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CN-224234131-U - Hot pressing equipment for semiconductor processing

CN224234131UCN 224234131 UCN224234131 UCN 224234131UCN-224234131-U

Abstract

The utility model discloses hot pressing equipment for semiconductor processing, which relates to the technical field of semiconductor processing and comprises a workbench, wherein one side of the workbench is provided with a lifting protection mechanism, the lifting protection mechanism comprises a supporting plate, one side of the workbench is fixedly connected with the supporting plate, one side of the supporting plate and the top of the workbench are both fixedly connected with a motor bracket, and the inner side of the motor bracket is fixedly connected with a motor. According to the utility model, through the arrangement of the lifting protection mechanism, the protection effect on operators during hot pressing can be achieved, in the use process, the protection plate is driven to ascend by the starting motor, so that the protection plate can protect the operators, the situation that operators touch hot pressing parts by mistake during equipment operation and are easy to scald or the hands are crushed during hot pressing due to incapability of protecting the operators during hot pressing can be avoided, and the safety of the equipment during use is ensured.

Inventors

  • WANG CHENGLONG

Assignees

  • 昆山昌利达精密机械有限公司

Dates

Publication Date
20260512
Application Date
20250514

Claims (8)

  1. 1. The hot pressing equipment for semiconductor processing comprises a workbench (1), and is characterized in that one side of the workbench (1) is provided with a lifting protection mechanism (2), the lifting protection mechanism (2) comprises a supporting plate (201), one side of the workbench (1) is fixedly connected with the supporting plate (201), one side of the supporting plate (201) and the top of the workbench (1) are fixedly connected with a motor support (202), the inner side of the motor support (202) is fixedly connected with a motor (203), an output shaft of the motor (203) is fixedly connected with a motor shaft (204) through a coupler, the outer wall of the motor shaft (204) is in penetrating connection with the top end of the supporting plate (201), the bottom end of the motor shaft (204) is fixedly connected with a ball screw (205), the outer wall of the ball screw (205) is movably connected with a ball nut (206), the outer wall of the ball nut (206) is fixedly connected with a connecting rod (207), and one side of the connecting rod (207) is fixedly connected with a protection plate (209).
  2. 2. The hot pressing apparatus for semiconductor processing according to claim 1, wherein the bottom end of the supporting plate (201) is fixedly connected with a first sliding rail (208), and the outer wall of the first sliding rail (208) is slidably connected with the inner wall of the connecting rod (207).
  3. 3. The apparatus of claim 1, wherein a fixing plate (210) is fixedly connected to one side of the table (1), and a second slide rail (211) is fixedly connected to a bottom end of the fixing plate (210).
  4. 4. The apparatus of claim 3, wherein the outer wall of the second rail (211) is slidably connected with a slider (212), and one side of the slider (212) is fixedly connected with one side of the shielding plate (209).
  5. 5. The hot pressing apparatus for semiconductor processing according to claim 1, wherein a supporting frame (4) is fixedly connected to the other side of the workbench (1), and an electric push rod (5) is fixedly connected to the bottom of the supporting frame (4).
  6. 6. The hot pressing apparatus for semiconductor processing as set forth in claim 5, wherein a pressing plate (6) is fixedly connected to the bottom end of the electric push rod (5), and a heating element (7) is fixedly connected to the top of the pressing plate (6).
  7. 7. The apparatus of claim 6, wherein a storage mechanism (3) is disposed at one end of the table (1), the storage mechanism (3) comprises a connection block (301), and the connection block (301) is fixedly connected to one end of the table (1).
  8. 8. The hot pressing apparatus for semiconductor processing according to claim 7, wherein a storage cabinet (302) is fixedly connected to the top of the connection block (301), and a partition plate (303) is fixedly connected to the inside of the storage cabinet (302).

Description

Hot pressing equipment for semiconductor processing Technical Field The utility model relates to the technical field of semiconductor processing, in particular to hot pressing equipment for semiconductor processing. Background Semiconductors are widely used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting and other fields, and are the cornerstone of modern electronic technology. With the continuous progress of technology, higher requirements are being placed on the performance, size and integration level of semiconductor devices, and the continuous development of semiconductor processing technology is being promoted. The hot pressing equipment is one of key equipment in semiconductor processing, and plays an important role in the processes of chip packaging, wafer bonding and the like. Most of the hot pressing equipment used at present can not protect operators during hot pressing, in the use process, if the hot pressing equipment can not protect the operators during hot pressing, operators can possibly touch hot pressing parts by mistake during equipment operation, the operators can be easily scalded, or hands are pressed and injured during hot pressing, the situation of potential safety hazards to a certain extent appears, the safety of the hot pressing equipment is poor, and processed semiconductors and unprocessed semiconductors can not be temporarily stored, in the use process, if the processed semiconductors and unprocessed semiconductors can not be temporarily stored, the processed semiconductors can not be timely joined after the hot pressing equipment finishes a batch of semiconductor processing, the processed semiconductors can only be stacked on equipment, confusion and damage are easily caused, the next batch of processing work can not be timely performed by the hot pressing equipment, the condition that the production flow is interrupted appears, and the working efficiency of the hot pressing equipment is poor. Disclosure of utility model The utility model aims to provide hot pressing equipment for semiconductor processing, which solves the problems in the prior art. In order to achieve the above purpose, the hot pressing equipment for semiconductor processing comprises a workbench, wherein a lifting protection mechanism is arranged on one side of the workbench, the lifting protection mechanism comprises a supporting plate, one side of the workbench is fixedly connected with the supporting plate, one side of the supporting plate and the top of the workbench are fixedly connected with a motor support, the inner side of the motor support is fixedly connected with a motor, an output shaft of the motor is fixedly connected with a motor shaft through a coupling, the outer wall of the motor shaft is in penetrating connection with the top end of the supporting plate, a ball screw is fixedly connected with the bottom end of the motor shaft, a ball nut is movably connected with the outer wall of the ball screw, the outer wall of the ball nut is fixedly connected with a connecting rod, and one side of the connecting rod is fixedly connected with a protection plate. As the preferable technical scheme, the bottom fixedly connected with first slide rail of backup pad, the outer wall and the inner wall sliding connection of connecting rod of first slide rail. As the preferable technical scheme, one side fixedly connected with fixed plate of workstation, the bottom fixedly connected with second slide rail of fixed plate. As the preferable technical scheme, the outer wall sliding connection of second slide rail has the slider, one side of slider and one side fixed connection of guard plate. As the preferable technical scheme, the other side fixedly connected with support frame of workstation, the bottom fixedly connected with electric putter of support frame. As the preferable technical scheme, the bottom fixedly connected with clamp plate of electric putter, the top fixedly connected with heating element of clamp plate. As the preferable technical scheme, one end of the workbench is provided with a storage mechanism, the storage mechanism comprises a connecting block, and one end of the workbench is fixedly connected with the connecting block. As the preferable technical scheme, the top fixedly connected with storing compartment of connecting block, the inside fixedly connected with baffle of storing compartment. Compared with the prior art, the utility model has the beneficial effects that: 1. According to the utility model, through the arrangement of the lifting protection mechanism, the protection effect on operators during hot pressing can be achieved, in the use process, the protection plate is driven to ascend by the starting motor, so that the protection plate can protect the operators, the situation that operators touch hot pressing parts by mistake during equipment operation and are easy to scald or the hands are crushed during hot pressing