores is at least two, each magnetic core is stacked, and two groups of the inductance harnesses are wound on each magnetic core. In one embodiment, the common mode inductor further comprises: A mounting seat provided with a mounting cavity, and The assembly column is arranged in the assembly cavity and is in nested fit with the magnetic core. In one embodiment, the mounting base comprises: fitting part for opening the fitting cavity, and And a stopper detachably connected to the fitting and shielding an end of the fitting post when connected to the fitting. In one embodiment, the mounting base and/or the mounting post are made of teflon material. In one embodiment, a connection terminal is connected to an end of the inductance wire. In one embodiment, each set of said inductor bundles comprises six sets of said inductor wires. The embodiment of the application also provides a filter circuit, which comprises: the common mode inductor described above, and And the at least two groups of differential mode filtering topologies are respectively connected with one group of inductance wires in one inductance wire harness and one group of inductance wires in the other inductance wire harness. In one embodiment, the filter circuit further comprises: And a bypass common mode filtering topology connected with one differential mode filtering topology. The embodiment of the application also provides semiconductor process equipment, which comprises the following steps: Ac load, and The filtering circuit is connected with the alternating current load and is used for accessing an external alternating current source and outputting a filtered alternating current signal to the alternating current load. In one embodiment, the semiconductor process equipment further comprises a radio frequency power supply and a reaction cavity, wherein the radio frequency power supply is used for providing power for plasma excitation in the reaction cavity, the number of alternating current sources is the same as that of the alternating current loads, and the alternating current sources and the alternating current loads are connected in a matching mode through the filter circuit. In one embodiment, the semiconductor process equipment further comprises a radio frequency power supply and a reaction cavity, wherein the radio frequency power supply is used for providing power for plasma excitation in the reaction cavity, the number of the alternating current sources is smaller than that of the alternating current loads, and the alternating current sources are connected with one group of the alternating current loads through the filter circuit or connected with a plurality of groups of the alternating current loads through a splitter and the filter circuit. The application has the beneficial effects that the common-mode inductor can be used as at least two inductors with the same specification by adopting a winding structure that two groups of inductance wire bundles fixed with at least two groups of inductance wires are wound on the magnetic core, is suitable for common-mode filtering of at le