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CN-224234133-U - Induction coil device and CVD reaction equipment

CN224234133UCN 224234133 UCN224234133 UCN 224234133UCN-224234133-U

Abstract

The application discloses an induction coil device and CVD reaction equipment, which belong to the technical field of semiconductor manufacturing equipment, and the induction coil device in the embodiment of the application comprises a supporting component; the support assembly is used for supporting the induction coil and comprises a base block, a first displacement member, a second displacement member and a support member, wherein the base block extends along a first direction, the first displacement member is arranged on the base block and can displace along the first direction relative to the base block, the second displacement member is arranged on the first displacement member and can displace along a second direction relative to the first displacement member, the first direction is intersected with the second direction, the intersecting surface is parallel to a horizontal plane, and the support member is arranged on the second displacement member and supports the induction coil. Through the adjustable design of supporting component to the offset of location that produces in the compensation induction coil assembly process, both guaranteed induction coil's security and stability, simultaneously, reduced maintenance cost and time.

Inventors

  • Request for anonymity

Assignees

  • 无锡先为科技有限公司

Dates

Publication Date
20260512
Application Date
20250526

Claims (10)

  1. 1. Induction coil device, characterized by comprising a support assembly (10), the support assembly (10) being for supporting an induction coil (20), the support assembly (10) comprising: -a base block (11), the base block (11) extending along a first direction (X); A first displacement member (12) provided on the base block (11) and displaceable in the first direction (X) with respect to the base block (11); A second displacement member (13) provided on the first displacement member (12) and capable of being displaced in a second direction (Y) with respect to the first displacement member (12), the first direction (X) intersecting the second direction (Y) and being parallel to a horizontal plane; -a support (14), said support (14) being arranged on said second displacement member (13) and supporting said induction coil (20).
  2. 2. The induction coil device according to claim 1, wherein the support member (14) has a receiving groove (140) at an end facing the induction coil (20), the induction coil (20) has a protrusion (21), and the protrusion (21) is received in the receiving groove (140) and detachably connected to the support member (14).
  3. 3. The induction coil device according to claim 1, characterized in that the base block (11) comprises a first slide rail (110), the first slide rail (110) being arranged extending in the first direction (X), the first displacement member (12) comprising a first moving part (121), the first moving part (121) being in sliding engagement with the first slide rail (110).
  4. 4. An induction coil device according to claim 3, characterized in that the first displacement member (12) further comprises a second slide rail (122), the second slide rail (122) being connected with the first displacement portion (121), the second displacement member (13) comprising a second displacement portion (130), the second displacement portion (130) being arranged extending in the second direction (Y), the second slide rail (122) being in sliding engagement with the second displacement portion (130).
  5. 5. The induction coil device according to claim 4, characterized in that the induction coil (20) device further comprises: a first locking member (15), wherein the first locking member (15) is inserted through the first slide rail (110) and can be abutted against the first moving part (121); and/or a second locking piece (16), wherein the second locking piece (16) penetrates through the second moving part (130) and can be abutted with the second sliding rail (122).
  6. 6. The induction coil device according to claim 2, characterized in that the induction coil (20) device further comprises an adjusting member (17), the adjusting member (17) being arranged between the supporting member (14) and the second displacement member (13) and being connected to the supporting member (14) and the second displacement member (13), respectively, for driving the supporting member (14) to displace in a third direction (Z), which is perpendicular to the horizontal plane.
  7. 7. The induction coil device according to claim 1, characterized in that the support (14) is configured as a ceramic material that is not electrically conductive, and the first displacement member (12) and the second displacement member (13) are configured as metallic aluminum blocks.
  8. 8. Induction coil device according to any one of claims 1 to 7, characterized in that the induction coil (20) is arranged in a disc shape and has a plurality of turns, the basic block (11) extends from the inner turn of the induction coil (20) in the direction of the outer turn, the support elements (10) are arranged in plurality, a plurality of the support elements (10) share one basic block (11) and form one support combination, the support elements (10) of the same support combination being connected to different turns of the induction coil (20) in the first direction (X) respectively.
  9. 9. An induction coil arrangement according to claim 8, characterized in that a plurality of said support combinations are arranged at intervals along the circumferential direction of said induction coil (20).
  10. 10. A CVD reactor apparatus, comprising: -a housing (1) having a receiving cavity (100), said housing (1) comprising a bottom wall (101); the induction coil (20) device according to any one of claims 1 to 9, the induction coil (20) device being disposed within the housing cavity (100) and carried on the bottom wall (101).

Description

Induction coil device and CVD reaction equipment Technical Field The application relates to the technical field of semiconductor manufacturing equipment, in particular to an induction coil device and CVD reaction equipment. Background The existing semiconductor manufacturing equipment generally spirally arranges induction coils outside a reaction cavity and heats the reaction cavity in an induction heating mode, and the temperature field generated by the induction coils meets the process requirement by adjusting the position of each turn of induction coils. However, the overall positioning of the induction coil is subject to misalignment during assembly. Disclosure of utility model The embodiment of the application provides an induction coil device and CVD reaction equipment, which aim to solve the technical problem that the whole positioning of an induction coil is easy to deviate in the assembly process. The embodiment of the application provides an induction coil device, which comprises a support component, wherein the support component is used for supporting an induction coil and comprises: a base block extending in a first direction; The first displacement piece is arranged on the base block and can displace along the first direction relative to the base block; the second displacement piece is arranged on the first displacement piece and can displace along a second direction relative to the first displacement piece, and the first direction is intersected with the second direction and is parallel to a horizontal plane; And the supporting piece is arranged on the second displacement piece and supports the induction coil. In some embodiments, the support member has a receiving groove at an end facing the induction coil, and the induction coil has a protrusion, and the protrusion is received in the receiving groove and detachably connected to the support member. In some embodiments, the base block includes a first slide rail extending along the first direction, and the first displacement member includes a first moving portion slidably engaged with the first slide rail. In some embodiments, the first displacement member further includes a second sliding rail, the second sliding rail is connected with the first moving portion, the second displacement member includes a second moving portion, the second moving portion extends along the second direction, and the second sliding rail is in sliding fit with the second moving portion. In some embodiments, the induction coil apparatus further comprises: The first locking piece penetrates through the first sliding rail and can be abutted against the first moving part; And/or a second locking piece, wherein the second locking piece penetrates through the second moving part and can be abutted with the second sliding rail. In some embodiments, the induction coil device further includes an adjusting member disposed between the supporting member and the second displacement member, and respectively connected to the supporting member and the second displacement member, for driving the supporting member to displace along a third direction, where the third direction is perpendicular to the horizontal plane. In some embodiments, the support is configured as a ceramic material that is non-conductive, and the first displacement member and the second displacement member are configured as metallic aluminum blocks. In some embodiments, the induction coil is arranged in a disc shape and has a plurality of turns, the base blocks extend from the inner turn of the induction coil to the outer turn, the plurality of support components are arranged, the plurality of support components share one base block and form one support combination, and the support components of the same support combination are respectively connected with different turns of the induction coil along the first direction. In some embodiments, a plurality of the support members are arranged at intervals along the circumferential direction of the induction coil. The embodiment of the application also discloses a CVD reaction device, which comprises: A housing having a receiving cavity, the housing including a bottom wall; the induction coil device according to the above embodiment is disposed in the accommodating cavity and is supported on the bottom wall. The induction coil device has the beneficial effects that the induction coil device comprises the supporting component, the supporting component is used for supporting an induction coil and comprises a base block, a first displacement member, a second displacement member and a supporting member, the base block extends along a first direction, the first displacement member is arranged on the base block and can displace along the first direction relative to the base block, the second displacement member is arranged on the first displacement member and can displace along a second direction relative to the first displacement member, the first direction is intersected with