CN-224233486-U - Driving mechanism of UV chamber and process chamber thereof

Abstract

The utility model discloses a driving mechanism of an Ultraviolet (UV) chamber and a process chamber thereof, wherein the driving mechanism comprises a driven gear and a driving module, wherein the driven gear is rotatably connected with the ultraviolet chamber, and the driving module is used for driving the driven gear to rotate; the driving module comprises a driving motor and a driving gear connected to an output shaft of the driving motor, the driving gear is meshed with the driven gear, the driven gear is used for driving the UV lamp, a light passing hole is formed in the middle of the driven gear, the driving motor drives the driving gear to synchronously drive the driven gear, and therefore ultraviolet light emitted by the UV lamp controlled by the driven gear is irradiated into the ultraviolet cavity through the light passing hole in a rotating mode. The driving module adopts driving motor and driving gear, and driven gear meshes in the driving gear to improve UV lamp rotary drive into gear drive structure, compare in current belt drive, its life-span is longer, and the operation is more reliable and stable, has reduced maintenance cost, has improved equipment normal operating duration, has improved machining efficiency.

Inventors

• Yu Aixue
• SONG WENZHUO

Assignees

• 拓荆创益(沈阳)半导体设备有限公司

Dates

Publication Date

20260512

Application Date

20250530

Claims (10)

1. 1. The driving mechanism of the UV chamber is characterized by comprising a driven gear rotatably connected with the UV chamber and a driving module used for driving the driven gear to rotate; the driving module comprises a driving motor and a driving gear connected to an output shaft of the driving motor, and the driving gear is meshed with the driven gear; The driven gear is used for driving the UV lamp, a light passing hole is formed in the middle of the driven gear, the driving motor drives the driving gear to synchronously drive the driven gear, and ultraviolet light emitted by the UV lamp controlled by the driven gear passes through the light passing hole to rotate and irradiate in the ultraviolet cavity.
2. 2. The driving mechanism of a UV chamber according to claim 1, wherein a rotation guide groove is provided on the driven gear, a rotation positioning ring corresponding to the rotation guide groove is provided on the UV chamber, and the rotation positioning ring is inserted into the rotation guide groove.
3. 3. The drive mechanism of a UV chamber according to claim 1, wherein the driven gear comprises an annular body, a tooth opening arranged on an outer annular wall of the annular body, and an annular step part arranged on an inner annular wall of the annular body, and a positioning annular part corresponding to the annular step part is arranged on the UV chamber.
4. 4. A UV chamber drive mechanism according to any one of claims 1 to 3, wherein the drive module is provided with one set and the UV chamber controlled to rotate by the drive module is provided with two sets, the drive module being located between the two sets of UV chambers.
5. 5. A driving mechanism for a UV chamber according to any one of claims 1 to 3, wherein the driving modules are provided with at least two groups, the number of the UV chambers is the same as that of the driving modules, and each group of the driving modules drives one group of the UV chambers.
6. 6. The UV chamber drive mechanism of claim 1, wherein the driven gear and the driving gear are disposed at equal heights in a horizontal plane.
7. 7. A process chamber comprising a UV chamber drive mechanism according to any one of claims 1 to 6.
8. 8. The process chamber of claim 7, further comprising a UV lamp connected to the driven gear.
9. 9. The process chamber of claim 8, wherein the UV lamp is disposed above a drive mechanism of the UV chamber.
10. 10. The process chamber of claim 9, wherein the UV lamp emits light toward the light passing aperture.

Description

Driving mechanism of UV chamber and process chamber thereof Technical Field The utility model relates to the technical field of thin film deposition equipment, in particular to a driving mechanism of a UV (ultraviolet) chamber and a process chamber thereof. Background In a semiconductor device, a thin film deposition apparatus is mainly used to deposit a thin film on a wafer surface. The surface of the thin film needs to be solidified by a light source in the thin film deposition process. Generally, a UV lamp is used for curing the wafer surface film, but the light source of the existing UV lamp is generally a lamp tube, the light emitted by the lamp tube is linear light, and the wafer surface cannot be uniformly irradiated in a static state, so that the curing effect is uneven. In order to solve the problems in the prior art, a driving mechanism is adopted to drive a light source to rotate, so that the rotary irradiation of the wafer is realized. The existing driving mechanism generally adopts a transmission structure of a motor, a belt and a belt pulley, and the transmission structure has the defects that the belt is easy to deform, fall off or break due to uneven stress, consumable use is increased, meanwhile, the equipment downtime is longer due to frequent replacement of the belt, the equipment online operation time is influenced, and the maintenance labor cost is increased. Disclosure of utility model The utility model aims to overcome the defects of the prior art, and provides a driving mechanism of a UV chamber and a process chamber thereof, so as to solve the technical problems of low efficiency and high cost of the conventional UV lamp transmission mode. In order to achieve the above purpose, the present utility model adopts the following technical scheme: in a first aspect, embodiments of the present utility model provide a driving mechanism of a UV chamber, comprising a driven gear rotatably connected to an ultraviolet chamber and a driving module for driving the driven gear to rotate; the driving module comprises a driving motor and a driving gear connected to an output shaft of the driving motor, and the driving gear is meshed with the driven gear; The driven gear is used for driving the UV lamp, a light passing hole is formed in the middle of the driven gear, the driving motor drives the driving gear to synchronously drive the driven gear, and ultraviolet light emitted by the UV lamp controlled by the driven gear passes through the light passing hole to rotate and irradiate in the ultraviolet cavity. The ultraviolet chamber is provided with a rotary positioning ring corresponding to the rotary guide groove, and the rotary positioning ring is inserted into the rotary guide groove. The driven gear comprises an annular body, a tooth opening and an annular step part, wherein the tooth opening is arranged on the outer annular wall of the annular body, the annular step part is arranged on the inner annular wall of the annular body, and the ultraviolet chamber is provided with a positioning annular part corresponding to the annular step part. The driving module is provided with a group, the ultraviolet chamber controlled by the driving module is provided with two groups, and the driving module is positioned between the two groups of ultraviolet chambers. The driving module is provided with at least two groups, the number of the ultraviolet chambers is the same as that of the driving module, and each group of the driving module drives one group of the ultraviolet chambers respectively. Wherein the driven gear and the driving gear are arranged at equal heights on a horizontal plane. In a second aspect, embodiments of the present utility model provide a process chamber, said and its process chamber comprising a drive mechanism for a UV chamber as described in any one of the preceding claims. Wherein, the process chamber of the device also comprises a UV lamp, and the UV lamp is connected with the driven gear. Wherein, the UV lamp set up in the actuating mechanism's of UV cavity top. Wherein, the light that the UV lamp launched is towards the light-passing hole. According to the driving mechanism of the UV chamber and the process chamber thereof, the driving mechanism of the UV chamber comprises the driven gear and the driving module which are connected with the ultraviolet chamber, the driving module adopts the driving motor and the driving gear, and the driven gear is meshed with the driving gear, so that the rotation driving of the UV lamp is improved to be of a gear transmission structure. In addition, the driving structure can realize a one-to-one driving mode or a one-to-many driving mode, and has independent control or linkage characteristics. The foregoing description is only an overview of the present utility model, and is intended to be more clearly understood as being carried out in accordance with the following description of the preferred embodiments, as well as other objects, features and