CN-224234154-U - Automatic unloader of silicon chip, silicon chip production facility

CN224234154UCN 224234154 UCN224234154 UCN 224234154UCN-224234154-U

Abstract

The utility model provides an automatic silicon wafer blanking device and silicon wafer production equipment, wherein the automatic silicon wafer blanking device comprises a blanking station for accommodating a blanking basket, a receiving station for accommodating a receiving basket and a pushing arm, the pushing arm is driven by a pushing linear module to move along the connecting line direction of the blanking station and the receiving station, a basket conveying station I and a basket conveying station II are respectively arranged on two sides of the blanking station, the automatic silicon wafer blanking device comprises a basket conveying assembly, and the basket conveying assembly can convey the blanking basket between the basket conveying station I and the blanking station and between the blanking station and the basket conveying station II. According to the utility model, through the arrangement of the blanking station, the receiving station, the pushing arm and the like, the automatic blanking function in the silicon wafer production equipment with the non-universal inner and outer wafer baskets is realized, the manual intervention can be reduced, the silicon wafer pollution or crushing risk caused by the manual intervention is reduced, and the production efficiency is improved.

Inventors

Yang Luxiao
NIE YONG
NI ZHICHAO
LIU JIANWEI
WANG SHUAI

Assignees

天津中环领先材料技术有限公司
中环领先半导体科技股份有限公司

Dates

Publication Date: 20260512
Application Date: 20250422

Claims (10)

1. The utility model provides an automatic unloader of silicon chip which characterized in that includes: A blanking station for accommodating a blanking basket, A receiving station for accommodating the receiving basket, The pushing piece arm is driven by the pushing piece linear module and moves along the connecting line direction of the blanking station and the receiving station.
2. The automated silicon wafer blanking device of claim 1, wherein a first basket transferring station and a second basket transferring station are respectively arranged on two sides of the blanking station, the automated silicon wafer blanking device comprises a basket transferring assembly, and the basket transferring assembly can transfer the blanking basket between the first basket transferring station and the blanking station and between the blanking station and the second basket transferring station.
3. The automated silicon wafer blanking device of claim 2, wherein the first basket transferring station is provided with a turnover basket platform and a turnover motor, the turnover basket platform comprises a first backboard and a second backboard which are perpendicular to each other, and the output end of the turnover motor is connected with the turnover basket platform and can drive the turnover basket platform to rotate 90 degrees around the intersecting line of the first backboard and the second backboard.
4. The automated silicon wafer blanking device according to claim 3, wherein the second basket placing station is provided with a third basket placing plate, the second basket placing plate and the third basket placing plate are respectively provided with a conveying groove with an opening facing the blanking station, the blanking station is provided with a first basket placing table and a second basket placing table, the first basket placing table and the second basket placing table are provided with a basket conveying gap, and the basket conveying assembly can move in the conveying groove and the basket conveying gap.
5. The automated silicon wafer blanking device of claim 4, wherein the basket transfer assembly comprises a basket transfer linear module and a basket transfer table, and the basket transfer linear module can drive the basket transfer table to move along the dispersion direction of the first basket transfer station, the blanking station and the second basket transfer station; The basket conveying table is provided with a plurality of first basket limiting blocks which are used for limiting the blanking basket.
6. The automated silicon wafer blanking device of claim 5, wherein the second backboard, the third backboard, the first basket platform and the second basket platform are respectively provided with a second basket limiting block, and the basket conveying assembly comprises a lifting module which is arranged on the basket conveying straight module and used for lifting the basket conveying platform.
7. The automated silicon wafer blanking device of any of claims 3-6, wherein the turnover basket table comprises a mounting plate, the mounting plate and the second basketball placement plate are respectively positioned on two sides of the first basketball placement plate, a telescopic device is arranged on the mounting plate, a third basketball placement limiting block is connected to a movable end of the telescopic device, and a through groove corresponding to the third basketball placement limiting block is arranged on the first basketball placement plate.
8. The automated silicon wafer blanking device according to any one of claims 1 to 6, wherein the pushing arm comprises a first support arm and a second support arm, the first support arm is connected with the second support arm and the pushing piece linear module, the second support arm and the pushing piece linear module extend in the same direction, a C-shaped pushing block is arranged at the end part of the second support arm, which faces the blanking station, and an opening of the C-shaped pushing block faces the blanking station.
9. The automated silicon wafer blanking device of claim 8, wherein the blanking station is configured with a pusher sensor for detecting a position of the C-shaped pusher.
10. A silicon wafer production device is characterized in that the silicon wafer production device is provided with the silicon wafer automatic blanking device according to any one of claims 1-9, and the silicon wafer production device at least comprises a silicon wafer cleaning device.

Description

Automatic unloader of silicon chip, silicon chip production facility Technical Field The utility model relates to the technical field of silicon wafer production, in particular to an automatic silicon wafer discharging device and silicon wafer production equipment. Background The silicon wafer production process comprises polishing, cleaning, grooving, electroplating and other working procedures, and the working procedures correspond to different silicon wafer production equipment, the silicon wafer production equipment is designed according to production process requirements, factory space planning and the like, and the silicon wafer basket inside some silicon wafer production equipment has special sizes or shapes on the outer contour based on the reasons of efficiently utilizing the internal space of the equipment (improving the integration level of the equipment to reduce the occupation of the factory space), being cooperated with or avoiding other mechanical structures inside the equipment and the like, so that the silicon wafer basket is not universal for silicon wafer circulation outside the equipment. For example, in a typical trough basket washer used in small size (typically including 5 inch, 6 inch and 8 inch) silicon wafer cleaning process, the inner basket has the same number of slots and spacing as the outer basket for wafer circulation, but the outer basket has a smaller outer dimension and may have special spacing structures (e.g., grooves or bumps adapted to other structures inside the washer), and these inner baskets are custom-built with the apparatus, and cannot be replaced with other baskets or be transported from the washer at will. Therefore, when the silicon wafer is required to flow to other production processes after the cleaning is finished, the silicon wafer transfer work is generated, namely, the silicon wafer in the inner basket of the cleaning machine is transferred to the outer basket for silicon wafer flow, and then the outer basket for silicon wafer flow is transferred through an AGV (automatic guided vehicle) or a mechanical arm and the like. In the traditional operation, the silicon wafer handing-over work between the inside basket of cleaning machine and the outside silicon wafer circulation is carried out by the manual work, but the workman gets when putting the silicon wafer, makes the silicon wafer produce pollution, crushed aggregates easily, and the manual work gets and puts the silicon wafer inefficiency. Disclosure of utility model The utility model aims to provide an automatic silicon wafer blanking device and silicon wafer production equipment, so as to solve the problems in the background. The utility model adopts the technical scheme that the automatic silicon wafer blanking device comprises: A blanking station for accommodating a blanking basket, A receiving station for accommodating the receiving basket, The pushing piece arm is driven by the pushing piece linear module and moves along the connecting line direction of the blanking station and the receiving station. Preferably, a first basket transferring station and a second basket transferring station are respectively arranged on two sides of the blanking station, the automatic silicon wafer blanking device comprises a basket transferring assembly, and the basket transferring assembly can transfer the blanking basket between the first basket transferring station and the blanking station and between the blanking station and the second basket transferring station. Preferably, the first basket transferring station is provided with a turnover basket platform and a turnover motor, the turnover basket platform comprises a first basket placing board and a second basket placing board which are perpendicular to each other, the output end of the turnover motor is connected with the turnover basket platform, and the turnover basket platform can be driven to rotate by 90 degrees around the intersecting line of the first basket placing board and the second basket placing board. Preferably, the basket conveying station II is provided with a basket placing board III, the basket placing board II and the basket placing board III are respectively provided with a conveying groove with an opening facing the blanking station, the blanking station is provided with a basket placing table I and a basket placing table II, the basket placing table I and the basket placing table II are provided with basket conveying gaps, and the basket conveying assembly can move in the conveying grooves and the basket conveying gaps. Preferably, the basket conveying assembly comprises a basket conveying linear module and a basket conveying table, the basket conveying linear module can drive the basket conveying table to move along the dispersing direction of the first basket conveying station, the discharging station and the second basket conveying station, and a plurality of first basket limiting blocks are arranged on the basket conveying table an