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CN-224234148-U - Clamping plug support box for wafer inspection

CN224234148UCN 224234148 UCN224234148 UCN 224234148UCN-224234148-U

Abstract

The utility model discloses a clamping plug supporting box for wafer inspection, which relates to the field of wafer manufacturing devices and comprises a first shell, a base, a mounting frame, a sliding component, a supporting component and a control panel, wherein the top of the base is obliquely arranged towards the left side or the right side along the horizontal direction, the mounting frame is fixedly connected to the top of the base, the first shell is of a cavity structure with two open ends, the first shell is sleeved outside the mounting frame, the top of the first shell is obliquely arranged forwards, a clamping plug body is embedded at the opening at the top of the first shell, a plurality of limiting grooves for accommodating wafers are arranged in the clamping plug body, the sliding component is transversely arranged inside the mounting frame, the supporting component is fixedly connected to the top of the moving end of the sliding component, and the control panel is arranged outside the first shell. The utility model realizes the automatic supporting operation of the wafer, effectively avoids the pollution generated at the edge of the wafer and improves the placement stability of the wafer.

Inventors

  • ZHANG HUA
  • WANG JIANLI
  • REN DIANSHENG

Assignees

  • 保定通美晶体制造有限责任公司
  • 朝阳通美晶体科技有限公司
  • 北京通美晶体技术股份有限公司

Dates

Publication Date
20260512
Application Date
20250530

Claims (7)

  1. 1. The plug supporting box for wafer inspection is characterized by comprising a first shell (1), a base (3), a mounting frame (4), a sliding component (5), a supporting component (6) and a control panel (7), wherein the top of the base (3) is obliquely arranged towards the left side or the right side along the horizontal direction, the mounting frame (4) is fixedly connected to the top of the base (3) at a first inclination angle, the top of the mounting frame (4) is obliquely forwards along the vertical direction to form a second inclination angle, the first shell (1) is of a cavity structure with two open ends, the inclination angle of the top of the first shell (1) is consistent with the second inclination angle of the top of the mounting frame (4), the first shell (1) is sleeved outside the mounting frame (4), a plurality of limiting grooves for containing wafers (8) are formed in the plug body (2), the sliding component (5) is transversely arranged in the opening of the top of the first shell (1), the sliding component (5) is transversely arranged in the mounting frame (4) and is fixedly connected to the top of the supporting component (6) through the supporting component (6), the bottom of the stopper body (2) is correspondingly provided with an opening for supporting the working end of the component (6) to pass through, the control panel (7) is arranged outside the first shell (1), and the sliding component (5) and the supporting component (6) are electrically connected with the control panel (7).
  2. 2. The cassette for wafer inspection as set forth in claim 1, wherein the base (3) comprises a first supporting block (31) and a second supporting block (32), the first supporting block (31) and the second supporting block (32) are symmetrically and fixedly connected to the bottom of the mounting frame (4), and the height of the first supporting block (31) is greater than the height of the second supporting block (32).
  3. 3. The card plug box for wafer inspection according to claim 1, wherein the control panel (7) comprises a display screen (71), keys (72) and a PLC controller, the display screen (71) and the keys (72) are integrally arranged on the side wall of the first shell (1), the PLC controller is embedded in an inner cavity of the first shell (1), and the display screen (71), the keys (72), the sliding component (5) and the supporting component (6) are electrically connected with the PLC controller.
  4. 4. The card plug holder for wafer inspection according to claim 3, wherein the sliding assembly (5) comprises a first driving motor (51), a reciprocating screw rod (52), a guide rod (53) and a sliding block (54), the first driving motor (51) is fixedly connected to one side of the installation frame (4), one end of the reciprocating screw rod (52) is rotatably connected with the side wall of the installation frame (4), the other end of the reciprocating screw rod (52) penetrates through the side wall of the installation frame (4) and is fixedly connected with the power output end of the first driving motor (51), the two guide rods (53) are transversely arranged in an inner cavity of the installation frame (4), the sliding block (54) is sleeved on the guide rod (53) in a sliding mode, the sliding block (54) is in threaded connection with the reciprocating screw rod (52), the holding assembly (6) is fixedly connected to the top of the sliding block (54), and the first driving motor (51) is electrically connected with the PLC.
  5. 5. The cassette for wafer inspection as claimed in claim 4, wherein a mounting hole for accommodating the first driving motor (51) is formed in a side wall of the first housing (1).
  6. 6. The card plug holder box for wafer inspection according to claim 4, wherein the holding assembly (6) comprises a second shell (61), a second driving motor (62), a gear (63), a toothed plate (64) and a supporting plate (65), the inside of the second shell (61) is of a cavity structure, a limit hole matched with the toothed plate (64) in shape is formed in the top of the second shell (61), the toothed plate (64) is in sliding connection with the second shell (61) through the limit hole, the second driving motor (62) is fixedly connected to one side of the second shell (61), the rotating end of the second driving motor (62) penetrates through the side wall of the second shell (61) and then extends inwards, the gear (63) is fixedly connected with the rotating end of the second driving motor (62) and is located in the cavity of the second shell (61), the gear (63) is in meshed transmission connection with the toothed plate (64), and the toothed plate (65) is fixedly connected to the top of the second driving motor (62) and the supporting plate (64) is electrically connected to the PLC.
  7. 7. A wafer inspection cassette as claimed in claim 6 wherein the top of said carrier (65) is configured in the shape of a concave circular arc matching the shape of said wafer (8).

Description

Clamping plug support box for wafer inspection Technical Field The utility model relates to the field of wafer manufacturing devices, in particular to a clamping and supporting box for wafer inspection. Background In the wet cleaning process of semiconductor wafers, the wafers are typically placed in special stoppers for cleaning and spin-drying, and then removed one by manual operation for lamp inspection. However, the prior art has obvious defects in practical application, operators need to manually extract wafers from the clamping grooves, the edges of the wafers are easy to pollute or scratch due to direct contact with tools or unstable operation in the process, so that the wafers have defects, and in addition, the wafers are easy to shake in the process of taking and placing, so that the wafers are rubbed with the inner walls of the clamping plugs, and the pollution risk is further increased. Therefore, how to provide a card plug tray box for wafer inspection, to realize automatic wafer lifting operation, effectively avoid pollution on the wafer edge, and improve the placement stability of the wafer, is a technical problem to be solved by the person in the field. Disclosure of utility model The utility model aims to provide a clamping and holding box for wafer inspection, which realizes automatic wafer holding operation, effectively avoids pollution on the edge of a wafer and improves the placement stability of the wafer. In order to solve the technical problems, the utility model adopts the following technical scheme: The utility model discloses a plug supporting box for wafer inspection, which comprises a first shell, a base, a mounting frame, a sliding component, a supporting component and a control panel, wherein the top of the base is obliquely arranged towards the left side or the right side along the horizontal direction, the mounting frame is fixedly connected to the top of the base by a first inclination angle, the top of the mounting frame is obliquely forwards along the vertical direction to form a second inclination angle, the first shell is of a cavity structure with two open ends, the inclination angle of the top of the first shell is consistent with the second inclination angle of the top of the mounting frame, the first shell is sleeved outside the mounting frame, a plug body is embedded at the top opening of the first shell, a plurality of limiting grooves for containing wafers are arranged in the plug body, the sliding component is transversely arranged inside the mounting frame, the supporting component is fixedly connected to the top of the moving end of the sliding component, the top of the mounting frame is provided with a hole for the supporting component to pass through, the bottom of the plug body is correspondingly provided with an avoidance hole for the supporting component to pass through the working end, and the plug body is embedded at the top opening of the mounting frame, and the plug body is electrically connected with the control component through the first shell and the control panel. Preferably, the base comprises a first supporting block and a second supporting block, the first supporting block and the second supporting block are symmetrically and fixedly connected to the bottom of the mounting frame, and the height of the first supporting block is larger than that of the second supporting block. Preferably, the control panel comprises a display screen, keys and a PLC controller, wherein the display screen and the keys are integrally arranged on the side wall of the first shell, the PLC controller is embedded in the inner cavity of the first shell, and the display screen, the keys, the sliding assembly and the supporting assembly are all electrically connected with the PLC controller. Preferably, the sliding assembly comprises a first driving motor, a reciprocating screw rod, a guide rod and a sliding block, wherein the first driving motor is fixedly connected to one side of the installation frame, one end of the reciprocating screw rod is rotationally connected with the side wall of the installation frame, the other end of the reciprocating screw rod penetrates through the side wall of the installation frame and then is fixedly connected with the power output end of the first driving motor, the two guide rods are transversely arranged in an inner cavity of the installation frame, the sliding block is sleeved and connected onto the guide rod in a sliding manner, the sliding block is in threaded connection with the reciprocating screw rod, the supporting assembly is fixedly connected to the top of the sliding block, and the first driving motor is electrically connected with the PLC. Preferably, a mounting hole for accommodating the first driving motor is formed in the side wall of the first shell. Preferably, the lifting assembly comprises a second shell, a second driving motor, a gear, a toothed plate and a supporting plate, wherein the second shell is of a cavity s