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CN-224234129-U - Hot pressing head device

CN224234129UCN 224234129 UCN224234129 UCN 224234129UCN-224234129-U

Abstract

The utility model relates to the technical field of semiconductor production processes and equipment, and provides a hot press head device which comprises a planar base, a raised base, a tool bit assembly and a plurality of metal vertical plates, wherein a fixing hole is formed in the planar base, the raised base is arranged on the planar base, the tool bit assembly is arranged on the raised base, the tool bit assembly is provided with a polishing surface, the tool bit assembly is provided with a first vacuum suction hole at the polishing surface, the first vacuum suction hole is used for sucking a chip, the plurality of metal vertical plates are arranged around the raised base and the tool bit assembly in a screw locking mode, and each metal vertical plate is connected with the raised base and the tool bit assembly. By the arrangement, the hot pressing head device can use the same tool bit assembly for production processes at different temperatures, and the separation and falling of the convex base and the tool bit assembly are avoided.

Inventors

  • HE ZHAOGANG

Assignees

  • 鋐源光电科技（厦门）有限公司

Dates

Publication Date
20260512
Application Date
20250507

Claims (10)

  1. 1. The hot press head device is characterized by comprising: The plane base is provided with a fixing hole; The convex base is arranged above the plane base, and the fixing hole is positioned on the upper surface of the plane base which is not covered by the convex base; The tool bit assembly is arranged on the raised base and is provided with a polishing surface, and a first vacuum suction hole is formed in the tool bit assembly at the polishing surface and used for sucking a chip; The plurality of metal vertical plates are arranged around the raised base and the tool bit assembly in a screw locking mode, and each metal vertical plate is connected with the raised base and the tool bit assembly.
  2. 2. The head assembly according to claim 1, wherein a first through hole is formed around the head assembly, a second through hole is formed around the raised base, a third through hole and a fourth through hole are formed on the metal vertical plate, the third through hole corresponds to the first through hole, the fourth through hole corresponds to the second through hole, a first screw passes through the third through hole and the first through hole, and a second screw passes through the fourth through hole and the second through hole, so that the metal vertical plate connects the raised base and the head assembly at the same time.
  3. 3. The head assembly of claim 1, wherein the upper surface of the raised base is provided with a first through hole, the lower surface of the head assembly is provided with a second through hole, and screws are used to pass through the first through hole and the second through hole to fix the raised base and the head assembly.
  4. 4. The apparatus of claim 1, wherein the surface of the raised base is provided with a second vacuum suction hole, and the second vacuum suction hole is communicated with the vacuum suction hole to form a vacuum channel.
  5. 5. The head assembly of claim 1 wherein the planar base and the raised base are made of steel or tungsten carbon steel.
  6. 6. The heat pressing head device of claim 1, wherein the raised base is provided with a temperature sensing hole for placing a temperature sensing rod.
  7. 7. The thermal bonding head apparatus according to claim 1, wherein the tool bit assembly comprises aluminum nitride or silicon carbide.
  8. 8. The head assembly of claim 1, wherein the metal risers are comprised of steel or tungsten carbon steel.
  9. 9. The head assembly of claim 1, wherein the planar base has a plurality of heating holes for receiving heaters for heating the head assembly.
  10. 10. The head assembly of claim 1, further comprising a spacer positioned between the tool bit assembly and the raised base.

Description

Hot pressing head device Technical Field The utility model relates to the technical field of semiconductor production processes and equipment, in particular to a hot pressing head device for a semiconductor flip chip packaging process. Background At present, the COF hot-pressing head (Bonding Tools) mainly has the following problems that the expansion amount of diamond or cBN materials is different from that of a metal base when the materials are heated and used, and the materials with large thermal expansion coefficients expand and deform in the direction of the materials with small thermal expansion coefficients, so that the diamond or cBN layers are firstly embedded and welded on the metal base when the COF hot-pressing head is produced, and the whole hot-pressing head is heated to a specified high temperature and then subjected to grinding and polishing processing at the specified high temperature. The COF production processes with different sizes have different designated use temperatures to avoid the situation of overheat deformation or poor lamination of the flexible film circuit board, so that the surface flatness of the lamination surface of the hot-pressed joint manufactured by the method can not reach the precision required by production due to insufficient thermal expansion or excessive expansion at other temperatures, and can not be used. If the production schedule is to be matched with soft film circuit boards produced by different manufacturers or made of different materials, and the production is to be replaced by adjusting various temperatures alternately, the same hot-pressing head cannot be used for correspondingly covering all production process required temperatures, and a plurality of hot-pressing heads with the same size and different temperatures are required to be prepared for production. It should be noted that the information disclosed in this background section is only for the purpose of increasing the understanding of the general background of the utility model and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person of ordinary skill in the art. Disclosure of utility model The utility model provides a hot pressing head device which comprises a plane base, a convex base, a tool bit assembly and a plurality of metal vertical plates. The protruding base is arranged on the plane base, a fixing hole is formed in the plane base, and the fixing hole is located on the upper surface of the plane base, which is not covered by the protruding base. The tool bit assembly is arranged on the protruding base and is provided with a polishing surface, a first vacuum suction hole is formed in the tool bit assembly at the polishing surface and used for sucking the chip. The plurality of metal vertical plates are arranged around the raised base and the tool bit assembly in a screw locking mode, and each metal vertical plate is connected with the raised base and the tool bit assembly. Further, a first through hole is formed around the tool bit assembly, a second through hole is formed around the raised base, a third through hole and a fourth through hole are formed in the metal vertical plate, the third through hole corresponds to the first through hole, the fourth through hole corresponds to the second through hole, a first screw penetrates through the third through hole and the first through hole, and a second screw penetrates through the fourth through hole and the second through hole, so that the metal vertical plate is connected with the raised base and the tool bit assembly at the same time. Further, the upper surface of protruding base is provided with first through-hole, the lower surface of tool bit subassembly is provided with the second through-hole, utilizes the screw to pass first through-hole with the second through-hole is in order to fix protruding base with the tool bit subassembly. Further, a second vacuum suction hole is formed in the surface of the protruding base, and the second vacuum suction hole is communicated with the vacuum suction hole to form a vacuum channel. Further, the materials of the planar base and the raised base include steel or tungsten carbon steel. Further, a temperature sensing hole for placing a temperature sensing rod is formed in the protruding base. Further, the material of the tool bit assembly comprises aluminum nitride or silicon carbide. Further, the material of the metal vertical plate comprises steel or tungsten carbon steel. Further, the planar base is provided with a plurality of heating holes for placing heaters, and the heating holes are used for heating the cutter head assembly. Further, the thermal bonding head device also includes a pad positioned between the tool bit assembly and the raised base. Based on the above, the hot pressing head device provided by the utility model can use the same tool bit assembly for production processes at different temperatures