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CN-224234132-U - Crystal plate cleaning fixture

CN224234132UCN 224234132 UCN224234132 UCN 224234132UCN-224234132-U

Abstract

The utility model discloses a crystal plate cleaning fixture, which belongs to the technical field of cleaning equipment and comprises a cross rod and two suspension arms, wherein two ends of the cross rod are respectively fixed with the bottom end of one suspension arm, the top end of the inner side surface of each suspension arm is provided with a hook, the inner side surface of each suspension arm is connected with an edge fixing seat, the top surface of the cross rod is connected with a bottom fixing seat, the front end and the rear end of each edge fixing seat are respectively provided with an edge arc groove, the front end and the rear end of each bottom fixing seat are respectively provided with a bottom arc groove, the inner side surface of each suspension arm is movably connected with the edge fixing seat through a first height adjusting device, each bottom fixing seat is movably connected with the middle part of the cross rod through a second height adjusting device, and the distance between the top ends of the two suspension arms is larger than the length of the cross rod. The utility model provides two crystal plate cleaning stations which can adapt to crystal plates with different sizes.

Inventors

  • BAI RUYI
  • LIN SHANBIN
  • WU LIGUO
  • DONG YUQI

Assignees

  • 山东联盛电子设备有限公司

Dates

Publication Date
20260512
Application Date
20250517

Claims (6)

  1. 1. The wafer cleaning fixture is characterized by comprising a cross rod (1) and two suspension arms (2), wherein two ends of the cross rod (1) are respectively fixed with the bottom end of one suspension arm (2), the top end of the inner side surface of each suspension arm (2) is provided with a hook (3), the inner side surface of each suspension arm (2) is the side surface of the suspension arm (2) close to the other suspension arm (2), the inner side surface of each suspension arm (2) is connected with an edge fixing seat (4), the middle part of the top surface of the cross rod (1) is connected with a bottom fixing seat (5), the front end and the rear end of each edge fixing seat (4) are respectively provided with an edge arc groove (41), the front end and the rear end of each bottom fixing seat (5) are respectively provided with a bottom arc groove (51), the edge arc grooves (41) at the front end of each edge fixing seat (4) and the bottom arc grooves (51) at the front end of each bottom fixing seat (5) are tangent to the same arc line, and the surface of the arc lines are parallel to the front side surface of the suspension arm (2); The inner side surfaces of the suspension arms (2) are movably connected with the edge fixing seats (4) through first height adjusting devices, the bottom fixing seats (5) are movably connected with the middle of the cross rod (1) through second height adjusting devices, and the distance between the top ends of the two suspension arms (2) is larger than the length of the cross rod (1).
  2. 2. The wafer cleaning fixture as claimed in claim 1, wherein the bottom fixing seat (5) is vertically provided with a plurality of liquid leakage holes (52), and each liquid leakage hole (52) is respectively communicated with a bottom arc groove (51).
  3. 3. The wafer cleaning fixture as claimed in claim 1, wherein the inner side surface of one suspension arm (2) is perpendicular to the top surface of the cross rod (1), the included angle between the inner side surface of the other suspension arm (2) and the top surface of the cross rod (1) is an obtuse angle, Or alternatively The included angles between the inner side surfaces of the two suspension arms (2) and the top surface of the cross bar (1) are obtuse angles.
  4. 4. The wafer cleaning fixture as claimed in claim 1, wherein the first height adjusting device comprises a plurality of boom longitudinal jacks (21) which are arranged on the boom (2) and have different heights, a plurality of edge fixing seat jacks which are arranged on the edge fixing seat (4), and a plurality of second connecting screws (22), and each second connecting screw (22) is connected with one of the boom longitudinal jacks (21) and the fixing seat jacks.
  5. 5. The wafer cleaning fixture as claimed in claim 1, wherein the second height adjusting device comprises two vertical plates (54), a plurality of vertical plate longitudinal jacks (55) which are positioned on the vertical plates (54) and have different heights, a plurality of cross rod jacks (53) which are positioned on the cross rod (1), and a plurality of third connecting screws (56), and each second connecting screw is connected with one vertical plate longitudinal jack (55) and one cross rod jack (53); The top ends of the two vertical plates (54) are connected with the bottom fixing seat (5) and are respectively positioned at the front side and the rear side of the cross rod (1).
  6. 6. The wafer cleaning fixture as claimed in claim 1, wherein the side of each vertical plate (54) far away from the other vertical plate (54) is provided with a positioning block (6).

Description

Crystal plate cleaning fixture Technical Field The invention relates to the technical field of cleaning equipment, in particular to a multi-station tool clamp for cleaning a crystal plate. Background The surface of the wafer tray is attached with pollutants such as organic matters, particles and the like in the production process, so that the wafer tray needs to be cleaned. In the prior art, as disclosed in patent publication No. CN215834504U, CN215299205U, CN219738926U, the wafer basket loading tray is put into a cleaning tank of a cleaning machine for cleaning, and has the defects that the distance between wafers on the wafer basket is small, the wafer basket loading tray is not suitable for cleaning wafers with the diameter being more than 130mm because of the poor fluidity of cleaning liquid between the wafers, and the wafer size of the wafer basket loading tray is fixed and has poor adaptability. Disclosure of Invention The utility model aims to provide a multi-station fixture for cleaning a crystal plate, which aims at overcoming the defects of the prior art. The technical scheme adopted by the utility model is as follows. The wafer cleaning fixture is characterized by comprising a cross rod and two suspension arms, wherein two ends of the cross rod are respectively fixed with the bottom end of one suspension arm, the top end of the inner side surface of each suspension arm is provided with a hook, the inner side surface of each suspension arm is the side surface of the suspension arm close to the other suspension arm, the inner side surface of each suspension arm is connected with a side fixing seat, the middle part of the top surface of the cross rod is connected with a bottom fixing seat, the front end and the rear end of each side fixing seat are respectively provided with a side arc groove, the front end and the rear end of each side fixing seat are respectively provided with a bottom arc groove, the side arc grooves at the front end of each side fixing seat and the bottom arc grooves at the rear end of each side fixing seat are tangent with the same arc line, and the surface of each arc line is parallel to the front side surface of the suspension arm; The inner side surface of each suspension arm is movably connected with the side fixing seat through a first height adjusting device, each bottom fixing seat is movably connected with the middle part of the cross rod through a second height adjusting device, and the distance between the top ends of the two suspension arms is larger than the length of the cross rod. The utility model has the advantages that the side arc grooves at the front ends of the side fixing seats and the bottom arc grooves at the front ends of the bottom fixing seats are tangent to the same arc line, the plane where the arc line is positioned is parallel to the front side surface of the suspension arm, and the side arc grooves at the rear ends of the side fixing seats and the bottom arc grooves at the rear ends of the bottom fixing seats are tangent to the same arc line, and the plane where the arc line is positioned is parallel to the front side surface of the suspension arm. Therefore, the edge arc groove at the front end of each edge fixing seat and the bottom arc groove at the front end of the bottom fixing seat can be used for placing a crystal plate, and the edge arc groove at the rear end of each edge fixing seat and the bottom arc groove at the rear end of the bottom fixing seat can be used for placing a crystal plate. The inner side surface of each suspension arm is movably connected with the side fixing seat through the first height adjusting device, and each bottom fixing seat is movably connected with the middle part of the cross rod through the second height adjusting device, so that the position of the side fixing seat can be adjusted through adjusting the first height adjusting device, and the position of the bottom fixing seat can be adjusted through adjusting the second height adjusting device, thereby being suitable for crystal trays with different sizes. As the preferable technical scheme, a plurality of liquid leakage holes are vertically arranged on the bottom fixing seat, and each liquid leakage hole is respectively communicated with a bottom arc groove. By adopting the technical scheme, the cleaning liquid for cleaning the crystal plate can flow out from the liquid leakage hole, so that the cleaning effect is improved. As the preferable technical proposal, the inner side surface of one suspension arm is vertical to the top surface of the cross bar, the included angle between the inner side surface of the other suspension arm and the top surface of the cross bar is an obtuse angle, Or alternatively The included angle between the inner side surfaces of the two suspension arms and the top surface of the cross rod is an obtuse angle. As the preferable technical scheme, the first height adjusting device comprises a plurality of suspension arm longitudinal ja