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CN-224234126-U - Semiconductor etching equipment with alarm function

CN224234126UCN 224234126 UCN224234126 UCN 224234126UCN-224234126-U

Abstract

The utility model discloses semiconductor etching equipment with an alarm function, which comprises a machine table, a purifying device, an alarm device, a control piece and an alarm signal, wherein the machine table is used for processing a wafer, the purifying device is communicated with the machine table and used for collecting gas exhausted by the machine table, the alarm device is electrically connected with the purifying device and used for giving an alarm when the purifying device fails, the control piece is electrically connected with the alarm device, and when the purifying device fails, the alarm device gives an alarm signal to enable the control piece to control the machine table to stop working. The utility model can synchronously stop the purifying device and the machine when the alarm device gives an alarm, so as to realize linkage alarm.

Inventors

  • ZONG LIDONG
  • Ren Tiantong
  • SONG HONGTAO

Assignees

  • 芯恩（青岛）集成电路有限公司

Dates

Publication Date
20260512
Application Date
20250423

Claims (10)

  1. 1. A semiconductor etching apparatus having an alarm function, comprising: A machine (100) for processing a wafer; The purifying device (200) is communicated with the machine table (100) and is used for collecting gas exhausted by the machine table (100); An alarm device (300) electrically connected to the purification device (200) to issue an alarm when the purification device (200) fails; A control member (110) electrically connected to the alarm device (300); When the purifying device (200) fails, the alarm device (300) sends out an alarm signal, so that the control piece (110) controls the machine (100) to stop working.
  2. 2. The semiconductor etching apparatus according to claim 1, wherein a control circuit is provided in the machine (100) to control start and stop of the machine (100); The control piece (110) is arranged in series in the control circuit, when the control piece (110) receives the alarm signal, the control circuit is controlled to be disconnected, and the machine (100) stops working.
  3. 3. The semiconductor etching apparatus according to claim 2, wherein the control member (110) is a normally closed relay; When the purifying device (200) fails, the alarm device (300) sends out an alarm signal, the control piece (110) is disconnected after receiving the alarm signal, so that the control circuit is disconnected, and the machine (100) stops working; when the purifying device (200) fails, the control piece (110) is closed, so that the control circuit is conducted, and the machine (100) works normally.
  4. 4. The semiconductor etching apparatus according to claim 1, further comprising: A first pipe (120) having one end connected to the machine (100) and the other end connected to the purification device (200); The control valve (121) is arranged on the first pipeline (120) to control the on-off of the first pipeline (120), and the control valve (121) is electrically connected with the alarm device (300); And one end of the second pipeline (130) is communicated with the control valve (121), when the purifying device (200) fails, the alarm device (300) sends out an alarm signal, the control valve (121) receives the alarm signal, so that the first pipeline (120) is closed, and the second pipeline (130) is opened to discharge gas.
  5. 5. The semiconductor etching apparatus according to claim 4, further comprising a collection apparatus communicating with the other end of the second pipe (130) to collect the gas exhausted from the machine (100) when the second pipe (130) is opened.
  6. 6. The semiconductor etching apparatus according to claim 4, wherein the semiconductor etching apparatus is provided with a plurality of; the other end of the second pipeline (130) is communicated with the purifying device (200) of the adjacent semiconductor etching equipment, so that when one purifying device (200) fails, the machine (100) is communicated with the purifying device (200) of the adjacent semiconductor etching equipment.
  7. 7. The semiconductor etching apparatus according to claim 4, wherein the control valve (121) is an electromagnetic three-way valve; When the purifying device (200) fails, the alarm device (300) gives an alarm, so that the control valve (121) controls the first pipeline (120) to be closed, and the second pipeline (130) is communicated with the machine (100); When the purifying device (200) operates normally, the control valve (121) controls the second pipeline (130) to be closed, and the first pipeline (120) is communicated with the machine (100).
  8. 8. The semiconductor etching apparatus according to claim 7, wherein the purifying means (200) further comprises: The detection circuit is electrically connected with the alarm device (300) and is used for detecting whether the purification device (200) fails, when the purification device (200) fails, the detection circuit activates the alarm device (300) to send out an alarm, and when the purification device (200) works normally, the detection circuit does not activate the alarm device (300).
  9. 9. The semiconductor etching apparatus according to claim 8, wherein the alarm device (300) comprises: A fault indicator (310) electrically connected to the detection circuit to issue an alarm signal when the purification device (200) fails; an operation indicator (320) electrically connected to the detection circuit to signal when the purification device (200) is operating normally; The control member (110) and the control valve (121) are both electrically connected to the fault indicator (310) such that the control member (110) and the control valve (121) are activated when the fault indicator (310) emits an alarm signal.
  10. 10. The semiconductor etching apparatus according to claim 9, wherein the fault indicator (310) includes an indicator lamp and a buzzer, both of which are electrically connected to the detection circuit, so that the indicator lamp and the buzzer work together when the cleaning device (200) fails.

Description

Semiconductor etching equipment with alarm function Technical Field The utility model relates to the technical field of semiconductor equipment, in particular to semiconductor etching equipment with an alarm function. Background In the current semiconductor manufacturing industry, semiconductor etching equipment is required for processing wafers, particularly etching processes. These devices produce some amount of harmful gases during processing, and therefore, an exhaust gas treatment device is usually provided to purify the gases to protect the environment and operators. However, most of the existing semiconductor etching devices have a potential safety hazard, that is, when the tail gas treatment device fails, the host computer station cannot carry out an alarm in linkage with the tail gas treatment device, and the shutdown protection of the host computer station cannot be triggered. Specifically, when the tail gas treatment device alarms, the existing eight-inch machine can only display the signal lamp flashing and buzzing prompt of the tail gas treatment device at the end of the machine, so that the alarm or warning of the machine can not be generated, and the machine can not be stopped. Which can affect wafer processing quality. Accordingly, there is a need to provide a new semiconductor etching apparatus having an alarm function to solve the above-mentioned problems in the prior art. Disclosure of utility model The utility model aims to provide semiconductor etching equipment with an alarm function, which can synchronously stop a purifying device and a machine when an alarm device gives an alarm so as to realize linkage alarm. In order to achieve the above purpose, the technical scheme of the utility model is as follows: A semiconductor etching apparatus having an alarm function, comprising: The machine is used for processing the wafer; the purifying device is communicated with the machine and is used for collecting gas exhausted by the machine; an alarm device electrically connected to the purification device to issue an alarm when the purification device fails; a control member electrically connected to the alarm device; When the purifying device is in fault, the alarm device sends out an alarm signal, so that the control piece controls the machine to stop working. By adopting the technical scheme, the purifying device and the machine can be linked to warn, so that the machine can be immediately stopped when the purifying device has a problem, the influence on the processing quality of wafers possibly caused by improper tail gas treatment is avoided, the quality and the yield of products are ensured, meanwhile, the purifying device and the machine are electrically connected through the alarm device, the utility model realizes the linkage control of the purifying device and the machine, can timely inform the machine and take stopping measures when the purifying device fails, and in addition, the semiconductor etching equipment can be automatically switched to a standby purifying device or stopped when the purifying device fails, so that the reliability and the stability of the equipment are improved. Optionally, a control circuit is arranged in the machine to control the start and stop of the machine; The control piece is arranged in series in the control circuit, and when the control piece receives the alarm signal, the control piece controls the control circuit to be disconnected, and the machine stops working. Optionally, the control element is a normally closed relay; When the purifying device fails, the alarm device sends out an alarm signal, the control piece is disconnected after receiving the alarm signal, so that the control circuit is disconnected, and the machine stops working; when the purifying device fails, the control piece is closed, so that the control circuit is conducted, and the machine works normally. Optionally, the method further comprises: One end of the first pipeline is communicated with the machine table, and the other end of the first pipeline is communicated with the purifying device; The control valve is arranged on the first pipeline to control the on-off of the first pipeline and is electrically connected with the alarm device; And one end of the second pipeline is communicated with the control valve, when the purifying device fails, the alarm device sends out an alarm signal, the control valve receives the alarm signal, so that the first pipeline is closed, and the second pipeline is opened to exhaust gas. Optionally, the device further comprises a collecting device, wherein the collecting device is communicated with the other end of the second pipeline, so that the gas exhausted by the machine table is collected when the second pipeline is opened. Optionally, the semiconductor etching device is provided with a plurality of semiconductor etching devices; The other end of the second pipeline is communicated with the purifying device adjacent to the semiconductor etchi