CN-224234117-U - Full-automatic liquid preparation device for preparing liquid by flow metering method

Abstract

The application discloses a full-automatic liquid preparation device for preparing liquid by a flow metering method, which comprises a PLC programmable controller and a preparation mechanism, wherein the preparation mechanism comprises a cleaning tank body and a plurality of liquid medicine pipes arranged above the cleaning tank body, the liquid medicine pipes are provided with a flowmeter and a pneumatic diaphragm valve positioned at the rear end of the flowmeter, the flowmeter is used for detecting the liquid medicine flow of the liquid medicine pipes, the PLC programmable controller is used for setting the proportion and the formula of a solution, and the PLC programmable controller is used for controlling the opening and closing of the pneumatic diaphragm valve according to the liquid medicine flow signals detected by the flowmeter and the set proportion. Compared with the prior art, the automatic liquid medicine dispensing device has the advantages that the flow rate of liquid medicine is accurately detected through the flow meter, the pneumatic diaphragm valve is automatically controlled to be opened and closed according to the set proportion and the formula by the aid of the PLC, accurate liquid medicine proportioning is achieved, the problem of accuracy of traditional manual liquid medicine dispensing is avoided, and the safety of operation is improved through automatic control.

Inventors

• JIA SHIJIE
• WANG YUNFEI
• WEI SHOUCHONG

Assignees

• 磐石创新(江苏)电子装备有限公司

Dates

Publication Date

20260512

Application Date

20230915

Claims (4)

1. 1. The full-automatic liquid preparation device for preparing liquid by a flow metering method is characterized by comprising a PLC programmable controller (6) and a preparation mechanism; The preparation mechanism comprises a cleaning tank body (5) and a plurality of liquid medicine pipes (4) arranged above the cleaning tank body (5), wherein a flowmeter (3) and a pneumatic diaphragm valve (2) arranged at the rear end of the flowmeter (3) are arranged on the liquid medicine pipes (4), the flowmeter (3) is used for detecting the liquid medicine flow of the liquid medicine pipes (4), the PLC (6) is used for setting the proportion and the formula of a solution, and the PLC (6) is used for controlling the opening and closing of the pneumatic diaphragm valve (2) according to the liquid medicine flow signals detected by the flowmeter (3) and the set proportion.
2. 2. The full-automatic liquid dispensing device for dispensing liquid by a flow metering method according to claim 1, wherein a liquid level sensor (7) is further arranged on the cleaning tank body (5).
3. 3. The full-automatic liquid preparation device for preparing liquid by a flow metering method according to claim 1, wherein the liquid medicine pipe (4) is further provided with a manual diaphragm valve (1) positioned at the rear end of the pneumatic diaphragm valve (2).
4. 4. The full-automatic liquid dispensing device for dispensing liquid by a flow metering method according to claim 1, wherein the flowmeter (3) is a non-contact electronic flowmeter.

Description

Full-automatic liquid preparation device for preparing liquid by flow metering method Technical Field The application relates to the technical field of semiconductor production, in particular to a full-automatic liquid dispensing device for dispensing liquid by a flow metering method. Background The cleaning process of the semiconductor needs different chemical solutions to participate in completion, in the cleaning process, the materials to be cleaned are required to be placed in the tank bodies of different solutions to execute cleaning operation, as various cleaning solutions are usually prepared according to corresponding proportions by a plurality of chemical raw liquids according to different chemical properties, the traditional liquid preparation mode mainly comprises manual liquid preparation and automatic liquid preparation according to the volume, but the manual liquid preparation precision is poor, the solution is easy to be polluted by the external environment outside the environment, and due to dangerous chemicals involved in the operation, personal safety accidents can be possibly caused by improper operation, the automatic liquid preparation according to the volume is mainly calculated according to the container proportion example, the volume scale of each liquid medicine is attached with a sensor to carry out metering, the liquid preparation mode is inconvenient in changing the liquid medicine proportion operation, the liquid preparation mode can be adjusted only by moving hardware (a sensor), and is mainly required to be operated by a special liquid preparation tank, the operation convenience is poor, and the targeted quantitative liquid supplement cannot be carried out. Disclosure of utility model In order to overcome the technical defects, the application provides a full-automatic liquid dispensing device for dispensing liquid by a flow metering method. According to the application, a full-automatic liquid dispensing device for dispensing liquid by a flow metering method comprises a PLC programmable controller and a dispensing mechanism; The preparation mechanism comprises a cleaning tank body and a plurality of liquid medicine pipes arranged above the cleaning tank body, wherein the liquid medicine pipes are provided with a flowmeter and a pneumatic diaphragm valve positioned at the rear end of the flowmeter, the flowmeter is used for detecting the liquid medicine flow of the liquid medicine pipes, the PLC is used for setting the proportion and the formula of the solution, and the PLC is used for controlling the opening and closing of the pneumatic diaphragm valve according to the liquid medicine flow signals detected by the flowmeter and the set proportion. Preferably, the tank body of the cleaning tank is also provided with a liquid level sensor. Preferably, the liquid medicine pipe is also provided with a manual diaphragm valve positioned at the rear end of the pneumatic diaphragm valve. Preferably, the flowmeter is a non-contact electronic flowmeter. Compared with the prior art, the full-automatic liquid preparation device for preparing liquid by a flow metering method has the advantages that the flow of liquid medicine is accurately detected by the flow meter, and the PLC is matched to automatically control the opening and closing of the pneumatic diaphragm valve according to the set proportion and the formula, so that accurate liquid medicine proportioning is realized, and the problem of precision of traditional manual liquid preparation is avoided. And the application reduces the chance of operators contacting dangerous chemicals through automatic control, and improves the safety of operation. In addition, the whole device has the advantages of simple structure, low cost, easy operation, high response speed and small occupied space, can effectively prevent solution pollution and save production cost. Drawings Fig. 1 is a schematic structural view of a fully automatic liquid dispensing device for dispensing liquid by a flow metering method according to the present application. The device comprises a manual diaphragm valve 1, a pneumatic diaphragm valve 2, a flowmeter 3, a liquid medicine pipe 4, a liquid cleaning tank body 5, a PLC programmable controller 6, a liquid level sensor 7. Detailed Description The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application. Referring to fig. 1, a full-automatic liquid dispensing device for dispensing liquid by a flow metering method comprises a Programmable Logic Controller (PLC) 6 and a dispensing mechanism; The prepa