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CN-224234114-U - Etching structure

CN224234114UCN 224234114 UCN224234114 UCN 224234114UCN-224234114-U

Abstract

The utility model relates to the technical field of etching equipment and discloses an etching structure, which comprises a tank body, wherein a first motor is fixedly arranged at the bottom of the tank body, a sliding groove is formed in the outer wall of the tank body, a screw rod is fixedly arranged on an output shaft of the first motor, a lifting block is connected with the outer wall of the screw rod in a threaded manner, a fixing rod is fixedly arranged at the top of the lifting block, and a top cover is fixedly arranged at the tail end of the fixing rod. This etching structure through jar body, motor one, spout, lead screw, lifter, dead lever, top cap, the storage tank structure that sets up for this equipment makes the filter screen lifting at operation in-process, operation that user accessible motor one, thereby convenient to use person places the sample, and utilizes silica and potassium iodide to soak the sample at operation in-process, avoids appearing the condition of excessive etching and appears, and then ensures the etching accuracy of user to the sample, has also improved the practicality of this equipment.

Inventors

  • ZHENG YUANTAI
  • CHEN QINGHONG
  • He Ruizu

Assignees

  • 宜特(昆山)检测技术服务有限公司

Dates

Publication Date
20260512
Application Date
20250427

Claims (8)

  1. 1. The utility model provides an etching structure, its characterized in that, including a jar body (1), motor one (2) are fixed to the bottom of jar body (1), spout (3) have been seted up to the outer wall of jar body (1), the fixed feed screw (4) that are equipped with of output shaft of motor one (2), the outer wall threaded connection of feed screw (4) has lifter (5), the fixed dead lever (6) that is equipped with in top of lifter (5), the end fixed assembly of dead lever (6) has top cap (7), the top of top cap (7) is fixedly equipped with storage tank (8), the fixed power (9) and controller (10) that are equipped with respectively in top of storage tank (8), the fixed drawing liquid pump (23) that are equipped with of outer wall of storage tank (8), the fixed delivery pipe (11) that are equipped with of drawing liquid pump (23), the fixed level sensor (20) that are equipped with in bottom of inner wall of storage tank (8), the fixed round bar (12) that are equipped with in bottom of top cap (7), the fixed round bar (12) that are equipped with in bottom of top cap (13), the fixed slot (13) that are equipped with motor two (14) are equipped with motor two, the fixed slot (14) of motor (13), the bottom of elevating disk (14) rotates and is connected with carousel (16), tooth's socket (17) have been seted up to the outer wall of carousel (16), the outer wall fixed mounting of carousel (16) has scraper blade (21), the bottom fixed mounting of movable groove (13) has filter screen (22), the inner wall of jar body (1) is equipped with oscillator (24), the fixed dress in top of oscillator (24) has connecting rod (25), the bottom of top cap (7) still fixed mounting has electric telescopic handle (19).
  2. 2. An etching structure according to claim 1, wherein the number of the feeding pipes (11) is two, the two feeding pipes (11) are symmetrically distributed along the inner wall of the tank body (1), the top end of the connecting rod (25) is fixedly assembled with the outer wall of the feeding pipe (11), and the outer wall of the oscillator (24) is slidably connected with the outer wall of the lifting disc (14).
  3. 3. An etching structure according to claim 1, wherein the inner walls of the tooth grooves (17) are engaged with the outer walls of the gears (18), and the bottom of the scraper (21) is overlapped with the top of the filter screen (22) after the lifting disk (14) is lowered by 5 cm.
  4. 4. An etching structure according to claim 1, characterized in that the outer wall of the screen (22) is slidingly connected to the inner wall of the tank (1), and the interior of the storage tank (8) is in communication with the interior of the tank (1) via a feed pipe (11).
  5. 5. An etching structure according to claim 1, characterized in that the number of the storage tanks (8) is two, the interior of one storage tank (8) is filled with a silicon dioxide etching liquid, and the interior of the other storage tank (8) is filled with a potassium iodide etching liquid.
  6. 6. The etching structure according to claim 1, wherein an alarm lamp is fixedly arranged on the outer wall of the storage tank (8), and the alarm lamp is electrically connected with the power supply (9), the controller (10) and the liquid level sensor (20) respectively.
  7. 7. An etching structure according to claim 1, characterized in that the output shaft of the electric telescopic rod (19) is fixedly assembled with the top of the lifting disk (14), and the inner wall of the lifting disk (14) is slidingly connected with the inner wall of the movable groove (13).
  8. 8. An etching structure according to claim 1, characterized in that the gears (18) and the scrapers (21) are symmetrically distributed along the outer wall of the turntable (16) with a 1cm gap between them.

Description

Etching structure Technical Field The utility model relates to the technical field of etching equipment, in particular to an etching structure. Background A MOS integrated circuit is an integrated circuit including a metal, an oxide, and a semiconductor field effect transistor as main elements. The integrated circuit is often required to be detected through a pit experiment, and as the barrier metal layer in the sample has the characteristic of different thickness, the condition that the barrier metal layer is easy to etch too much or hurt in the etching process easily occurs, so that the practicability of the existing equipment and the etching precision of a user on the sample are reduced, and therefore, the etching structure is provided. Disclosure of utility model In view of the shortcomings of the prior art, the present utility model provides an etching structure that solves the problems noted in the background above. The etching structure comprises a tank body, a motor I is fixedly arranged at the bottom of the tank body, a sliding groove is formed in the outer wall of the tank body, a screw rod is fixedly arranged at the bottom of an output shaft of the motor I, a lifting block is connected to the outer wall of the screw rod in a threaded mode, a fixing rod is fixedly arranged at the top of the lifting block, a top cover is fixedly arranged at the tail end of the fixing rod, a storage tank is fixedly arranged at the top of the top cover, a power supply and a controller are respectively and fixedly arranged at the top of the storage tank, a liquid pump is fixedly arranged at the outer wall of the storage tank, a conveying pipe is fixedly arranged at the outlet of the liquid pump, a liquid level sensor is fixedly arranged at the bottom of the inner wall of the storage tank, a round rod is fixedly arranged at the bottom of the top cover, a movable groove is formed in the outer wall of the round rod, a lifting disk is connected in a sliding mode, a motor II is fixedly arranged at the top of the lifting disk, a gear is fixedly arranged at the tail end of the fixing rod, a rotary disk is fixedly connected to the bottom of the lifting disk, a rotary disk is fixedly arranged at the outer wall of the rotary disk, a conveying pipe is fixedly provided with a power supply and a controller, a liquid suction pump is fixedly arranged at the bottom of the rotary disk, a rotary disk is fixedly arranged at the rotary disk, a vibration filter is fixedly arranged at the bottom of the rotary disk is fixedly arranged, and is fixedly provided with a connecting rod. As a preferable technical scheme of the utility model, the number of the feeding pipes is two, the two feeding pipes are symmetrically distributed along the inner wall of the tank body, the top end of the connecting rod is fixedly assembled with the outer wall of the feeding pipe, and the outer wall of the oscillator is in sliding connection with the outer wall of the lifting disc. As a preferable technical scheme of the utility model, the inner wall of the tooth groove is meshed with the outer wall of the gear, and the bottom of the scraping plate is overlapped with the top of the filter screen after the lifting disk descends for 5cm. As a preferable technical scheme of the utility model, the outer wall of the filter screen is in sliding connection with the inner wall of the tank body, and the interior of the storage tank is communicated with the interior of the tank body through a feeding pipe. As a preferable embodiment of the present utility model, the number of the storage tanks is two, one storage tank is filled with a silicon dioxide etching solution, and the other storage tank is filled with a potassium iodide etching solution. As a preferable technical scheme of the utility model, the outer wall of the storage tank is fixedly provided with the warning lamp, and the warning lamp is respectively and electrically connected with the power supply, the controller and the liquid level sensor. As a preferable technical scheme of the utility model, the output shaft of the electric telescopic rod is fixedly assembled with the top of the lifting disc, and the inner wall of the lifting disc is in sliding connection with the inner wall of the movable groove. As a preferable technical scheme of the utility model, the gear and the scraping plate are symmetrically distributed along the outer wall of the turntable, and a gap of 1cm is formed between the gear and the scraping plate. Compared with the prior art, the utility model has the following beneficial effects: 1. This etching structure through jar body, motor one, spout, lead screw, lifter, dead lever, top cap, the storage tank structure that sets up for this equipment makes the filter screen lifting at operation in-process, operation that user accessible motor one, thereby convenient to use person places the sample, and utilizes silica and potassium iodide to soak the sample at operation in-process, avoids appearin