CN-224234139-U - Semiconductor automatic processing auxiliary device

CN224234139UCN 224234139 UCN224234139 UCN 224234139UCN-224234139-U

Abstract

The utility model discloses an automatic semiconductor processing auxiliary device, which relates to the field of semiconductor processing, and comprises a cutter base, an air injection mechanism and an oil injection mechanism, wherein the cutter base is provided with a cutter holder, a plurality of cutter handles are detachably connected with the cutter base, the cutter handles are clamped by using a manipulator to transfer the cutter base, the air injection mechanism is connected with one cutter handle and has an air injection state and a first idle state, the air injection mechanism is used for injecting air towards a product to be processed in the air injection state, the air injection mechanism is fixed on the cutter base through the cutter handle in the first idle state so as to be contained in the cutter base, the oil injection mechanism is connected with the other cutter handle, and has an oil injection state and a second idle state, the oil injection mechanism injects oil towards the product to be processed in the oil injection state, and the oil injection mechanism is fixed on the cutter base through the cutter handles in the second idle state so as to be contained in the cutter base. The automatic semiconductor processing auxiliary device provided by the technical scheme of the utility model can realize automatic air injection and oil injection.

Inventors

ZHAO CHUANG
SONG YONGXIN
TAN JINSHENG
LIU CONGGAO
CHEN XIAOQIANG
HUANG JIANBO
HAO XIPING

Assignees

深圳市镨芯高精设备有限公司

Dates

Publication Date: 20260512
Application Date: 20250609

Claims (10)

1. An automatic semiconductor processing assisting apparatus, comprising: The tool warehouse is provided with a tool seat, a plurality of tool shanks are detachably connected with the tool seat, and the tool shanks are clamped by using a manipulator to be transferred; The air injection mechanism is connected with one of the cutter handles and has an air injection state and a first idle state, the air injection mechanism injects air towards a product to be processed in the air injection state, the air injection mechanism is fixed on the cutter seat through the cutter handle to be accommodated in the cutter warehouse in the first idle state, and The oil injection mechanism is connected with the other knife handle and is provided with an oil injection state and a second idle state, the oil injection mechanism injects oil towards the product to be processed in the oil injection state, and the oil injection mechanism is fixed in the knife holder through the knife handle in order to be contained in the knife library in the second idle state.
2. The automatic semiconductor processing auxiliary device according to claim 1, wherein the tool shank is provided with a plug-in portion and a connecting portion, the connecting portion is connected with a locking member, the connecting portion is used for connecting the corresponding air injection mechanism or the oil injection mechanism and is locked by the locking member, and the plug-in portion is plug-in connected with the tool holder.
3. The semiconductor automatic processing auxiliary device according to claim 2, wherein the air injection mechanism comprises a first main body, an air passage system and a first control system, the air passage system and the first control system are electrically connected and respectively arranged in the first main body, the first main body is further provided with an air inlet, the air inlet is communicated with the air passage system, the air passage system comprises an air nozzle, the air nozzle extends out of the first main body and is used for injecting air, the locking member is arranged in the first main body, and the connecting portion extends into the first main body and is locked and connected through the locking member.
4. The semiconductor automatic processing auxiliary device according to claim 3, wherein the air path system further comprises an air storage chamber, an air pump and an electromagnetic valve, the air storage chamber is formed in the first main body, the air storage chamber is communicated with the air pump, the air pump is further connected with the electromagnetic valve, the electromagnetic valve and the air pump are respectively and electrically connected with the first control system, the electromagnetic valve is electrically connected with the air nozzle, and the air inlet is communicated with the air pump.
5. The semiconductor automatic processing auxiliary device according to claim 4, wherein the gas circuit system further comprises a gas-injection induction switch communicatively connected to the electromagnetic valve, and/or, The air storage chamber is also provided with a pressure sensor and a pressure relief valve, the pressure sensor is respectively connected with the first control system and the pressure relief valve, and the pressure relief valve extends out of the first main body.
6. The semiconductor automatic processing auxiliary device according to claim 4, wherein the first main body comprises a first sub-main body and a second sub-main body which are connected with each other, the first sub-main body is provided with a first containing cavity, the second sub-main body is provided with a second containing cavity, the locking piece, the air pump and the first control system are arranged in the first containing cavity, the air storage chamber and the electromagnetic valve are arranged in the second containing cavity, and the air inlet is arranged in the second sub-main body.
7. The automatic semiconductor processing auxiliary device according to claim 2, wherein the oil injection mechanism comprises a second main body, an oil path system and a second control system, the oil path system and the second control system are respectively arranged in the second main body, the second main body is provided with an oil inlet, the oil inlet is communicated with the oil path system, the oil path system comprises an oil injection nozzle, the oil injection nozzle extends out of the second main body and is used for injecting oil, the locking member is arranged in the second main body, and the connecting portion extends into the second main body and is locked and connected through the locking member.
8. The semiconductor automatic processing auxiliary device according to claim 7, wherein the oil path system comprises an oil storage chamber, an oil pump and an oil injection switch, the second main body is provided with the oil storage chamber, the oil pump is respectively communicated with the oil storage chamber and the oil injection switch, the oil storage chamber is communicated with the oil inlet, the oil injection switch is electrically connected with the oil injection nozzle, and the second control system is electrically connected with the oil injection switch and the oil pump.
9. The semiconductor automatic processing auxiliary device according to claim 8, wherein the oil path system further comprises a fuel injection sensing switch, the fuel injection sensing switch being in communication with the fuel injection switch.
10. The semiconductor automatic processing auxiliary device according to claim 8, wherein the second main body comprises a third sub-main body and a fourth sub-main body which are connected with each other, the third sub-main body is provided with a third containing cavity, the fourth sub-main body is provided with a fourth containing cavity, the locking piece and the second control system are arranged in the third containing cavity, the oil pump, the oil storage cavity and the oil injection switch are arranged in the fourth containing cavity, and the oil inlet is arranged in the fourth sub-main body.

Description

Semiconductor automatic processing auxiliary device Technical Field The utility model relates to the technical field of semiconductor processing, in particular to an automatic semiconductor processing auxiliary device. Background And the micro-holes are machined by a simple CNC machine, so that the requirements Ra 0.1 and the cleanliness of the flow channel roughness are difficult to completely meet, for example, burrs in the holes are avoided, the holes are smooth and free of scraps, micro-cracks are not allowed, the bottoms of the holes are clean and free of iron scraps, and inclined holes are obtained with angles. The prior operation mode is that the CNC machine program is firstly suspended, an operator firstly blows by using an air gun, the scraps in the holes are manually blown out, then coolant oil is injected into the holes, the machine is restarted, and then the machining of the micropores or the threaded holes is continued. The machine can not realize complete automatic processing, and is stopped for waiting for manual blowing, so that the machine has extremely high manual dependency, high cost and low efficiency, and also has influence on the quality of products. Disclosure of utility model The utility model mainly aims to provide an automatic semiconductor processing auxiliary device, which aims to solve the technical problems that the existing process of machining micropores relies on manual blowing and oil injection and the production efficiency is low. In order to achieve the above object, the present utility model provides an automatic semiconductor processing auxiliary device, comprising: The tool warehouse is provided with a tool seat, a plurality of tool shanks are detachably connected with the tool seat, and the tool shanks are clamped by using a manipulator to be transferred; The air injection mechanism is connected with one of the cutter handles and has an air injection state and a first idle state, the air injection mechanism injects air towards a product to be processed in the air injection state, the air injection mechanism is fixed on the cutter seat through the cutter handle to be accommodated in the cutter warehouse in the first idle state, and The oil injection mechanism is connected with the other knife handle and is provided with an oil injection state and a second idle state, the oil injection mechanism injects oil towards the product to be processed in the oil injection state, and the oil injection mechanism is fixed in the knife holder through the knife handle in order to be contained in the knife library in the second idle state. In one embodiment, the tool shank is provided with a plug-in connection and a connecting part, the connecting part is connected with a locking piece, the connecting part is used for connecting the corresponding air injection mechanism or the oil injection mechanism and is locked by the locking piece, and the plug-in connection is in plug-in connection with the tool holder. In an embodiment, the air injection mechanism comprises a first main body, an air circuit system and a first control system, wherein the air circuit system and the first control system are electrically connected and respectively arranged in the first main body, the first main body is further provided with an air inlet, the air inlet is communicated with the air circuit system, the air circuit system comprises an air nozzle, the air nozzle extends out of the first main body and is used for injecting air, the locking piece is arranged in the first main body, and the connecting part extends into the first main body and is in locking connection through the locking piece. In an embodiment, the air circuit system further comprises an air storage chamber, an air pump and an electromagnetic valve, the air storage chamber is formed in the first main body, the air storage chamber is communicated with the air pump, the air pump is further connected with the electromagnetic valve, the electromagnetic valve and the air pump are respectively and electrically connected with the first control system, the electromagnetic valve is electrically connected with the air nozzle, and the air inlet is communicated with the air pump. In one embodiment, the gas circuit system further comprises a jet induction switch in communication with the solenoid valve, and/or, The air storage chamber is also provided with a pressure sensor and a pressure relief valve, the pressure sensor is respectively connected with the first control system and the pressure relief valve, and the pressure relief valve extends out of the first main body. In an embodiment, the first main body comprises a first sub-main body and a second sub-main body which are connected with each other, the first sub-main body is provided with a first containing cavity, the second sub-main body is provided with a second containing cavity, the locking piece, the air pump and the first control system are arranged in the first containing cavity, the air s