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CN-224233133-U - Gradual change Vcsel laser

CN224233133UCN 224233133 UCN224233133 UCN 224233133UCN-224233133-U

Abstract

A gradual change Vcsel laser is characterized in that an anode bonding pad is arranged on the outer side of the upper surface, an array luminous hole is arranged in the central area, a cathode bonding pad is arranged at the bottom, a polarization wire grid is covered on the surface of the luminous hole, and the gain of a Vcsel-hole resonant cavity is modulated through the direction of the polarization wire grid, so that brightness gradual change is realized. According to the utility model, the polarization wire grid with gradually changed directions is integrated on the surface of the light emitting hole, the modulation effect of the polarization wire grid on the gain of the Vcsel resonant cavity is utilized, the brightness gradient control on the single chip level is realized, no additional external optical element is needed, and the diversified requirements can be met.

Inventors

  • HUANG RUIBIN
  • LV FANGLU
  • ZHU LI
  • WANG BO

Assignees

  • 深圳市光鉴科技有限公司
  • 重庆光鉴傲深科技有限公司

Dates

Publication Date
20260512
Application Date
20250611

Claims (10)

  1. 1. A gradual change Vcsel laser is characterized in that the outer side of the upper surface is provided with an anode bonding pad, the central area is provided with an array luminous hole, and the bottom is provided with a cathode bonding pad; The surface of the luminous hole is covered with a polarized wire grid, and the gain of the Vcsel hole resonant cavity is modulated by the direction of the polarized wire grid, so that the brightness gradient is realized.
  2. 2. A graded Vcsel laser as in claim 1 wherein the anode pads are of annular configuration and are disposed around the array of light emitting holes and the anode pads have a width of between 0.5mm and 2mm to optimize current distribution and improve laser operational stability.
  3. 3. A graded Vcsel laser as claimed in claim 1 wherein the array of light emitting holes is arranged in a regular rectangular array with a spacing between adjacent light emitting holes of between 10 μm and 50 μm.
  4. 4. The graded Vcsel laser of claim 1, wherein the cathode pad has a planar structure with a larger area than the anode pad, and the cathode pad is tightly connected to the substrate by a conductive adhesive or a metal solder layer to ensure good electrical connection and heat dissipation.
  5. 5. A graded Vcsel laser as in claim 1 wherein the polarizing wire grid is made of a metallic material, the metallic material being one or a combination of aluminum, gold or copper, the line width of the polarizing wire grid being between 50nm and 100nm and the line spacing being between 100nm and 200 nm.
  6. 6. A graded Vcsel laser as in claim 1 wherein the polarizing wire grid is oriented at an angle of between 0 ° and 45 ° to the axis of the light emitting aperture.
  7. 7. A graded Vcsel laser as in claim 1 wherein the linewidth and linespacing of the polarizing wire grids at the surface of at least two of the array of light emitting holes are different.
  8. 8. The graded Vcsel laser of claim 1, wherein the anode pad and the cathode pad are provided with pins for connection with an external circuit, the pins are made of metal, and the surfaces of the pins are plated with gold or nickel.
  9. 9. The gradient Vcsel laser as set forth in claim 8, wherein the number of pins on the anode pad is related to the number of rows or columns of the array luminous holes, and when the array luminous holes are m rows and n columns, the number of pins on the anode pad is m+n-1, and by means of the combined connection of different pins, the different grouping and the independent control of the areas of the array luminous holes can be realized, so that the brightness gradient effect is further optimized.
  10. 10. A graded Vcsel laser as in claim 1 further comprising an encapsulation layer disposed on the outside of the upper surface, the encapsulation layer being made of a transparent or translucent epoxy, silicone or glass material, the encapsulation layer completely covering the anode pads, the array light emitting holes and the polarizing wire grid.

Description

Gradual change Vcsel laser Technical Field The utility model relates to the technical field of Vcsel lasers, in particular to a gradual change Vcsel laser. Background As an important semiconductor laser, a Vertical cavity surface emitting laser (Vertical-CavitySurface-EMITTINGLASER, vcsel) has the advantages of low threshold current, circular output beam, two-dimensional integration and the like, and is widely applied to the fields of optical communication, 3D sensing, laser radar (LiDAR) and the like. However, conventional Vcsel arrays face the following technical challenges in practical applications: 1. Application limitations caused by uniform light emission in conventional Vcsel arrays, the output power and polarization characteristics of each light-emitting unit are generally uniform. However, in many emerging applications (e.g., structured light projection, 3D depth sensing, beam shaping, etc.), it is desirable to achieve spatial modulation of the light field, such as to produce a specific brightness gradient, spot profile, or polarization distribution. Conventional uniform light-emitting Vcsel arrays are difficult to directly meet these requirements, often require additional optical elements (e.g., diffractive optical elements DOE, polarizers, etc.) for secondary modulation, result in increased system complexity, increased cost, and may introduce additional energy losses. 2. The output polarization characteristics of the coupling problem Vcsel of polarization control to the cavity gain is critical to its performance, for example, in some 3D sensing systems, a beam of a specific polarization direction is required to improve immunity to interference. However, the polarization direction of conventional Vcsel is generally determined by process randomness, is difficult to control precisely, and has poor polarization uniformity among different light emitting units. In addition, the coupling relation between the gain of the resonant cavity and the polarization direction is complex, and how to realize accurate modulation of the luminous intensity through polarization regulation is a technical problem to be solved in the field. 3. The challenges of integration and miniaturization demand are increasing with the increasing demands of miniaturization and integration of 3D sensing systems in the fields of consumer electronics, autopilot, etc., and the separate design of the conventional Vcsel and external optical elements is becoming a bottleneck. The Vcsel technology capable of directly realizing brightness gradual change and polarization control on a chip level is developed, and has important significance for simplifying a system architecture, reducing cost and improving reliability. The foregoing background is only for the purpose of providing an understanding of the inventive concepts and technical aspects of the present utility model and is not necessarily prior art to the present application and is not intended to be used as an aid in the evaluation of the novelty and creativity of the present utility model in the event that no clear evidence indicates that such is already disclosed at the date of filing of the present application. Disclosure of utility model Therefore, the polarization wire grid gradually changing in the direction is integrated on the surface of the light emitting hole, the modulation effect of the polarization wire grid on the Vcsel resonant cavity gain is utilized, the brightness gradient control on the single-chip level is realized, an additional external optical element is not needed, and the diversified requirements can be met. The utility model provides a gradual change Vcsel laser which is characterized in that the outer side of the upper surface is provided with an anode bonding pad, the central area is provided with an array luminous hole, and the bottom is provided with a cathode bonding pad; The surface of the luminous hole is covered with a polarized wire grid, and the gain of the Vcsel hole resonant cavity is modulated by the direction of the polarized wire grid, so that the brightness gradient is realized. Optionally, the graded Vcsel laser is characterized in that the anode pad is in a ring structure and is arranged around the array luminous holes, and the width of the anode pad is between 0.5mm and 2mm, so as to optimize current distribution and improve working stability of the laser. Optionally, the gradual change Vcsel laser is characterized in that the array luminous holes are arranged in a regular rectangular array, and the interval between the adjacent luminous holes is 10-50 μm. Optionally, the graded Vcsel laser is characterized in that the cathode pad has a planar structure, the area is larger than that of the anode pad, and the cathode pad is tightly connected with the substrate through conductive adhesive or a metal welding layer, so as to ensure good electrical connection and heat dissipation performance. Optionally, the graded Vcsel laser is characterized in tha