CN-224234127-U - Safety grating device for front opening wafer transfer box

Abstract

The utility model discloses a safety grating device for a front opening wafer conveying box, which belongs to the technical field of semiconductor manufacturing equipment and comprises a sensor support guardrail arranged at the periphery of an operation area of a crown block and the front opening wafer conveying box, wherein a plurality of groups of safety gratings and distance sensors are integrally arranged at one side of the sensor support guardrail facing the operation area of the crown block and the front opening wafer conveying box, a three-color warning lamp is arranged at the top of the sensor support guardrail, a middle plate with a main control unit is arranged at the back of the sensor support guardrail, the main control unit is electrically connected with the three-color warning lamp and the safety gratings and the distance sensors, and a power box for supplying power to the three-color warning lamp, the main control unit, the safety gratings and the distance sensors is arranged at one side of the bottom of the sensor support guardrail. According to the utility model, the approach of personnel is monitored in real time and the alarm is triggered through the cooperative detection and dynamic warning of the multiple sensors, so that the personnel injury during the operation of the crown block is avoided.

Inventors

• Yan Zhanzhong
• Sun Fuqi
• ZHANG HUI
• WANG DAN

Assignees

• 北京芯源科技有限公司

Dates

Publication Date

20260512

Application Date

20250429

Claims (7)

1. 1. The utility model provides a safe grating device for preceding open wafer conveyer box, characterized by, including being located the sensor support guardrail (2) of overhead traveling crane and preceding open wafer conveyer box's operation region peripheral installation, multiunit safety grating (5) and distance sensor (6) are installed towards one side integration of overhead traveling crane and preceding open wafer conveyer box's operation region to sensor support guardrail (2), three-color warning light (3) are installed at the top of sensor support guardrail (2), the back-mounted of sensor support guardrail (2) has intermediate lamella (4) of taking the master control unit, and master control unit and three-color warning light (3), safety grating (5) and distance sensor (6) electric connection, power pack (1) for three-color warning light (3), master control unit, safety grating (5) and distance sensor (6) power supply are installed to one side of the bottom of sensor support guardrail (2).
2. 2. The safety grating device for a front opening wafer transfer cassette of claim 1, wherein the safety grating (5) comprises a plurality of sets of opposite-type infrared beams, and the plurality of sets of opposite-type infrared beams form a three-dimensional protection network and have a detection range of 0.5-3 meters.
3. 3. The safety grating device for the front opening wafer transfer cassette of claim 1, wherein the sensor support rail (2) is made of a lightweight aluminum alloy material, and the surface of the sensor support rail is covered with an antistatic coating.
4. 4. The safety grating device for a front opening unified pod according to claim 1, wherein a voltage regulator circuit is integrated within the power pod (1) and a backup battery is built in.
5. 5. Safety grating device for front opening pods according to claim 1 wherein the main control unit of the intermediate plate (4) has a built-in signal processing module.
6. 6. Safety grating device for front opening pods according to claim 1 wherein the distance sensor (6) employs millimeter wave radar.
7. 7. Safety grating device for front opening wafer transfer cassettes according to claim 1, characterized in that the three-colour warning light (3) is provided with an audible alarm module.

Description

Safety grating device for front opening wafer transfer box Technical Field The utility model relates to a safety grating device for a front opening wafer transfer box, and belongs to the technical field of semiconductor manufacturing equipment. Background In the semiconductor manufacturing process, the crown block is a core device for automatically transporting a FOUP in a clean room, and is responsible for precisely transporting the FOUP (front opening unified pod) loaded with wafers to each process machine (such as a photolithography machine, an etching machine, etc.). This process requires strict avoidance of personnel contact to prevent contamination of the wafer by particles, moisture or static electricity. However, when the crown block lifts up and down to take and place the FOUP, if a worker enters the operation area by mistake, personal injury may be caused by mechanical collision or unexpected falling of the FOUP. In the prior art, a machine usually depends on a physical fence or a simple warning mark, but the following problems exist: 1. The response is lagged, namely the traditional sensor has limited detection range and cannot early warn in real time; 2. The flexibility is poor, the fixed fence affects equipment maintenance and emergency operation; 3. Insufficient visibility static identification is difficult to draw attention in complex environments. Therefore, there is a need for an intelligent safety device that reduces personnel safety risks while ensuring efficient transportation. Disclosure of Invention The utility model aims to overcome the defects in the prior art, and provides a safety grating device for a front-opening wafer conveying box, which monitors the approach of a person and triggers an alarm in real time through the cooperative detection and dynamic warning of a plurality of sensors, so that the injury of the person during the operation of a crown block is avoided. In order to achieve the above purpose, the utility model is realized by adopting the following technical scheme: In a first aspect, the utility model provides a safety grating device for a front opening wafer transfer box, comprising a sensor support guardrail arranged at the periphery of an operation area of a crown block and the front opening wafer transfer box, wherein a plurality of groups of safety gratings and distance sensors are integrally arranged on one side of the sensor support guardrail facing the operation area of the crown block and the front opening wafer transfer box, a three-color warning lamp is arranged on the top of the sensor support guardrail, a middle plate with a main control unit is arranged on the back of the sensor support guardrail, the main control unit is electrically connected with the three-color warning lamp and the safety gratings and the distance sensors, and a power box for supplying power to the three-color warning lamp, the main control unit, the safety gratings and the distance sensors is arranged on one side of the bottom of the sensor support guardrail. Further, the safety grating comprises a plurality of groups of opposite-type infrared light beams, the plurality of groups of opposite-type infrared light beams form a three-dimensional protective net, and the detection range is 0.5-3 meters. Furthermore, the sensor support guardrail is made of light aluminum alloy materials, and the surface of the sensor support guardrail is covered with an antistatic coating. Furthermore, a voltage stabilizing circuit is integrated in the power box, and a standby battery is arranged in the power box. Further, a signal processing module is arranged in the main control unit of the middle plate. Further, the distance sensor adopts millimeter wave radar. Further, the three-color warning lamp is provided with a sound warning module. Compared with the prior art, the utility model has the beneficial effects that: The safety grating device for the front opening wafer conveying box is provided, the safety grating device is used for cooperatively detecting and dynamically warning through multiple sensors, monitoring personnel approaching and triggering an alarm in real time, avoiding personnel injury during operation of a crown block, in addition, the safety grating device greatly reduces false alarm rate through high-precision protection and multi-sensor fusion detection, the detection range of the sensor of the device can be dynamically adjusted according to a machine table layout, three-color warning lamps can carry out acousto-optic warning on personnel approaching to the crown block and an operation area of the front opening wafer conveying box, personnel alertness is improved, and the modular design of the scheme supports rapid replacement of fault components, and maintenance cost is low. Drawings The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the