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CN-224234147-U - A aerify platform for wafer box location lock is dead

CN224234147UCN 224234147 UCN224234147 UCN 224234147UCN-224234147-U

Abstract

The utility model provides an aerify platform for wafer box location lock, includes an inflatable pedestal that is used for bearing equipment, one sets up on the inflatable pedestal and be used for the fixed wafer box aerify the platform subassembly, and a plurality of be located the inside gas measurement controlling means that is used for detecting gas data of inflatable pedestal, the external gas conveying device who is used for the inflatable pedestal carries gas of inflatable pedestal, the external control device who is used for controlling equipment motion of gas measurement controlling means. The inflatable table assembly comprises an inflatable table base plate for bearing a wafer box, a gripper arranged in the inflatable table assembly, a group of fixing assemblies arranged on the inflatable table base plate, the wafer box is fixedly locked by the grippers arranged on the base plate of the inflation platform, so that the wafer box is prevented from moving up and down along with the impact of gas during inflation.

Inventors

  • SONG SHUWEI
  • LI ZIPING
  • PENG JIANKANG

Assignees

  • 浙江赛瑾半导体科技有限公司

Dates

Publication Date
20260512
Application Date
20250423

Claims (10)

  1. 1. A aerify platform that is used for wafer box location lock to lock which characterized in that: the gas-filling table for positioning and locking the wafer box comprises a gas-filling table seat for carrying equipment, a gas-filling table assembly arranged on the gas-filling table seat, a plurality of gas measurement control devices positioned in the gas-filling table seat and used for detecting gas data, and a control device connected with the gas-filling table assembly, wherein the gas-filling table for positioning and locking the wafer box is externally connected with a wafer box, the gas-filling table assembly comprises a gas-filling table substrate for carrying the wafer box, a containing through hole arranged on the gas-filling table substrate, a handle arranged in the containing through hole and used for preventing the wafer box from moving up and down during gas filling, a gas-filling member arranged on the gas-filling table substrate and used for inflating the wafer box, a gas-discharging member arranged on the gas-filling table substrate and used for discharging the wafer box, at least one induction sensor arranged on the inflatable table substrate and used for inducting and placing the wafer box, a group of positioning baffle members arranged on the inflatable table substrate and used for limiting the placement range of the wafer box, a group of positioning protruding members arranged on the inflatable table substrate and used for preventing the wafer box from moving left and right during inflation, an air inlet arranged on the inflatable table substrate, the gripper comprising a gripper shaft lever, a gripper frame arranged at one end of the gripper shaft lever far away from the inflatable table, the control equipment connected with an actuator used for controlling the movement of the gripper shaft lever, the inflatable members comprise a buffer member, the buffer member is positioned between the wafer box and the inflatable table substrate during use, the wafer box comprises a wafer box body used for bearing and placing wafers, the wafer box comprises a wafer box body, a clamping frame, a supporting groove, a three positioning grooves, a groove body and a clamping frame, wherein the clamping frame is arranged at the bottom of the wafer box body and is used for being matched with and fixed with the wafer box, the three positioning grooves are arranged at the bottom of the wafer box body, the supporting groove is a groove arranged at the bottom of the wafer box body, the grooving direction is the direction away from the wafer box body, the section of the groove body is in a convex shape, the width of the supporting groove, which is close to the groove bottom, in the section is smaller than the width of the groove opening, two relatively extending supporting protruding blocks are formed at the groove opening, the size of the clamping frame in the width direction is smaller than the distance between the two supporting protruding blocks, and the size of the clamping frame in the length direction is smaller than the distance between groove walls in the supporting groove.
  2. 2. The station for wafer cassette positioning and locking as defined in claim 1 wherein said station includes a station base for carrying said station assembly and protecting said gas measurement control means, a gas outlet opening in said station base for venting gas, and a plurality of roller assemblies opening on a side of said station adjacent the floor.
  3. 3. The plenum for wafer cassette positioning lock of claim 1, wherein: the base plate of the air charging table is also provided with a concave groove for accommodating the air charging piece and the air discharging piece.
  4. 4. The apparatus of claim 3, wherein the gas-filling member comprises a tube inserted into the recess and adapted to convey gas, two bases inserted into the recess and positioned at both ends of the tube and adapted to convey gas to the cassette, an air inlet provided in the base plate of the gas-filling member and adapted to convey gas to the cassette from the base, and a buffer member provided outside the base.
  5. 5. The apparatus of claim 4, wherein the gas inlet is formed in the base plate of the gas filling table, and the gas transported through the transport pipe enters the wafer cassette through the gas inlet, and the gas inlet is a circular through hole.
  6. 6. The apparatus of claim 4, wherein the buffer member comprises a buffer cylinder disposed on the base, a fixing groove disposed on the buffer cylinder, a buffer surface disposed on the fixing groove, and a gas through hole disposed on the buffer cylinder for passing gas therethrough, the buffer member is tightly adhered to the base, and the buffer member is integrally formed by injection molding.
  7. 7. The plenum for wafer cassette lock of claim 1, wherein said positioning baffle includes three positioning ribs, three of said positioning ribs being in a non-closed rectangular frame arrangement.
  8. 8. The station for wafer cassette lock-up as set forth in claim 7 wherein said positioning flange includes a stationary stage disposed on said station base plate for securing said wafer cassette and a guide stage disposed on a side of said stationary stage remote from said station base plate.
  9. 9. The station for wafer cassette positioning and locking as set forth in claim 1 wherein said positioning projection comprises three equilateral triangular shaped positioning pins, said positioning pins being a cylinder disposed on said station base plate.
  10. 10. The apparatus of claim 2, wherein the gas measurement control means comprises a filter cartridge disposed inside the stage for filtering the inflow gas, an inflow gas flow sensor disposed inside the stage for measuring the inflow gas flow rate, an inflow gas pressure sensor disposed inside the stage for measuring the inflow gas pressure, an electromagnetic valve disposed inside the stage for controlling the gas flow rate, a humidity sensor disposed inside the stage for measuring the outflow gas humidity, an outflow gas pressure sensor disposed inside the stage for measuring the outflow gas pressure, an outflow gas flow sensor disposed inside the stage for measuring the outflow gas flow rate, an inflow pipe passing through the inflow gas inlet, and an outflow gas pipe passing through the outflow gas outlet.

Description

A aerify platform for wafer box location lock is dead Technical Field The utility model belongs to the technical field of inflation devices, and particularly relates to an inflation table for positioning and locking a wafer box. Background Wafer cassettes are used in semiconductor manufacturing to place and transport wafers, and to simplify transportation and minimize the risk of contamination, wafer cassettes are used by chip manufacturers to handle and store wafers. During handling and storage, the semiconductor factory may fill the wafer cassette of the wafer carrier with inert gas such as nitrogen to protect the wafer. In the process of inflating by using the traditional inflating table, the traditional inflating table only plays the function of inflating and only stabilizes the wafer box by relying on the weight of the wafer box, but in the inflating process, the wafer box can slightly shake along with the inflating air flow, so that unnecessary damage to the wafers in the wafer box is likely to be caused. Disclosure of Invention In view of the above, the present utility model provides an air table for wafer cassette positioning and locking to solve the above-mentioned problems. An inflatable table for wafer cassette location lock comprising an inflatable table base for carrying equipment, an inflatable table assembly disposed on the inflatable table base, a plurality of gas measurement controls disposed on the inflatable table base for detecting gas data, and a control device connected to the inflatable table assembly, the inflatable table for wafer cassette location lock circumscribing a wafer cassette, the inflatable table assembly comprising an inflatable table base for carrying the wafer cassette, a receiving through hole disposed on the inflatable table base, a handle disposed in the receiving through hole for preventing movement of the wafer cassette up and down during inflation, an inflatable member disposed on the inflatable table base for inflating the wafer cassette, an exhaust member disposed on the inflatable table base for exhausting the wafer cassette, at least one sensor disposed on the inflatable table base for sensing placement of the wafer cassette, a set of positioning baffle members disposed on the inflatable table base for defining a wafer cassette placement range, a set of positioning baffle members disposed on the inflatable table base for limiting a wafer cassette placement range, a handle disposed on the inflatable table base for preventing movement of the wafer cassette from the handle, a handle disposed on the inflatable table base for moving away from the wafer cassette, a handle disposed on the inflatable table base, a buffer shaft disposed between the handle and the inflatable table base and the handle assembly, the handle assembly comprising a buffer shaft disposed at one end of the handle for buffering the handle is disposed between the handle and the control device, the wafer box comprises a wafer box body, a clamping frame, a supporting groove, a three positioning grooves, a groove body and a clamping frame, wherein the clamping frame is arranged at the bottom of the wafer box body and is used for being matched with and fixed with the wafer box, the three positioning grooves are arranged at the bottom of the wafer box body, the supporting groove is a groove arranged at the bottom of the wafer box body, the grooving direction is the direction away from the wafer box body, the section of the groove body is in a convex shape, the width of the supporting groove, which is close to the groove bottom, in the section is smaller than the width of the groove opening, two relatively extending supporting protruding blocks are formed at the groove opening, the size of the clamping frame in the width direction is smaller than the distance between the two supporting protruding blocks, and the size of the clamping frame in the length direction is smaller than the distance between groove walls in the supporting groove. Further, the inflatable stand comprises an inflatable stand base body for bearing the inflatable stand assembly and protecting the gas measurement control device, an air outlet formed in the inflatable stand base body and used for exhausting gas, and a group of roller assemblies formed on one side, close to the ground, of the inflatable stand. Further, the base plate of the air charging table is also provided with a concave groove for accommodating the air charging member and the air discharging member. Further, the inflatable member comprises a conveying pipe which is embedded into the accommodating concave groove and is used for conveying gas, two bases which are embedded into the accommodating concave groove and are positioned at two ends of the conveying pipe and are used for conveying gas for the wafer box, an air inlet hole which is formed in the base plate of the inflatable table and is used for conveying gas to the wafer box by the bases, and a buffer member whi