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CN-224234116-U - Cantilever type partition mechanism of cleaning machine

CN224234116UCN 224234116 UCN224234116 UCN 224234116UCN-224234116-U

Abstract

The utility model discloses a cantilever type partition mechanism of a cleaning machine, which belongs to the technical field of wafer cleaning equipment and comprises a frame body, wherein a drying chamber, a cleaning chamber and a driving mechanism chamber are arranged in the frame body, the driving mechanism chamber is arranged at the rear side of the drying chamber in the frame body, a drying table is arranged in the drying chamber, the cleaning table is arranged in the cleaning chamber, a lifting channel is longitudinally arranged between the drying table and the cleaning table, a partition door is arranged in the lifting channel, a lifting mechanism is arranged in the driving mechanism chamber, a long groove is formed in the front side of the lifting channel on the frame body, the front end of the partition door is connected with a plurality of rollers capable of sliding in the long groove, and the rear end of the partition door is connected with the lifting mechanism. The cantilever type partition mechanism of the cleaning machine has the characteristics of simple structure, safety, reliability, long service life and convenience in maintenance.

Inventors

  • BAI RUYI
  • WU LIGUO
  • LIN SHANBIN
  • DONG YUQI

Assignees

  • 山东联盛电子设备有限公司

Dates

Publication Date
20260512
Application Date
20250517

Claims (6)

  1. 1. A cantilever type partition mechanism of a cleaning machine is characterized by comprising a frame body (1), wherein a drying chamber (2), a cleaning chamber (3) arranged on the right side or the left side of the drying chamber (2) and a driving mechanism chamber (4) arranged on the rear side of the drying chamber (2) in the frame body are arranged in the frame body (1), a drying table (21) is arranged in the drying chamber (2), a cleaning table (31) is arranged in the cleaning chamber (3), a lifting channel (5) is longitudinally arranged between the drying table (21) and the cleaning table (31), a partition door (6) is arranged in the lifting channel (5), a lifting mechanism is arranged in the driving mechanism chamber (4), a long groove (10) which is vertical to the ground and is backwards opened is formed in the front side of the lifting channel (5) on the frame body (1), the front end of the partition door (6) is connected with a plurality of rollers (61) which can slide in the long groove (10), the rear end of the partition door (6) is connected with the lifting mechanism, and a driving mechanism door (41) communicated with the driving mechanism chamber (4) is arranged on the frame body.
  2. 2. The cantilever type partition mechanism of a cleaning machine according to claim 1, wherein the lifting mechanism comprises a guide rail (7) which is vertically arranged in a driving mechanism chamber (4), a sliding block (71) is arranged on the guide rail (7), the rear end of the right side surface of the partition door (6) is connected with the sliding block (71), a rack (72) is vertically arranged at the rear end of the right side surface of the partition door (6), a partition door driving motor (73) is longitudinally arranged on the left side surface of the vertical plate, a driving gear (74) is arranged on an output shaft of the partition door driving motor (73), and the driving gear (74) is meshed with the rack (72).
  3. 3. The cantilever type partition mechanism for the cleaning machine according to claim 2, wherein a sleeve (75) is vertically arranged on the left side of the rear end of the partition door (6), a balancing weight (76) is inserted into the sleeve (75), and the balancing weight (76) is connected with the top end of the rack (72).
  4. 4. The cantilever type partition mechanism of a cleaning machine according to claim 3, wherein the top end of the balancing weight (76) is connected with a first vertical rod (77) which is vertically arranged, and the top end of the first vertical rod (77) is connected with the top end of the rack (72) through a cross rod (78).
  5. 5. The cantilever shut off mechanism of claim 4, wherein the cross bar (78) is connected to the top end of the rack (72) by a second upright (79).
  6. 6. The cantilever type partition mechanism of the cleaning machine according to claim 1, wherein the two sides of the partition door (6) are respectively provided with a sealing plate (710), the sealing plates (710) are contacted with the rear side surface of the lifting channel (5), and a corrugated plate (711) is connected between the top ends of the two sealing plates (710) and the top end of the driving mechanism chamber (4).

Description

Cantilever type partition mechanism of cleaning machine Technical Field The utility model relates to the technical field of wafer cleaning equipment, in particular to a cantilever type partition mechanism of a cleaning machine. Background In the production of semiconductor devices, silicon wafers must be cleaned strictly because often trace contamination can lead to device failure. The cleaning aims at removing surface pollution impurities including organic matters and inorganic matters. Some of these impurities exist in an atomic state or an ionic state, and some exist in a thin film form or a particle form on the surface of the silicon wafer. Pure water, acidic liquid, alkaline liquid and the like can be adopted for the silicon wafer. The groove type cleaning machine can clean a plurality of silicon wafers at one time. The groove type cleaning machine can also clean the sapphire substrate of the LED and the like. Generally, the silicon wafer cleaning process can be roughly divided into feeding, cleaning, drying and discharging. Wherein the region where the loading and cleaning tanks (also called process tanks) are located is called wet zone, and the dryer and the unloading are called dry zone. During the cleaning process, the material needs to be transferred between the wet and dry sections. However, when materials are not transferred, the wet area and the dry area need to be isolated, otherwise, water vapor, acid mist and the like in the wet area can permeate the dry area to cause secondary pollution. To isolate the wet and dry spaces and to facilitate material transfer, openable isolation structures are typically used in tank cleaners. The existing driving device with the isolation structure is generally arranged above or below the cleaning machine, but the driving device is complex and is easy to be corroded by acid mist and has short service life. Accordingly, a low cost, simple and easy to maintain isolation device is desired to isolate the dry and wet areas in a tank washer. Disclosure of Invention The utility model aims to provide the cantilever type partition mechanism of the cleaning machine, which has a simple structure and is convenient to maintain, and the water vapor, the acid gas or the acid mist and the like in a wet area are prevented from being diffused into a dry area. Another object of the present utility model is to provide a cantilever type partition mechanism for a cleaning machine, which has a power unit capable of preventing moisture, acid gas, acid mist, etc. in a wet area from penetrating the partition mechanism. The service life of the water heater is prolonged. The technical scheme adopted by the utility model is as follows. A cantilever type partition mechanism of a cleaning machine is characterized by comprising a frame body, wherein a drying chamber, a cleaning chamber arranged on the right side or the left side of the drying chamber and a driving mechanism chamber arranged on the rear side of the drying chamber in the frame body are arranged in the frame body, a drying table is arranged in the drying chamber, a cleaning table is arranged in the cleaning chamber, a lifting channel is longitudinally arranged between the drying table and the cleaning table, a partition door is arranged in the lifting channel, a lifting mechanism is arranged in the driving mechanism chamber, a long groove which is backwards opened and vertical to the ground is arranged on the front side of the lifting channel on the frame body, the front end of the partition door is connected with three rollers which can slide in the long groove, and the rear end of the partition door is connected with the lifting mechanism. The frame body is provided with a driving mechanism access door communicated with the driving mechanism chamber. The utility model has the beneficial effects that when the partition door ascends under the action of the lifting mechanism, the partition door divides the cleaning chamber and the drying chamber into two spaces which are not communicated with each other. The lifting door is used for isolating the drying area from the wet area, when materials are required to be transferred between the drying area and the wet area, the lifting door is in an open state, so that a mechanical arm can conveniently transfer the materials, and when the materials are not required to be transferred, the lifting door is in a closed state, so that water vapor, acid gas or acid mist and the like in the wet area can be prevented from being diffused into the drying area. The lifting mechanism is arranged in the driving mechanism chamber by adopting the cantilever structure, and the driving mechanism access door communicated with the driving mechanism chamber is arranged on the frame body, so that the lifting mechanism is convenient to maintain. The front end of the partition door is connected with a plurality of rollers which can slide in the long grooves, the rollers roll in the long grooves, the resistance i