Search

CN-224233860-U - Heating element and semiconductor device

CN224233860UCN 224233860 UCN224233860 UCN 224233860UCN-224233860-U

Abstract

The utility model relates to the technical field of fluid heating assemblies, in particular to a heating assembly which comprises a first bracket, a second bracket, an electric heating tube and an electric element, wherein the electric heating tube is provided with a flow passage, a sealing cavity is arranged between the first bracket and the second bracket, the flow inlet end and the flow outlet end of the flow passage are both positioned outside the sealing cavity, the electric heating tube comprises a heating tube part, and the heating tube part and the electric element are both arranged in the sealing cavity in a sealing manner. The sealed cavity completely isolates the heating tube portion and the electrical component within the airtight space from direct exposure to the outside volatile gas-containing environment. The first support and the second support reliably seal the sealing cavity, so that the electric part is prevented from being corroded, and the service life of the assembly is prolonged. The utility model also relates to a semiconductor device adopting the heating assembly.

Inventors

  • GUO ZHIYING
  • FAN HAIJUN
  • HU RUGUO

Assignees

  • 芜湖艾尔达科技有限责任公司

Dates

Publication Date
20260512
Application Date
20250604

Claims (10)

  1. 1. The utility model provides a heating element, its characterized in that includes first support (1), second support (2), electrothermal tube (5), electric element (7), electrothermal tube (5) have through-flow channel (16), sealed chamber (15) have between first support (1), second support (2), electrothermal tube (5) include heating pipe portion (6), heating pipe portion (6) with electric element (7) are all sealed to be installed in sealed chamber (15).
  2. 2. A heating assembly according to claim 1, wherein the second holder (2) comprises a first part (3), a second part (4), the first part (3) being at least partly located between the first holder (1) and the second part (4), the sealed cavity (15) comprising a first cavity (17) located between the first holder (1) and the first part (3), a second cavity (18) located between the first part (3) and the second part (4), the heating pipe section (6) being located in the first cavity (17), the electrical element (7) having a junction location, the junction location of the electrical element (7) being located in the second cavity (18); And/or the heating pipe part (6) comprises a pipe substrate and a thick film heating layer printed on the surface of the pipe substrate, or the heating pipe part (6) comprises a pipe substrate and an electric heating wire wound on the surface of the pipe substrate, or the heating pipe part (6) comprises a pipe substrate and a nanometer electric heating film attached on the surface of the pipe substrate.
  3. 3. A heating assembly according to claim 2, wherein the electrical element (7) comprises an electrode member (8), the electrode member (8) being mounted on the electric heating tube (5) and the electrode member (8) being electrically connected to the nano-electrothermal film, the first component (3) being provided with a through hole (19), the electrode member (8) extending through the through hole (19) to the second cavity (18); And/or, electrical component (7) include temperature controller (9), first part (3) are equipped with mount pad (20), pass hole (21), temperature controller (9) with mount pad (20) assembly, and temperature sensing portion of temperature controller (9) pass hole (21) are close to heating pipe portion (6) setting, the wiring position of temperature controller (9) is located second chamber (18).
  4. 4. A heating assembly according to claim 3, characterized in that the second part (4) is provided with a mounting hole (22), the mounting hole (22) being provided with a wire lead-out (23), the electrical element (7) being electrically connected with a wire, which wire extends through the wire lead-out (23) to the outside of the second part (4).
  5. 5. A heating assembly according to any one of claims 1-4, characterized in that the electric heating tube (5) comprises mounting tube parts (13) at both ends of the heating tube part (6), the mounting tube parts (13) being in communication with the heating tube part (6), the end of the mounting tube parts (13) remote from the heating tube part (6) being placed outside the sealing chamber (15), the mounting tube parts (13) being fixed or limited to the first support (1) and/or the mounting tube parts (13) being fixed or limited to the second support (2).
  6. 6. The heating assembly according to claim 5, wherein the outer wall of the mounting pipe portion (13) is fixedly connected or integrally formed with a limiting protrusion (14), the first bracket (1) is provided with a first groove (24) and end plate portions (25) positioned at two ends of the first groove (24), the end plate portions (25) are provided with notches (26), the limiting protrusion (14) at least partially abuts against the inner wall of the first groove (24) along the radial direction of the mounting pipe portion (13), the limiting protrusion (14) at least partially abuts against the inner wall of the end plate portion (25) along the axial direction of the mounting pipe portion (13), a gap is reserved between the outer peripheral wall of the heating pipe portion (6) and the inner wall of the first groove (24), and at least partially abuts against the wall of the notches (26) along the radial direction of the outer wall of the mounting pipe portion (13); Or the peripheral wall of the mounting pipe part (13) is provided with a positioning groove, the first bracket (1) is provided with a first groove (24) and end plate parts (25) positioned at two ends of the first groove (24), the end plate parts (25) are provided with notches (26), and the end plate parts (25) are at least partially inserted into the positioning groove.
  7. 7. A heating assembly according to any one of claims 1-4 and 6, wherein a plurality of assembly holes (36) distributed in a ring shape are formed in the periphery of the first bracket (1) and the second bracket (2), the first bracket (1) and the second bracket (2) are fixedly assembled through the assembly holes (36) by a bolt assembly, and the butt joint surfaces of the first bracket (1) and the second bracket (2) are sealed face to face or by an annular sealing ring.
  8. 8. A heating assembly according to any one of claims 1-4 and 6, characterized in that the heating assembly is used in a semiconductor device, that the electric heating tube (5) is provided with turbulence elements (11) in the flow passage (16), and that both ends of the electric heating tube (5) are provided with plugs (12) capable of positioning the turbulence elements (11).
  9. 9. A heating assembly according to claim 8, wherein the turbulence member (11) comprises a rod body (27) positioned in the through-flow channel (16), or wherein the turbulence member (11) comprises a coil spring (28) positioned in the through-flow channel (16), or wherein the turbulence member (11) comprises a rod body (27), a coil spring (28) positioned between the outer wall of the rod body (27) and the inner wall of the electric heating tube (5), or wherein the turbulence member (11) comprises a second spiral plate (31) positioned in the through-flow channel (16), or wherein the turbulence member (11) comprises a first support rod (29) positioned in the through-flow channel (16), wherein the first support rod (29) has a first spiral plate (30) at the outer peripheral wall, or wherein the turbulence member (11) comprises a second support rod (32) positioned in the through-flow channel (16), wherein the second support rod (32) has spaced protrusions (33) fixedly connected to the outer peripheral wall; And/or the plug (12) comprises a disc (34), a plurality of overflow holes (35) are formed in the disc (34), and the disc (34) is fixed with the electric heating tube (5).
  10. 10. A semiconductor device, characterized in that it comprises a heating assembly according to any of claims 1-9, which semiconductor device has a fluid passage, the flow-through passage (16) being part of the fluid passage.

Description

Heating element and semiconductor device Technical Field The present disclosure relates to fluid heating assemblies, and particularly to a heating assembly and a semiconductor device. Background Heating assemblies have electrical components that are typically exposed to air, and for some industries, such as the semiconductor field, heat treatments are applied to chemicals that may generate volatile gases that affect the useful life of the electrical components of the heating assembly. Disclosure of utility model The object of the present utility model is to solve the problems indicated in the background art and to provide a heating assembly. In order to achieve the above purpose, the present utility model adopts the following technical scheme: The utility model provides a heating element, includes first support, second support, electrothermal tube, electric element, the electrothermal tube has the passageway that overflows, have sealed chamber between first support, the second support, the electrothermal tube includes heating pipe portion, heating pipe portion with electric element is all sealed the installation in sealed intracavity. The heating component has the beneficial effects that the sealing cavity completely isolates the heating pipe part and the electric element in the airtight space, so that the heating pipe part and the electric element are not directly exposed to the environment containing volatile gas. The first support and the second support reliably seal the sealing cavity, so that the electric part is prevented from being corroded, and the service life of the assembly is prolonged. A semiconductor device comprising a heating assembly as described above, the semiconductor device having a fluid passageway, the flow-through passageway being part of the fluid passageway. The semiconductor device provided by the utility model has the beneficial effects that the sealing cavity of the heating component effectively isolates the electrical element from the fluid environment, and avoids corrosion or performance decay of the electrical element caused by contact of volatile gas, so that long-term safe operation of the device is ensured. Drawings FIG. 1 is a schematic perspective view of a heating assembly according to an embodiment of the present utility model; FIG. 2 is a schematic diagram of a heating assembly in semi-section according to one embodiment of the present utility model; FIG. 3 is a schematic diagram showing an exploded view of a heating assembly according to an embodiment of the present utility model; FIG. 4 is a schematic diagram showing an exploded view of a heating assembly according to an embodiment of the present utility model; FIG. 5 is a schematic diagram of a plug structure according to an embodiment of the present utility model; FIG. 6 is a schematic view of a spoiler according to an embodiment of the utility model; FIG. 7 is a schematic view of a spoiler according to an embodiment of the utility model; FIG. 8 is a schematic view of a spoiler according to an embodiment of the utility model; Fig. 9 is a schematic view of a spoiler according to an embodiment of the utility model. In the figure, a first bracket 1, a second bracket 2, a first component 3, a second component 4, an electric heating tube 5, a heating tube part 6, an electric element 7, an electrode part 8, a temperature controller 9, a lead 10, a spoiler 11, a plug 12, a mounting tube part 13, a limit protrusion 14, a seal cavity 15, a through-flow channel 16, a first cavity 17, a second cavity 18, a through hole 19, a mounting seat 20, a through hole 21, a mounting hole 22, an electric wire lead-out part 23, a first groove 24, an end plate part 25, a notch 26, a rod body 27, a coil spring 28, a first support rod 29, a first coil plate 30, a second coil plate 31, a second support rod 32, a protrusion 33, a disc 34, an through-flow hole 35 and an assembly hole 36 are shown. Detailed Description The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. Referring to fig. 1-9, a heating assembly comprises a first bracket 1, a second bracket 2, an electric heating tube 5 and an electric element 7, wherein the electric heating tube 5 is provided with a through-flow channel 16, a sealing cavity 15 is arranged between the first bracket 1 and the second bracket 2, the electric heating tube 5 comprises a heating tube part 6, and the heating tube part 6 and the electric element 7 are all installed in the sealing cavity 15 in a sealing mode. When fluid flows in from the inflow end of the through-flow channel 16, the fluid passes through the inside of the electric heating tube 5 and is discharged from the outflow end of the through-flow channel 16, the core heating part of the electric heating tube 5 is