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CN-224234087-U - Caching device and caching system

CN224234087UCN 224234087 UCN224234087 UCN 224234087UCN-224234087-U

Abstract

The disclosure relates to the technical field of semiconductors and photovoltaics, in particular to a caching device and a caching system, which are used for solving the problem that the caching device has no cooling function. The buffer device comprises at least two groups of air cooling assemblies which are oppositely arranged along a first horizontal direction, an accommodating space is formed between the oppositely arranged air cooling assemblies and is configured to accommodate the carrier, at least two groups of first water cooling assemblies are respectively positioned at one side of the at least two groups of air cooling assemblies far away from the accommodating space, a second water cooling assembly is arranged below the accommodating space, and a supporting assembly is arranged below the accommodating space and is configured to support the carrier. Through set up forced air cooling subassembly, first water-cooling subassembly and second water-cooling subassembly around accommodation space, make accommodation space's side and bottom surface all have the cooling function, can cool off the carrier when caching the carrier, make buffer device possess the dual function of buffering and cooling, improved the cooling rate to the carrier of having technology, and then improved the output of process equipment.

Inventors

  • LIU YU
  • GUO SHUANGFA
  • TAN ZUJIAN

Assignees

  • 拉普拉斯新能源科技股份有限公司

Dates

Publication Date
20260512
Application Date
20250516

Claims (10)

  1. 1. A caching apparatus, comprising: At least two groups of air cooling assemblies are oppositely arranged along the first horizontal direction, an accommodating space is formed between the at least two groups of air cooling assemblies which are oppositely arranged, the accommodating space is configured to accommodate a carrier, and the air cooling assemblies are configured to supply air to the carrier; the at least two groups of first water cooling assemblies are oppositely arranged along the first horizontal direction, and are respectively positioned at one side, far away from the accommodating space, of the at least two groups of air cooling assemblies, and the first water cooling assemblies are configured to cool the carrier; The second water cooling assembly is arranged below the accommodating space and is configured to cool the carrier; And the support component is arranged below the accommodating space and is configured to support the carrier.
  2. 2. The buffer device according to claim 1, wherein, The air cooling assembly comprises: The fans are sequentially arranged in a plurality of columns along a second horizontal direction and are arranged in at least one row along a vertical direction, orthographic projections of the fans on a plane vertical to the first horizontal direction cover the accommodating space, and the second horizontal direction is vertical to the first horizontal direction; And/or the number of the groups of groups, The first water cooling assembly includes: The water cooling disc extends along a second horizontal direction, the orthographic projection of the water cooling disc on a plane vertical to the first horizontal direction covers the accommodating space, and the second horizontal direction is vertical to the first horizontal direction; And/or the number of the groups of groups, The second water cooling assembly includes: the water cooling plate extends along a second horizontal direction, the orthographic projection of the water cooling plate on the horizontal plane covers the accommodating space in the second horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction.
  3. 3. The caching apparatus of claim 2, wherein, in the case where the first water cooling assembly comprises the water cooling tray, the water cooling tray comprises: The water cooling strips are sequentially arranged along the vertical direction, the water cooling strips extend along the second horizontal direction, one end of each water cooling strip is provided with a liquid inlet, the other end of each water cooling strip is provided with a liquid outlet, and cooling liquid flows in from the liquid inlet, flows along the second horizontal direction and flows out from the liquid outlet.
  4. 4. The caching apparatus of claim 2, wherein, in the case where the second water-cooling assembly includes the water-cooling plate, the caching apparatus further comprises: the bearing assembly is provided with a first guide hole extending along the vertical direction; The top end of the first guide piece is connected with the water cooling plate, and the bottom end of the first guide piece penetrates through the first guide hole; The first elastic piece is sleeved on the first guide piece and arranged between the bearing assembly and the water cooling plate, wherein the upper surface of the water cooling plate is in contact with the bottom of the carrier under the condition that the first elastic piece is compressed.
  5. 5. The caching apparatus of any one of claims 1-4, further comprising: At least one temperature sensor disposed adjacent to the accommodation space, the temperature sensor configured to detect a temperature of the carrier; And/or the number of the groups of groups, At least one first in-situ sensor is disposed adjacent to the receiving space, the first in-situ sensor being configured to detect whether the receiving space receives the carrier.
  6. 6. The caching apparatus of claim 5, wherein, in the case where the caching apparatus includes the first presence sensor, the first presence sensor includes: The diffuse reflection sensor is arranged on one side, close to the accommodating space, of the air cooling assembly; And/or the number of the groups of groups, The photoelectric correlation sensor comprises a transmitting end and a receiving end, wherein the transmitting end and the receiving end are respectively arranged on one side, close to the accommodating space, of each air cooling assembly in at least two groups which are oppositely arranged, the transmitting end is close to one end, close to the other end, of each air cooling assembly, in the second horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction.
  7. 7. The caching apparatus of any one of claims 1-4, wherein the support assembly comprises: a support seat disposed below the accommodation space and configured to support the carrier, the support seat having a second guide hole extending in a vertical direction and a mounting hole extending in a horizontal direction, the second guide hole being in communication with the mounting hole; The second guide piece is penetrated through the second guide hole, and the outer side surface of the second guide piece is provided with a limiting protrusion; The limiting piece is arranged in the mounting hole and connected with the supporting seat, and covers part of the second guide hole; The second in-place sensor is arranged on the lower surface of the limiting piece; the second elastic piece is sleeved on the second guide piece, the top end of the second elastic piece is abutted with the limiting protrusion, and the bottom end of the second elastic piece is abutted with the limiting piece; And under the condition that the support seat supports the carrier, the carrier transmits pressure to the second guide piece, so that the second guide piece compresses the second elastic piece and moves downwards, and the second in-place sensor detects the second guide piece.
  8. 8. A cache system, comprising: At least one caching device of any one of claims 1 to 7 configured to cache and cool a carrier; The frame body is arranged below the buffer device and is configured to support the buffer device.
  9. 9. The caching system of claim 8, wherein the number of caching devices is plural, and the plurality of caching devices are sequentially arranged along the first horizontal direction; Wherein, the cache system further includes: and the heat insulation device is arranged between the adjacent buffer devices.
  10. 10. The caching system of claim 8, further comprising: And the temporary storage device is arranged adjacent to the buffer storage device and is configured to buffer the carrier carrying the unprocessed product.

Description

Caching device and caching system Technical Field The disclosure relates to the technical field of semiconductors and photovoltaics, and in particular relates to a caching device and a caching system. Background In the process of processing the silicon wafer, a cross section phenomenon can occur, the photovoltaic conversion efficiency of the silicon wafer can be improved by repairing the cross section, and side wall passivation (Edge Passivation Deposition, EPD) equipment is generated. During the process, there is a flow of placing the unprocessed boat into the cavity of the EPD equipment and taking the processed boat out of the cavity of the EPD equipment. In order to reduce the overall process of the EPD equipment completing one process cycle, a plurality of unprocessed boats are stacked in advance in the cavity, and after the EPD equipment completes the process of the previous boat, the unprocessed boats can be quickly moved into the cavity, so that one position is needed to stack the unprocessed boats. The temperature of the processed boat is very high just after the processed boat comes out of the cavity, and cooling is needed. However, the buffer device of the conventional EPD equipment has no cooling function, and the cooling speed of the processed boat is slow, which affects the yield of the EPD equipment. Disclosure of utility model In view of the above, the embodiments of the present disclosure provide a cache device and a cache system to solve the problem that the cache device has no cooling function. In a first aspect, an embodiment of the present application provides a buffer device, which includes at least two groups of air cooling assemblies oppositely disposed along a first horizontal direction, at least two groups of air cooling assemblies oppositely disposed to form a receiving space therebetween, the receiving space is configured to receive a carrier, the air cooling assemblies are configured to supply air to the carrier, at least two groups of first water cooling assemblies oppositely disposed along the first horizontal direction, the at least two groups of first water cooling assemblies are respectively located at one sides of the at least two groups of air cooling assemblies away from the receiving space, the first water cooling assemblies are configured to cool the carrier, the second water cooling assemblies are disposed below the receiving space, the second water cooling assemblies are configured to cool the carrier, and the support assemblies are disposed below the receiving space and are configured to support the carrier. In some embodiments, the air cooling assembly comprises a plurality of fans which are sequentially arranged in a plurality of rows along a second horizontal direction and are arranged in at least one row along a vertical direction, wherein orthographic projection of the fans on a plane vertical to the first horizontal direction covers the accommodating space, the second horizontal direction is vertical to the first horizontal direction, and/or the first water cooling assembly comprises a water cooling disc which extends along the second horizontal direction, orthographic projection of the water cooling disc on the plane vertical to the first horizontal direction covers the accommodating space, the second horizontal direction is vertical to the first horizontal direction, and/or the second water cooling assembly comprises a water cooling plate which extends along the second horizontal direction, orthographic projection of the water cooling plate on the horizontal plane covers the accommodating space along the second horizontal direction, and the second horizontal direction is vertical to the first horizontal direction. In some embodiments, the water cooling disc comprises a plurality of water cooling strips which are sequentially arranged along the vertical direction, the water cooling strips extend along the second horizontal direction, one end of each water cooling strip is provided with a liquid inlet, the other end of each water cooling strip is provided with a liquid outlet, and cooling liquid flows in from the liquid inlet, flows along the second horizontal direction and flows out from the liquid outlet. In some embodiments, the buffer device further comprises a bearing assembly, a first guide piece and a first elastic piece, wherein the bearing assembly is provided with a first guide hole extending along the vertical direction, the top end of the first guide piece is connected with the water cooling plate, the bottom end of the first guide piece penetrates through the first guide hole, the first elastic piece is sleeved on the first guide piece and is arranged between the bearing assembly and the water cooling plate, and the upper surface of the water cooling plate is contacted with the bottom of the carrier under the condition that the first elastic piece is compressed. In some embodiments, the caching device further comprises at least one temperature sens