CN-224233780-U - Semiconductor crystal growth furnace crystal growth monitoring device based on double-lens self-adaptive focusing

Abstract

The utility model relates to the technical field of vision detection, and discloses a semiconductor crystal growth monitoring device based on double-lens self-adaptive focusing, which comprises a vision transverse module, wherein a transverse module motor is arranged on the side edge of the vision transverse module, the output end of the transverse module motor is connected with a transverse screw rod, a transverse sliding seat is connected with the transverse screw rod in a threaded manner, and a vision longitudinal module is arranged on the transverse sliding seat. The double lenses can automatically switch focal lengths according to different shooting demands, manual intervention is not needed, monitoring efficiency is greatly improved, and monitoring continuity is guaranteed. Through the cooperation of the horizontal module of vision and the vertical module of vision, realized the accurate location of camera in three-dimensional space for the camera can aim at crystal center all the time, no matter how crystal position and size change, can both ensure the stability and the accuracy of shooting the picture.

Inventors

• MA SIHAI
• MA HONGTAI
• MA XIANSONG
• MA QING
• DING LEI

Assignees

• 安徽易芯半导体有限公司

Dates

Publication Date

20260512

Application Date

20250414

Claims (4)

1. 1. The utility model provides a semiconductor crystal growth monitoring devices based on long brilliant stove of twin-lens self-adaptation is focused, a serial communication port, including visual horizontal module (2), visual horizontal module (2) side is provided with horizontal module motor (21), horizontal module motor (21) output is connected with horizontal screw rod (22), threaded connection has horizontal slide (23) on horizontal screw rod (22), install visual vertical module (1) on horizontal slide (23), visual vertical module (1) side is provided with vertical module motor (11), vertical module motor (11) output is connected with vertical screw rod (12), vertical screw rod (12) external screw connection has vertical slide (13), vertical slide (13) bottom is connected with camera fixing base (3), be side by side form on camera fixing base (3) and install take nearly burnt camera (31) and take far focus camera (32).
2. 2. The device for monitoring the crystal growth of the semiconductor crystal growth furnace based on the double-lens self-adaptive focusing, which is disclosed in claim 1, is characterized in that a rocker arm fixing seat (33) is arranged at the bottom of the visual transverse module (2), a rocker arm (34) is connected to the rocker arm fixing seat (33), a rocker arm tail seat (35) is connected to the tail end of the rocker arm (34), a flange observation port (36) is arranged on the rocker arm tail seat (35), and an optical filter (37) is arranged in the flange observation port (36).
3. 3. The device for monitoring the crystal growth of the semiconductor crystal growth furnace based on the double-lens self-adaptive focusing according to claim 2, wherein the optical filter (37) is positioned right in front of the industrial camera (31) with the near-focus lens and the industrial camera (32) with the far-focus lens.
4. 4. The device for monitoring the crystal growth of the semiconductor crystal growth furnace based on the double-lens adaptive focusing according to claim 1, wherein the industrial camera (31) with the near-focus lens and the industrial camera (32) with the far-focus lens are used for ensuring the definition of a shot picture according to the self-adaptive focal length of a shot crystal image.

Description

Semiconductor crystal growth furnace crystal growth monitoring device based on double-lens self-adaptive focusing Technical Field The utility model relates to the technical field of visual inspection, in particular to a semiconductor crystal growth monitoring device based on double-lens self-adaptive focusing. Background In the growth process of semiconductor single crystals, the real-time monitoring of the growth state of the crystals (such as seeding, shouldering and isodiametric stage) is important. However, conventional monitoring methods typically rely on fixed-position industrial cameras for taking pictures, and it is difficult for a single focal length camera to capture the entire growth process clearly due to the large variations in position and size of the crystal at different growth stages. For example: 1. in the seeding stage, the crystal position is deeper, and a far-focus lens is required to be used for shooting local details; 2. in the shouldering stage, the crystal diameter is gradually increased, the far focus lens cannot completely cover the whole crystal, and the near focus lens needs to be switched; 3. in the isodiametric stage, the crystal length and diameter are further increased, requiring a near-focus lens to cover a larger field of view. The prior art has the following main problems: 1. the traditional method needs to manually adjust the camera or replace the lens, which not only has low efficiency, but also affects the continuity of monitoring; 2. the position adjustment is inaccurate, in the crystal growth process, the camera needs to dynamically adjust the distance from the observation port and align the center, but the traditional sliding rail system lacks self-adaptive capability, and accurate positioning is difficult to realize; 3. High temperature interference, that is, strong light and reflected light in the furnace easily affect imaging quality, and a common optical filter is difficult to completely adapt to the complex illumination environment. Accordingly, based on the above technical problems, it is necessary for those skilled in the art to develop a semiconductor growth monitor based on dual-lens adaptive focusing. Disclosure of utility model The utility model aims to provide a semiconductor crystal growth monitoring device based on double-lens self-adaptive focusing so as to solve the problems in the background technology. In order to achieve the above purpose, the present utility model provides the following technical solutions: The technical scheme of the semiconductor crystal growth monitoring device based on double-lens self-adaptive focusing comprises that a visual transverse module is arranged on a lateral side of the visual transverse module, a transverse screw is connected to an output end of the visual transverse module, a transverse sliding seat is connected to an output end of the transverse screw in a threaded manner, a visual longitudinal module is arranged on the transverse sliding seat, a longitudinal module motor is arranged on a lateral side of the visual longitudinal module, a longitudinal screw is connected to an output end of the longitudinal module motor, a longitudinal sliding seat is connected to an external thread of the longitudinal screw, a camera fixing seat is connected to a bottom of the longitudinal sliding seat, and an industrial camera with a near-focus lens and an industrial camera with a far-focus lens are arranged on the camera fixing seat in a side-by-side manner. As a preferable technical scheme, the bottom of the visual transverse module is provided with a rocker arm fixing seat, the rocker arm fixing seat is connected with a rocker arm, the tail end of the rocker arm is connected with a rocker arm tail seat, a flange observation port is arranged on the rocker arm tail seat, and an optical filter is arranged in the flange observation port. As a preferable technical scheme, the optical filter is positioned right in front of the industrial camera with the near-focus lens and the industrial camera with the far-focus lens. As an preferable technical solution, the industrial camera with near-focus lens and the industrial camera with far-focus lens are used for self-adapting focal length according to the photographed crystal image, so as to ensure the definition of photographed pictures. Compared with the prior art, the utility model has the beneficial effects that: The utility model relates to a semiconductor crystal growth monitoring device based on double-lens self-adaptive focusing, which is characterized in that the arranged double lenses can automatically switch focal lengths according to different shooting requirements, manual intervention is not needed, the monitoring efficiency is greatly improved, and the monitoring continuity is ensured. Through the cooperation of the horizontal module of vision and the vertical module of vision, realized the accurate location of camera in three-dimensional space for the camera can aim at cryst