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CN-224234137-U - Tooling station equipment and bonding system

CN224234137UCN 224234137 UCN224234137 UCN 224234137UCN-224234137-U

Abstract

The utility model discloses tooling station equipment and a bonding system, and belongs to the technical field of semiconductor equipment. The tooling station equipment is used for storing a tooling pressure head, the tooling pressure head is used for selectively holding a chip and crimping the chip on a receptor substrate, and the tooling station equipment comprises a containing platform, a clamping assembly and a driving assembly. The accommodating platform comprises an accommodating part, and the accommodating part is used for accommodating the tooling pressure head. The clamping assembly is arranged on the same side of the accommodating platform and the accommodating part, the clamping assembly comprises a clamping unit, the clamping unit is arranged on the periphery of the accommodating part, the clamping unit comprises at least two clamping pieces, and the at least two clamping pieces can clamp the tool press head on two sides of the tool press head. The driving component is used for driving the clamping unit to clamp or release the tooling pressure head. The utility model can calibrate the tooling press head after being placed in the tooling station equipment, simplify the process of replacing the tooling press head of the subsequent bonding equipment and improve the bonding efficiency.

Inventors

  • Ju Jiawang
  • CAO NINGFEI
  • GAO ZHIWEI
  • MU FENGWEN
  • GUO CHAO
  • TAN XIANGHU
  • LIU FUCHAO

Assignees

  • 天津中科晶禾电子科技有限责任公司

Dates

Publication Date
20260512
Application Date
20250530

Claims (11)

  1. 1. A tooling station apparatus for storing tooling rams (100), the tooling rams (100) for selectively holding and crimping chips onto a recipient substrate, comprising: The accommodating platform (1) comprises an accommodating part (10), wherein the accommodating part (10) is used for accommodating the tool press head (100); The clamping assembly (2) is arranged on the accommodating platform (1) and is positioned on the same side as the accommodating part (10), the clamping assembly (2) comprises a clamping unit, the clamping unit is positioned on the periphery side of the accommodating part (10), the clamping unit comprises at least two clamping pieces (20), and the at least two clamping pieces (20) can clamp the tooling pressure head (100) on two sides of the tooling pressure head (100); And the driving assembly (3) is used for driving the clamping unit to clamp or release the tooling pressure head (100).
  2. 2. Tooling station device according to claim 1, characterized in that said tooling ram (100) comprises two adjacent edges and a corner formed by the intersection of the two adjacent edges, at least two of said clamping members (20) being able to clamp two of said corners of said tooling ram (100) opposite to each other.
  3. 3. Tooling station device according to claim 1, characterized in that said containing platform (1) comprises a plurality of said containing portions (10), said clamping assemblies (2) being arranged in a one-to-one correspondence with said containing portions (10); One driving component (3) drives at least part of the holding components (2) corresponding to the holding parts (10) in the plurality of holding parts (10).
  4. 4. Tooling station device according to claim 1, characterized in that said driving assembly (3) comprises a driving member (30) and a transmission assembly (31), said driving member (30) driving said transmission assembly (31) to move along a first direction (X) perpendicular to said containing platform (1) to drive said gripping member (20) to grip or release said tooling ram (100).
  5. 5. The tooling station apparatus according to claim 4, characterized in that the transmission assembly (31) comprises a first transmission member (311), the first transmission member (311) being connected to the driving member (30), the driving member (30) driving the first transmission member (311) to move in a first direction (X), the first transmission member (311) comprising a first end (311 a) remote from the driving member (30), the clamping member (20) comprising a clamping portion (20 a) and a moving portion (20 b) connected, the clamping portion (20 a) being adapted to clamp the tooling ram (100), the moving portion (20 b) being located on a side of the clamping portion (20 a) facing the receiving platform (1), the first end (311 a) being adapted to extend between the moving portions (20 b) of at least two clamping members (20) to move the two clamping members (20) in a direction remote from the receiving portion (10).
  6. 6. Tooling station apparatus according to claim 5, characterized in that the direction of the first end (311 a) is pointed by the drive (30), the first end (311 a) gradually decreasing in its own radial dimension, and/or, The distance between the moving parts (20 b) of the two clamping members (20) facing each other in a second direction (Y) perpendicular to the first direction (X) is gradually reduced by the driving member (30) pointing in the direction of the first end part (311 a).
  7. 7. Tooling station device according to claim 6, characterized in that a rolling structure (312) is provided between the first end (311 a) and the moving part (20 b).
  8. 8. Tooling station device according to claim 6, characterized in that said transmission assembly (31) further comprises an elastic element (313), the two ends of said elastic element (313) being respectively connected to said moving portions (20 b) of two opposite gripping elements (20) along said second direction (Y).
  9. 9. Tooling station device according to claim 6, characterized in that said transmission assembly (31) further comprises a second transmission member (314), said containing platform (1) and said gripping member (20) being connected by said second transmission member (314), said second transmission member (314) extending along said second direction (Y).
  10. 10. Tooling station device according to claim 1, characterized in that it further comprises a detection means (4), said detection means (4) being arranged in said containing platform (1), said detection means (4) being adapted to detect whether said tooling ram (100) is present in said containing portion (10).
  11. 11. A bonding system, comprising: The tool station apparatus according to claim 1 to 10, and And the bonding equipment can pick up or place the tooling press head (100) at the accommodating part (10) of the tooling station equipment.

Description

Tooling station equipment and bonding system Technical Field The utility model relates to the technical field of semiconductor equipment, in particular to tooling station equipment and a bonding system. Background In the semiconductor manufacturing process, the chip bonding process is a core link for realizing three-dimensional integration of chips and encapsulation of heterogeneous materials. Because the chips with different specifications and sizes have obvious differences in bonding pressure, contact area and precision requirements, the bonding operation is performed by adopting a tooling pressure head adapting to the physical characteristics of the chips. In the prior art, in order to meet the production requirements of chips with multiple specifications, process switching is generally realized by replacing tool pressing heads of different types by bonding equipment, and the tool pressing heads to be replaced are required to be stored in a storage station of tool station equipment in advance so that the bonding equipment can be taken as required. Currently, a fixed structure design is generally adopted for a storage station of the tooling station equipment, only a basic mechanical positioning function is provided, and an active adjusting device or an adaptive positioning mechanism is not configured. When the used tool press head is replaced by the manual or mechanical arm, the storage station cannot automatically calibrate or compensate the pose of the tool press head even if small position deviation or angle deviation exists. The uncorrected position deviation can directly lead to the fact that after the bonding equipment grabs the tooling pressure head, the actual installation pose is different from the standard pose required by the process, so that an additional calibration procedure is required when the tooling pressure head is replaced each time, and the critical technical bottleneck for restricting the improvement of the efficiency of the chip bonding process is formed. This section provides background information related to the application, which is not necessarily prior art. Disclosure of utility model The utility model aims to provide tooling station equipment and a bonding system, which can calibrate after a tooling press head is placed in the tooling station equipment, simplify the process of replacing the tooling press head of the subsequent bonding equipment and improve the bonding efficiency. In order to achieve the above object, the following technical scheme is provided: A tooling station apparatus for storing tooling rams for selectively holding a chip and crimping the chip to a recipient substrate, comprising: the accommodating platform comprises an accommodating part, wherein the accommodating part is used for accommodating the tool pressure head; The clamping assembly is arranged on the accommodating platform and is positioned on the same side with the accommodating part, the clamping assembly comprises a clamping unit, the clamping unit is positioned on the periphery of the accommodating part, the clamping unit comprises at least two clamping pieces, and the at least two clamping pieces can clamp the tool pressing head on two sides of the tool pressing head; and the driving assembly is used for driving the clamping unit to clamp or release the tool pressure head. As an alternative scheme of the tooling station equipment, the tooling pressure head comprises two adjacent edges and corners formed by intersecting the two adjacent edges, and at least two clamping pieces can clamp the two opposite corners of the tooling pressure head. As an alternative scheme of the tooling station equipment, the accommodating platform comprises a plurality of accommodating parts, and the clamping assemblies are arranged in one-to-one correspondence with the accommodating parts; one driving component drives at least part of the holding components corresponding to the holding parts in the plurality of holding parts. As an alternative scheme of the tooling station equipment, the driving component comprises a driving piece and a transmission component, the driving piece drives the transmission component to move along a first direction so as to drive the clamping piece to clamp or release the tooling pressure head, and the first direction is perpendicular to the accommodating platform. As an alternative of the tool station apparatus, the transmission assembly includes a first transmission member, the first transmission member is connected to the driving member, the driving member drives the first transmission member to move along a first direction, the first transmission member includes a first end portion away from the driving member, the clamping member includes a clamping portion and a moving portion that are connected, the clamping portion is used for clamping the tool press head, the moving portion is located at a side of the clamping portion facing the accommodating platform, and the first end portion c