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CN-224233667-U - Weighting structure of quartz tuning fork

CN224233667UCN 224233667 UCN224233667 UCN 224233667UCN-224233667-U

Abstract

The utility model provides a weighting structure of a quartz tuning fork, which is used for weighting a plurality of quartz tuning forks distributed in an array in a tuning fork array and comprises mask plates which are arranged at intervals with the tuning fork array, wherein the interval distance between each mask plate and the tuning fork array is larger than the thickness of a weighting layer on the quartz tuning fork, and each mask plate is provided with a mask window corresponding to each weighting layer. In this scheme, through will mask version and tuning fork array interval set up, and make the mask version with the interval distance of tuning fork array is greater than thickness on the quartz tuning fork adds the heavy layer, when can avoid aggravating, the edge that adds the heavy layer with the inner wall in mask window takes place the adhesion, thereby avoided the psoriasis problem that the heavy layer of small-size quartz tuning fork and mask version take place the adhesion to produce, improved the preparation precision of small-size quartz tuning fork.

Inventors

  • ZHANG WEI
  • XIONG FENG
  • WAN YANG

Assignees

  • 泰晶科技股份有限公司

Dates

Publication Date
20260512
Application Date
20250403

Claims (8)

  1. 1. The weighting structure of the quartz tuning fork is used for weighting a plurality of quartz tuning forks distributed in an array in a tuning fork array (100), and is characterized by comprising a mask plate (1) which is arranged at intervals with the tuning fork array (100), wherein the interval distance between the mask plate (1) and the tuning fork array (100) is larger than the thickness of a weighting layer (101) on the quartz tuning fork; A mask window (10) is formed in the position, corresponding to each weighting layer (101), of the mask plate (1).
  2. 2. The quartz tuning fork weighting structure according to claim 1, further comprising a partition plate (2) disposed between the mask plate (1) and the tuning fork array (100), wherein both side surfaces of the partition plate (2) are respectively attached to the mask plate (1) and the tuning fork array (100), and the thickness of the partition plate (2) is greater than the thickness of the weighting layer (101); The mask window is characterized in that a plurality of first transmission holes (20) which are in one-to-one correspondence with the mask windows are formed in the partition plate (2), and the size of each first transmission hole (20) in any direction in the plane where the first transmission hole is located is not smaller than the size of each mask window (10) in the corresponding direction in the plane where the first transmission hole is located.
  3. 3. The quartz tuning fork weighting structure according to claim 2, wherein the size of the first transmission hole (20) in any direction in its plane is not more than 1.5 times the size of the mask window (10) in the corresponding direction in its plane.
  4. 4. The quartz tuning fork weighting structure according to claim 2, further comprising a positioning plate (3), wherein a placement opening (30) having a shape matching the shape of the tuning fork array (100) is formed in the positioning plate (3), and the depth of the placement opening (30) does not exceed the thickness of the tuning fork array (100).
  5. 5. The quartz tuning fork weighting structure according to claim 4, further comprising a fixing plate (4), wherein the partition plate (2) sequentially presses the mask plate (1) and the partition plate (2) on the surface of the positioning plate (3); The fixing plate (4) is provided with a plurality of second transmission holes (40) which are in one-to-one correspondence with the mask windows (10), and the size of the second transmission holes (40) in any direction of the plane where the second transmission holes are positioned is not smaller than the size of the mask windows (10) in the corresponding direction of the plane where the second transmission holes are positioned.
  6. 6. The quartz tuning fork weighting structure according to claim 5, wherein the thickness of the fixing plate (4) is greater than the thickness of the reticle (1).
  7. 7. The quartz tuning fork weighting structure of claim 5, wherein the number of quartz tuning forks in each row of the tuning fork array (100) are linearly distributed along a direction perpendicular to their vibrating arms; A plurality of mask windows (10) in the same row are communicated with each other on the mask plate (1); The first permeation holes (20) in the same row are communicated with each other on the partition plate (2); And a plurality of second permeation holes (40) in the same row are communicated with each other on the fixed plate (4).
  8. 8. The quartz tuning fork weighting structure according to any one of claims 1-7, wherein two masks (1) are symmetrically arranged on two sides of the tuning fork array (100).

Description

Weighting structure of quartz tuning fork Technical Field The utility model relates to the technical field of PVD (physical vapor deposition) masks, in particular to a weighting structure of a quartz tuning fork. Background The PVD mask process only allows specific areas to be exposed for coating by placing a mask on a substrate, so that selective coating of the specific areas is realized. PVD techniques include various methods such as vacuum evaporation, sputter plating, and particle plating, all of which can be performed by adding a reticle to achieve patterned plating. When a small-sized quartz tuning fork (e.g., tuning fork dimensions of 1.6mm by 1.0mm or 1.2mm by 1.0mm or 1.0mm by 0.8 mm) is emphasized using a patterned masking process, psoriasis problems often occur, which affect the vibration frequency of the small-sized quartz tuning fork. After analysis of the reasons, it is found that during the aggravating process, the plating layer in the aggravating area is adhered to the window of the mask, and when the mask is removed after aggravating, the mask and the plating layer are broken from the adhesion to generate psoriasis, so that the psoriasis problem is one of the problems to be solved when the tuning fork quality is improved. Disclosure of utility model Based on the problems in the prior art, the utility model aims to solve the technical problem that psoriasis is often generated when a patterning mask process is used for aggravating a small-sized quartz tuning fork in the prior art. The utility model provides a weighting structure of a quartz tuning fork, which is used for weighting a plurality of quartz tuning forks distributed in an array in a tuning fork array, and comprises a mask plate which is arranged at intervals with the tuning fork array, wherein the interval distance between the mask plate and the tuning fork array is larger than the thickness of a weighting layer on the quartz tuning fork; And a mask window is formed in the position, corresponding to each weighting layer, of the mask plate. According to an embodiment of the utility model, the quartz tuning fork weighting structure further comprises a baffle plate arranged between the mask plate and the tuning fork array, wherein two side surfaces of the baffle plate are respectively attached to the mask plate and the tuning fork array, and the thickness of the baffle plate is larger than that of the weighting layer; The partition plate is provided with a plurality of first permeation holes which are in one-to-one correspondence with the mask windows, and the size of each first permeation hole in any direction of the plane where the first permeation hole is positioned is not smaller than the size of each mask window in the corresponding direction of the plane where the first permeation hole is positioned. The size of the first transmission hole in any direction in the plane of the first transmission hole is not more than 1.5 times of the size of the mask window in the corresponding direction in the plane of the first transmission hole. According to an embodiment of the present utility model, the quartz tuning fork weighting structure further includes a positioning plate, a placement opening having a shape matching the shape of the tuning fork array is formed in the positioning plate, and the depth of the placement opening does not exceed the thickness of the tuning fork array. According to an embodiment of the utility model, the quartz tuning fork weighting structure further comprises a fixing plate, and the mask plate and the partition plate are sequentially pressed on the surface of the positioning plate by the partition plate; The fixing plate is provided with a plurality of second permeation holes which are in one-to-one correspondence with the mask windows, and the size of each second permeation hole in any direction of the plane where the second permeation hole is positioned is not smaller than the size of each mask window in the corresponding direction of the plane where the second permeation hole is positioned. According to an embodiment of the present utility model, the thickness of the fixing plate is greater than the thickness of the mask. According to an embodiment of the utility model, the quartz tuning forks in each row of the tuning fork array are distributed linearly along a direction perpendicular to the vibrating arms thereof; on the mask plate, a plurality of mask windows in the same row are communicated with each other; the first transmission holes in the same row are communicated with each other on the partition plate; And a plurality of second permeation holes in the same row are communicated with each other on the fixed plate. According to an embodiment of the present utility model, two masks are symmetrically disposed on two sides of the tuning fork array. The beneficial effects of the utility model are as follows: According to the weighting structure of the quartz tuning fork, the mask plate and the tuning fo