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CN-224234121-U - Blue membrane overspeed device tensioner

CN224234121UCN 224234121 UCN224234121 UCN 224234121UCN-224234121-U

Abstract

The utility model discloses a blue film tensioning device which comprises a mounting table, an adsorption fixing assembly, a tensioning assembly and a tensioning assembly, wherein the adsorption fixing assembly comprises an adsorption table and a negative pressure piece, the adsorption table adsorbs and fixes a wafer, the tensioning assembly comprises a first fixing plate, a second fixing plate, an adjusting piece and an elastic piece, the first fixing plate and the second fixing plate are respectively arranged on two sides of the adsorption table, the elastic piece is connected between the adjusting piece and the adsorption fixing assembly, the first fixing plate and the second fixing plate are respectively used for fixing two edges of a blue film, the adjusting piece can drive the second fixing plate to move close to or far away from the adsorption fixing assembly under the action of external force so as to have a compression position and a tensioning position, when the tensioning assembly is positioned at the compression position, the distance between the first fixing plate and the second fixing plate is smaller than the width of the blue film, when the tensioning assembly is positioned at the tensioning position, the distance between the first fixing plate and the second fixing plate is approximately consistent with the width of the blue film so as to flatten the blue film in a non-flattened state, the blue film is effectively tensioned, the relaxation is avoided, the processing quality of the wafer is improved, and the tensioning device is simple in structure and convenient to operate.

Inventors

  • DING SHAOCHUN
  • WAN SHIYUAN
  • SHEN DA
  • XUE YALING

Assignees

  • 吾拾微电子(苏州)有限公司

Dates

Publication Date
20260512
Application Date
20250307

Claims (10)

  1. 1. A blue film tensioning device, comprising: A mounting table; The adsorption fixing assembly comprises an adsorption table and a negative pressure piece, wherein a plurality of adsorption holes communicated with the negative pressure piece are formed in the adsorption table, and the plurality of adsorption holes adsorb and fix the wafer under the action of the negative pressure piece; The tensioning assembly comprises a first fixing plate and a second fixing plate which are respectively arranged at two sides of the adsorption table, an adjusting piece which is arranged at the outer side of the second fixing plate and connected with the second fixing plate, and an elastic piece which is connected between the adjusting piece and the adsorption fixing assembly, wherein the first fixing plate and the second fixing plate are respectively used for fixing two edges of a blue film, and the adjusting piece can drive the second fixing plate to move close to or far away from the adsorption fixing assembly under the action of external force so as to have a compression position and a tensioning position; When the first fixing plate and the second fixing plate are positioned at the compression position, the distance between the first fixing plate and the second fixing plate is smaller than the width of the blue film; when the blue film is positioned at the tensioning position, the distance between the first fixing plate and the second fixing plate tends to be consistent with the width of the blue film.
  2. 2. The blue film tensioning device according to claim 1, wherein the tensioning assembly further comprises a supporting rod and a supporting block which are arranged on the outer side of the adjusting piece, a gap exists between the supporting rod and the adjusting piece, the width of the supporting block is matched with the width of the gap, and the supporting block is used for being inserted into the gap to press the adjusting piece to drive the second fixing plate to move from the tensioning position to the compression position.
  3. 3. The blue film tensioning device according to claim 2, wherein the tensioning assembly further comprises a stop member disposed on the abutment bar; When the second fixing plate is located at the tensioning position, the limiting piece is abutted with the adjusting piece.
  4. 4. The blue film tensioning device according to claim 1, wherein the first and second fixing plates each comprise a connecting portion and a fixing portion for fixing a blue film edge; the fixing part is provided with a strip-shaped groove.
  5. 5. The blue film tensioning device according to claim 4, wherein a plurality of through holes are arranged in the strip-shaped groove, and the through holes are used for communicating with a vacuum component.
  6. 6. The blue film tensioning apparatus according to claim 4 or 5, further comprising a magnetic attraction member for fixing the blue film with the first fixing plate/the second fixing plate.
  7. 7. The blue film tensioning device according to claim 1, further comprising a drive assembly including a first drive member coupled to the first fixed plate and a second drive member coupled to the second fixed plate, the first and second drive members for driving the first and second fixed plates together to move up and down to have a first position and a second position, respectively; When the first fixing plate and the second fixing plate are positioned at the first position, the first fixing plate and the second fixing plate are flush with the adsorption table; When the first fixing plate and the second fixing plate are positioned at the second position, the first fixing plate and the second fixing plate are higher than the adsorption table.
  8. 8. The blue film tensioning apparatus according to claim 7, wherein a distance between the blue film on the first and second fixing plates and the suction table is 0.8-1.2cm when in the second position.
  9. 9. The blue film tensioning device according to claim 7, further comprising a guide assembly including a guide rod disposed on one of the tensioning assembly and the mounting table and a linear bearing mounted on the other, the drive assembly being capable of driving the tensioning assembly to move up and down through the guide rod and the linear bearing.
  10. 10. The blue film tensioning device according to claim 1, wherein the elastic member includes a first end and a second end, the first end being connected to the adjustment member, the second end being provided with a spacer.

Description

Blue membrane overspeed device tensioner Technical Field The utility model relates to the technical field of wafer processing, in particular to a blue film tensioning device. Background In semiconductor manufacturing and packaging processes, blue film (Blue Tape) is widely used for dicing, transportation, and temporary fixation of wafers. In order to ensure that the wafer remains stable during processing, the blue film needs to have an appropriate degree of tension to avoid displacement or damage of the wafer due to relaxation, or uneven surface where the blue film and the wafer are attached, bubbles, and the like. However, existing blue film fixtures are complex to operate, often rely on manual adjustment, are inefficient, and are difficult to ensure consistency. Disclosure of utility model In view of the above, the object of the present application to solve at least one of the problems in the background art is achieved by a blue film tensioning device, comprising: A mounting table; The adsorption fixing assembly comprises an adsorption table and a negative pressure piece, wherein a plurality of adsorption holes communicated with the negative pressure piece are formed in the adsorption table, and the plurality of adsorption holes adsorb and fix the wafer under the action of the negative pressure piece; The tensioning assembly comprises a first fixing plate and a second fixing plate which are respectively arranged at two sides of the adsorption table, an adjusting piece which is arranged at the outer side of the second fixing plate and connected with the second fixing plate, and an elastic piece which is connected between the adjusting piece and the adsorption fixing assembly, wherein the first fixing plate and the second fixing plate are respectively used for fixing two edges of a blue film, and the adjusting piece can drive the second fixing plate to move close to or far away from the adsorption fixing assembly under the action of external force so as to have a compression position and a tensioning position; When the first fixing plate and the second fixing plate are positioned at the compression position, the distance between the first fixing plate and the second fixing plate is smaller than the width of the blue film; when the blue film is positioned at the tensioning position, the distance between the first fixing plate and the second fixing plate tends to be consistent with the width of the blue film. Optionally, the blue film tensioning device, the tensioning assembly further comprises a supporting rod and a supporting block arranged on the outer side of the adjusting piece, a gap exists between the supporting rod and the adjusting piece, the width of the supporting block is matched with the width of the gap, and the supporting block is used for being inserted into the gap to extrude the adjusting piece to drive the second fixing plate to move from the tensioning position to the compression position. Optionally, in the above blue film tensioning device, the tensioning assembly further includes a limiting member disposed on the supporting rod; When the second fixing plate is located at the tensioning position, the limiting piece is abutted with the adjusting piece. Optionally, in the above blue film tensioning device, the first fixing plate and the second fixing plate each include a connecting portion and a fixing portion, and the fixing portion is used for fixing an edge of the blue film; the fixing part is provided with a strip-shaped groove. Optionally, in the above blue film tensioning device, a plurality of through holes are provided in the strip-shaped groove, and the plurality of through holes are used for communicating with the vacuum component. Optionally, in the above blue film tensioning device, the blue film tensioning device further includes a magnetic attraction member for fixing the blue film to the first fixing plate/the second fixing plate. Optionally, in the above blue film tensioning device, the blue film tensioning device further includes a driving assembly, where the driving assembly includes a first driving member connected to the first fixing plate and a second driving member connected to the second fixing plate, and the first driving member and the second driving member are respectively used to drive the first fixing plate and the second fixing plate to move up and down together to have a first position and a second position; When the first fixing plate and the second fixing plate are positioned at the first position, the first fixing plate and the second fixing plate are flush with the adsorption table; When the first fixing plate and the second fixing plate are positioned at the second position, the first fixing plate and the second fixing plate are higher than the adsorption table. Optionally, when the blue film tensioning device is located at the second position, a distance between the blue film on the first fixing plate and the second fixing plate and the adsorption table