CN-224233915-U - Pressing plate mechanism and workbench

CN224233915UCN 224233915 UCN224233915 UCN 224233915UCN-224233915-U

Abstract

The pressing plate mechanism comprises a driving mechanism and a pressing plate connected to the driving mechanism, the pressing plate mechanism further comprises an in-place detection mechanism and an in-place detection system, the in-place detection mechanism is installed in a notch formed in the pressing plate, the in-place detection mechanism and the driving mechanism are connected to the in-place detection system, and the in-place detection system receives signals of the in-place detection mechanism and controls the driving mechanism to act. Whether the pressing plate mechanism is pressed down in place can be stably and accurately detected through the position of the pressing plate of the in-place detection mechanism, and meanwhile, the in-place detection mechanism is installed on the pressing plate, so that the device is small in size and convenient to install.

Inventors

ZHENG RUI
LI ZHI
Lv tengfei
ZHANG LEI

Assignees

源卓微纳科技(苏州)股份有限公司

Dates

Publication Date: 20260512
Application Date: 20250207

Claims (10)

1. The pressing plate mechanism comprises a driving mechanism and a pressing plate connected with the driving mechanism, and is characterized by further comprising an in-place detection mechanism and an in-place detection system, wherein the in-place detection mechanism is arranged in a notch formed in the pressing plate, the in-place detection mechanism and the driving mechanism are connected to the in-place detection system, and the in-place detection system receives signals of the in-place detection mechanism and controls the driving mechanism to act.
2. The pressing plate mechanism of claim 1, wherein the in-place detection mechanism comprises a shell, a pressing reed protruding out of the shell, a conducting component positioned in the shell, and an input and output end, wherein the input and output end is electrically connected to the in-place detection system, the pressing reed is elastically installed on the shell, and a contact point of the pressing reed is communicated with the conducting component under the action of external force.
3. The pressure plate mechanism according to claim 2, wherein the pressing reed of the in-place detecting mechanism protrudes out of the pressure plate, and when the pressure plate presses the substrate until the pressing reed is retracted into the bottom surface of the pressure plate, the contact of the pressing reed communicates with the contact of the conducting member.
4. The pressing plate mechanism according to claim 2, wherein the bottom surface of the housing of the in-place detecting mechanism, on which the pressing reed is arranged, is flush with the bottom surface of the pressing plate, which is close to the substrate, the pressing reed protrudes from the bottom surface of the housing, and when the pressing plate is pressed in place, the contact of the pressing reed is communicated with the contact of the conducting member.
5. The platen mechanism of claim 1, wherein a surface of the platen is in communication with the recess and is provided with a groove for receiving a cable of the in-place detection mechanism.
6. The platen mechanism of claim 1, wherein the drive mechanism is attached to one or both sides of the platen.
7. The platen mechanism of claim 1, further comprising a slide mechanism, wherein the drive mechanism moves the platen along the slide mechanism relative to the platen to a substrate edge position.
8. A workbench, which is characterized in that at least one side of the workbench is provided with a pressing plate mechanism, and the pressing plate mechanism adopts any one of the pressing plate mechanisms as set forth in claims 1-7.
9. The table of claim 8, wherein the platen mechanism is disposed on opposite sides of the table.
10. The table of claim 8, wherein the platen mechanism is disposed on four sides of the table.

Description

Pressing plate mechanism and workbench Technical Field The invention relates to the field of laser processing equipment, in particular to a pressing plate mechanism of the laser processing equipment and a workbench applying the pressing plate mechanism. Background At present, exposure processing equipment generally fixes a substrate placed on a workbench in a vacuum adsorption mode, such as a Printed Circuit Board (PCB), an IC carrier board and other boards, when the processing equipment processes the substrate, the substrate needs to be flatly adsorbed on the workbench, but the edge of the substrate is easy to warp, so that the adsorption force of the workbench is insufficient, the flatness of the substrate is affected, and the photoetching precision is reduced. In order to solve the problem of warping of the edge of the substrate, a pressing plate mechanism is used for pressing the edge of the substrate, flattening the edge and avoiding air leakage. The pressing plate mechanism drives the pressing strip to press the substrate by taking the air cylinder or the motor as a driving source, and the in-place control of the pressing plate is realized by controlling the driving source, so that whether the pressing strip is pressed in place or not can not be accurately detected, and the substrate is pressed. Disclosure of Invention The invention aims to solve the technical problem of providing a pressing plate mechanism which can stably and accurately detect whether the pressing plate mechanism is pressed down in place. In order to solve the problems, the invention provides a pressing plate mechanism, which comprises a driving mechanism and a pressing plate connected with the driving mechanism, wherein the pressing plate mechanism further comprises an in-place detection mechanism and an in-place detection system, the in-place detection mechanism is arranged in a notch arranged on the pressing plate, the in-place detection mechanism and the driving mechanism are connected to the in-place detection system, and the in-place detection system receives signals of the in-place detection mechanism and controls the driving mechanism to act. In one embodiment, the in-place detection mechanism comprises a shell, a pressing reed protruding out of the shell, a conducting component positioned in the shell and an input/output end, wherein the input/output end is electrically connected to the in-place detection system, the pressing reed is elastically installed in the shell, and a contact of the pressing reed is communicated with the conducting component under the action of external force. In one embodiment, the pressing reed of the in-place detection mechanism protrudes out of the pressing plate, and when the pressing plate presses the substrate until the pressing reed retracts into the bottom surface of the pressing plate, the contact of the pressing reed is communicated with the contact of the conducting component. In one embodiment, the bottom surface of the shell of the in-place detection mechanism, on which the pressing reed is arranged, is flush with the bottom surface of the pressing plate, which is close to the substrate, the pressing reed protrudes from the bottom surface of the shell, and when the pressing plate is pressed in place, the contact of the pressing reed is communicated with the contact of the conducting component. In one embodiment, a groove is formed in the surface of the pressing plate and communicated with the notch, and the groove is used for accommodating the cable of the in-place detection mechanism. In one embodiment, the driving mechanism is connected to one side or both sides of the pressing plate. In one embodiment, the pressing plate mechanism further includes a sliding mechanism, and the driving mechanism drives the pressing plate to move to the edge position of the substrate along the sliding mechanism relative to the workbench. The workbench is characterized in that the pressing plate mechanism is arranged on at least one side of the workbench, and the pressing plate mechanisms are arranged on two opposite sides of the workbench or on four sides of the workbench. Compared with the prior art, the clamp plate mechanism sets up detection mechanism in place, through detection clamp plate position of detection mechanism in place, can stabilize whether accurate detection clamp plate mechanism pushes down in place, simultaneously, in place detection mechanism install in the clamp plate, small, the installation of being convenient for. Drawings FIG. 1 is a schematic perspective view of one embodiment of a platen mechanism mounted to a table. FIG. 2 is a schematic perspective view of an embodiment of a platen mechanism. FIG. 3 is a schematic side view of an embodiment of a platen mechanism. Fig. 4 is an enlarged schematic view of the in-place detection mechanism. Fig. 5 is a block diagram schematic of a platen mechanism. Detailed Description For the purpose of making the objects, technical solutions an