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CN-224234152-U - Motion module of rewinding machine

CN224234152UCN 224234152 UCN224234152 UCN 224234152UCN-224234152-U

Abstract

The utility model discloses a motion module of a film rewinding machine, which belongs to the technical field of semiconductor processing equipment and comprises a frame, a film rewinding mechanism and a positioning module, wherein an upper cover plate is fixedly arranged at the top of the frame, an operation window is formed in the upper cover plate, the film rewinding mechanism is arranged in the frame, the film rewinding mechanism comprises a horizontal moving module, a vertical moving module and a detection module, one side of the frame is provided with the horizontal moving module, the other side of the frame is provided with the vertical moving module which is respectively used for supporting a first wafer box and a second wafer box, the detection module which is used for detecting the states of the first wafer box and the second wafer box is arranged in the frame, and the positioning module which is used for positioning the first wafer box and the second wafer box is arranged on the vertical moving module. By the mode, the positioning module on the vertical moving module is used for positioning the first wafer box and the second wafer box, and the detection module is used for judging whether the first wafer box and the second wafer box are positioned at accurate positions or not.

Inventors

  • ZHU DAJUN
  • GUO ZIQIANG
  • LI XIANGMING

Assignees

  • 泽鸿半导体设备科技(苏州)有限公司

Dates

Publication Date
20260512
Application Date
20250418

Claims (8)

  1. 1. The utility model provides a rewinding machine motion module, includes frame (1), rewinding mechanism (2) and positioning module (3), its characterized in that: an upper cover plate (11) is fixedly arranged at the top of the frame (1), and an operation window (111) is arranged on the upper cover plate (11), and a rewinding mechanism (2) is arranged in the frame (1); The film rewinding mechanism (2) comprises a horizontal moving module (21), a vertical moving module (22) and a detecting module (23), wherein the horizontal moving module (21) is installed on one side of the frame (1), two groups of vertical moving modules (22) which are respectively used for supporting the first wafer box (4) and the second wafer box (5) are installed on the other side of the frame (1), and the detecting module (23) which is used for detecting the states of the first wafer box (4) and the second wafer box (5) is installed in the frame (1); The vertical moving module (22) is provided with a positioning module (3) for positioning the first wafer box (4) and the second wafer box (5).
  2. 2. The film rewinding machine movement module according to claim 1, wherein a plurality of first slots (41) for inserting wafers are uniformly formed in the first wafer box (4) at equal intervals, and clamping grooves (42) are symmetrically formed in the lower side of the first wafer box (4).
  3. 3. The film rewinding machine movement module according to claim 2, characterized in that a plurality of second slots (51) for inserting wafers are uniformly formed in the second wafer cassette (5) at equal intervals, and bumps (52) are fixedly mounted on the lower side of the second wafer cassette (5).
  4. 4. A film rewinding machine motion module as claimed in claim 3, characterized in that the horizontal movement module (21) comprises a first synchronous belt straight line module (211), a second synchronous belt straight line module (212), a moving table (213) and a mechanical supporting plate (214), wherein the first synchronous belt straight line module (211) is fixedly arranged in the frame (1), the second synchronous belt straight line module (212) is fixedly arranged at the moving end of the first synchronous belt straight line module (211), the moving end of the second synchronous belt straight line module (212) is fixedly provided with the moving table (213), and the mechanical supporting plate (214) for transferring the wafer is fixedly arranged on the moving table (213).
  5. 5. The film rewinding machine movement module as claimed in claim 4, characterized in that the vertical movement module (22) comprises a ball screw linear module (221) and a bracket (222), the ball screw linear module (221) is fixedly installed inside the frame (1), and the bracket (222) for supporting the first wafer cassette (4) and the second wafer cassette (5) is installed at the moving end of the ball screw linear module (221).
  6. 6. The film rewinding machine motion module as claimed in claim 5, characterized in that said detection module (23) comprises an optical fiber sensor (231), and that the optical fiber sensor (231) for detecting the presence of a wafer in the first slot (41) and the second slot (51) of the alignment mechanical pallet (214) is mounted symmetrically and fixedly in the frame (1).
  7. 7. The film rewinding machine motion module as claimed in claim 6, characterized in that the detection module (23) further comprises a pressure sensor (232), and the bracket (222) is provided with a pressure sensor (232) for detecting whether the first wafer cassette (4) and the second wafer cassette (5) are in place.
  8. 8. The film rewinding machine movement module according to claim 7, wherein the positioning module (3) comprises a first limiting block (31), a second limiting plate (32), a boss (33) and a third limiting block (34), wherein the first limiting block (31) used for limiting the left side of the first wafer box (4) is symmetrically arranged on a bracket (222) on the rear side, the second limiting plate (32) used for limiting the first wafer box (4) is symmetrically arranged on the bracket (222) on the rear side, a boss (33) used for limiting the first wafer box (4) is symmetrically arranged on the bracket (222) on the rear side, a suitable groove used for conforming to the bottom of the second wafer box (5) is formed in the bracket (222) on the front side, the third limiting block (34) is arranged on the bracket (222) on the front side, and a limiting groove (35) clamped with the boss (52) is formed in the bracket (34) on the front side.

Description

Motion module of rewinding machine Technical Field The utility model relates to the technical field of semiconductor processing equipment, in particular to a motion module of a rewinding machine. Background In the semiconductor manufacturing process, wafers are often required to be processed, and in order to adapt to different processing technologies and equipment, the wafers need to be taken out of a wafer box by a rewinding machine and then put into another wafer box. As disclosed in chinese patent publication No. CN218730841U, a rewinding machine for wafer access is disclosed, in which a wafer placed in a chuck on a jig is taken out and put in by a wafer taking mechanism, and in the process of taking out and putting in the wafer from the chuck by the wafer taking mechanism, the wafer is detected and scanned by a first code reading detection mechanism and a second code reading detection mechanism. However, the device can only take out the wafer from one wafer box and then put it back in place, so that the wafer is difficult to take out and transfer, and the wafer is moved into another wafer box. Based on the above, the utility model designs a motion module of a rewinding machine to solve the above problems. Disclosure of utility model Aiming at the defects existing in the prior art, the utility model provides a motion module of a rewinding machine. In order to achieve the above purpose, the utility model is realized by the following technical scheme: A motion module of a rewinding machine comprises a frame, a rewinding mechanism and a positioning module; an upper cover plate is fixedly arranged at the top of the frame, and an operation window is arranged on the upper cover plate; The film rewinding mechanism comprises a horizontal moving module, a vertical moving module and a detecting module, wherein the horizontal moving module is arranged on one side of the frame, two groups of vertical moving modules which are respectively used for supporting the first wafer box and the second wafer box are arranged on the other side of the frame, and the detecting module which is used for detecting the states of the first wafer box and the second wafer box is arranged in the frame; The vertical moving module is provided with a positioning module for positioning the first wafer box and the second wafer box. Furthermore, a plurality of first slots for inserting wafers are uniformly formed in the first wafer box at equal intervals, and clamping grooves are symmetrically formed in the lower side of the first wafer box. Furthermore, a plurality of second slots for inserting wafers are uniformly arranged in the second wafer box at equal intervals, and the lower side of the second wafer box is fixedly provided with a bump. Still further, the horizontal movement module includes first hold-in range straight line module, second hold-in range straight line module, mobile station and mechanical layer board, and first hold-in range straight line module fixed mounting is in the inside of frame, and second hold-in range straight line module fixed mounting is at the mobile terminal of first hold-in range straight line module, and the mobile station is fixed with to the mobile terminal of second hold-in range straight line module, and fixed mounting has the mechanical layer board that is used for moving the wafer on the mobile station. Still further, the vertical movement module includes ball straight line module and bracket, and ball straight line module fixed mounting is in the inside of frame, and the bracket that is used for supporting first wafer box and second wafer box is installed to the removal end of ball straight line module. Furthermore, the detection module comprises optical fiber sensors, and the optical fiber sensors for detecting whether wafers exist in the first slot and the second slot of the alignment mechanical supporting plate are symmetrically and fixedly arranged in the rack. Still further, the detection module further comprises a pressure sensor, and the bracket is provided with the pressure sensor for detecting whether the first wafer box and the second wafer box are in place. Still further, the positioning module comprises a first limiting block, a second limiting plate, a boss and a third limiting block, wherein the first limiting block used for limiting the left side of the first wafer box is symmetrically arranged on the bracket at the rear side, the second limiting plate used for limiting the first wafer box is symmetrically arranged on the bracket at the rear side, the boss used for limiting the first wafer box is symmetrically arranged on the bracket at the rear side, an adaptive groove used for adapting to the bottom of the second wafer box is formed on the bracket at the front side, the third limiting block is arranged on the bracket at the front side, and a limiting groove clamped with the boss is formed on the third limiting block. Compared with the prior art, the wafer chamfering device has the ad