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CN-224234128-U - Hot pressing bearing table device

CN224234128UCN 224234128 UCN224234128 UCN 224234128UCN-224234128-U

Abstract

The utility model relates to the technical field of semiconductor production processes and equipment, and provides a hot-pressing bearing table device which comprises a plane base, a raised base, a table top component and a plurality of metal vertical plates, wherein the plane base is provided with a fixing hole, the raised base is arranged on the plane base, the table top component is arranged on the raised base, the table top component is provided with a polishing surface, the table top component is provided with a vacuum groove at the polishing surface, a first vacuum suction hole is arranged in the vacuum groove and is used for sucking a flexible circuit board, the plurality of metal vertical plates are arranged around the raised base and the table top component in a screw locking mode, and each metal vertical plate is connected with the raised base and the table top component. By the arrangement, the problem that the hot pressing plummer device is easy to crack at the screw hole can be effectively solved, and separation and falling of the convex base and the table top component are avoided.

Inventors

  • HE ZHAOGANG

Assignees

  • 鋐源光电科技（厦门）有限公司

Dates

Publication Date
20260512
Application Date
20250507

Claims (10)

  1. 1. The hot press bearing table device is characterized by comprising: The plane base is provided with a fixing hole; The convex base is arranged above the plane base, and the fixing hole is positioned on the upper surface of the plane base which is not covered by the convex base; The table top component is arranged above the raised base and is provided with a polishing surface, the table top component is provided with a vacuum groove at the polishing surface, a first vacuum suction hole is formed in the vacuum groove, and the first vacuum suction hole is used for sucking the flexible circuit board; the metal vertical plates are arranged around the raised base and the table top component in a screw locking mode, and each metal vertical plate is connected with the raised base and the table top component.
  2. 2. The thermocompression bonding stage device according to claim 1, wherein a first through hole is provided around the stage assembly, a second through hole is provided around the bump base, a third through hole and a fourth through hole are provided on the metal vertical plate, the third through hole corresponds to the first through hole, the fourth through hole corresponds to the second through hole, a first screw passes through the third through hole and the first through hole, and a second screw passes through the fourth through hole and the second through hole, so that the metal vertical plate connects the bump base and the stage assembly at the same time.
  3. 3. The thermocompression bonding plummer device of claim 1, wherein the upper surface of the raised base is provided with a first through hole, the lower surface of the table top assembly is provided with a second through hole, and screws are used to pass through the first through hole and the second through hole to fix the raised base and the table top assembly.
  4. 4. The apparatus of claim 1, wherein the surface of the raised base is provided with a second vacuum hole, and the second vacuum hole is connected to the vacuum hole to form a vacuum channel.
  5. 5. The thermocompression bonding plummer device of claim 1, wherein the sidewall of the table top assembly is provided with a first cooling through hole, the surface of the raised base is provided with a second cooling through hole, and the first cooling through hole is communicated with the second cooling through hole to form a cooling channel.
  6. 6. The thermocompression bonding plummer device according to claim 1, wherein the bump base is provided with a temperature sensing hole for placing a temperature sensing rod.
  7. 7. The thermally bonded carrier assembly of claim 1, wherein the material of the table top assembly comprises aluminum nitride or silicon carbide.
  8. 8. The thermally bonded stage assembly of claim 1, wherein the metal risers are comprised of steel or tungsten carbon steel.
  9. 9. The thermally bonded stage assembly of claim 1, wherein said planar base and said raised base are comprised of steel or tungsten carbon steel.
  10. 10. The thermocompression bonding stage device according to claim 1, further comprising a pad positioned between the mesa assembly and the raised base.

Description

Hot pressing bearing table device Technical Field The utility model relates to the technical field of semiconductor production processes and equipment, in particular to a hot pressing bearing table device for a semiconductor flip chip packaging process. Background The conventional COF process is mainly used for carrying flexible circuit boards and chips and comprises the following steps of processing an aluminum nitride or silicon carbide ceramic sintered body into a component of a thermal compression bearing table surface, adhering and bonding the component with a metal base in a high-temperature resistant adhesive manner, and polishing the use surface of a cutter pressing head to obtain the thermal compression bearing table. However, because the thermal expansion coefficient of aluminum nitride or silicon carbide material is greatly different from that of the metal base, the temperature used in the process is usually 120-180 ℃, and the adhesive joint surface is peeled off after heating because of the different expansion amounts of the aluminum nitride or silicon carbide material, so that the bearing table top component of the silicon carbide is further partially peeled off or displaced. Some attempts are made to fix the glued metal base and the bearing table top component with the aid of screws, but after the screws are heated, aluminum nitride or silicon carbide ceramics are cracked, and a gap between the two can cause vacuum leakage, so that the bearing table top cannot effectively fix the flexible circuit board. It should be noted that the information disclosed in this background section is only for the purpose of increasing the understanding of the general background of the utility model and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person of ordinary skill in the art. Disclosure of utility model The utility model provides a hot pressing bearing table device which comprises a plane base, a convex base, a table top component and a plurality of metal vertical plates. The protruding base is arranged on the plane base, a fixing hole is formed in the plane base, and the fixing hole is located on the upper surface of the plane base, which is not covered by the protruding base. The table top component is arranged on the raised base and is provided with a polishing surface, the table top component is provided with a vacuum groove at the polishing surface, a first vacuum suction hole is formed in the vacuum groove and used for sucking the flexible circuit board. A plurality of metal vertical plates are arranged around the raised base and the table top component in a screw locking mode, and each metal vertical plate is connected with the raised base and the table top component. Further, a first through hole is formed around the table top component, a second through hole is formed around the raised base, a third through hole and a fourth through hole are formed on the metal vertical plate, the third through hole corresponds to the first through hole, the fourth through hole corresponds to the second through hole, a first screw penetrates through the third through hole and the first through hole, and a second screw penetrates through the fourth through hole and the second through hole, so that the metal vertical plate is connected with the raised base and the table top component at the same time. Further, the upper surface of the raised base is provided with a first through hole, the lower surface of the table top component is provided with a second through hole, and the raised base and the table top component are fixed by penetrating the first through hole and the second through hole through screws. Further, a second vacuum suction hole is formed in the surface of the protruding base, and the second vacuum suction hole is communicated with the vacuum suction hole to form a vacuum channel. Further, a first cooling through hole is formed in the side wall of the table top component, a second cooling through hole is formed in the surface of the protruding base, and the first cooling through hole is communicated with the second cooling through hole to form a cooling channel. Further, a temperature sensing hole for placing a temperature sensing rod is formed in the protruding base. Further, the mesa assembly material comprises aluminum nitride or silicon carbide. Further, the material of the metal vertical plate comprises steel or tungsten carbon steel. Further, the materials of the planar base and the raised base include steel or tungsten carbon steel. Further, the thermal compression stage apparatus further includes a cushion positioned between the stage assembly and the raised base. Based on the above, the hot-pressing bearing table device provided by the utility model can effectively solve the problem that the hot-pressing bearing table device is easy to crack at the screw hole by the collocation arrangement of the convex base,