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CN-224234160-U - Four-batch feeding mechanism

CN224234160UCN 224234160 UCN224234160 UCN 224234160UCN-224234160-U

Abstract

The utility model provides a four-batch feeding mechanism, which belongs to the technical field of semiconductor production equipment and comprises a mounting mechanism, wherein the mounting mechanism comprises a mounting shell, a heat radiation door hinged to the side wall of the mounting shell, a warning lamp fixedly mounted at the top of the mounting shell, a fixing plate fixedly mounted on the inner wall of the mounting shell, a sliding rail fixedly mounted on the side wall of the fixing plate and a rack fixedly mounted on the side wall of the sliding rail. According to the utility model, three-dimensional accurate movement of the mobile station is realized through the cooperation of the sliding rail, the rack and the screw rod, the second motor drives the gear to control horizontal movement along the rack, the first motor drives the placement table to lift through the screw rod, the third motor drives the conveyor belt to realize horizontal movement, the three motors work cooperatively to ensure accurate positioning, the clamping cylinder can rapidly grab and place the tray, the action is stable and reliable, the placement frame adopts a four-layer design, each layer is provided with a slidable moving plate and a dividing frame, the placement plate is divided into six areas, and the classification and storage of chips in different batches are facilitated.

Inventors

  • ZHU ZHENGZHENG
  • DENG JIN
  • GAO YONG

Assignees

  • 苏州乾鸣半导体设备有限公司

Dates

Publication Date
20260512
Application Date
20250616

Claims (7)

  1. 1. The four-batch feeding mechanism is characterized by comprising, The mounting mechanism (100) comprises a mounting shell (101), a heat dissipation door (102) hinged to the side wall of the mounting shell (101), a warning lamp (103) fixedly mounted on the top of the mounting shell (101), a fixing plate (104) fixedly mounted on the inner wall of the mounting shell (101), a sliding rail (105) fixedly mounted on the side wall of the fixing plate (104) and a rack (106) fixedly mounted on the side wall of the sliding rail (105); The moving mechanism (200) comprises a sliding block (201) which is connected to the surface of the sliding rail (105), a connecting shell (202) which is fixedly arranged on the surface of the sliding block (201), a supporting frame (203) which is fixedly arranged on the inner wall of the connecting shell (202), a feeding component (204) which is arranged on the side wall of the supporting frame (203), and a placing component (205) which is arranged on the surface of the connecting shell (202).
  2. 2. The four-batch feeding mechanism as claimed in claim 1, wherein the feeding assembly (204) comprises a first motor (204 a) fixedly mounted on the side wall of the supporting frame (203), a second motor (204 b) adaptively mounted on the side wall of the supporting frame (203), a driving gear (204 c) fixedly mounted on the output end of the second motor (204 b), and a screw rod (204 d) connected to the output end of the first motor (204 a) through a belt.
  3. 3. The four-batch feeding mechanism as set forth in claim 2, wherein the feeding assembly (204) further comprises a placement table (204 e) screwed on the surface of the screw rod (204 d), a support rod (204 f) fixedly mounted on the side wall of the placement table (204 e), and a third motor (204 g) fixedly mounted on the side wall of the support rod (204 f).
  4. 4. The four-batch feeding mechanism as set forth in claim 3, wherein the feeding assembly (204) further comprises a conveyor belt (204 h) sleeved at the output end of the third motor (204 g), a movable table (204 i) fixedly connected to the surface of the conveyor belt (204 h), and a clamping cylinder (204 j) fixedly installed at the bottom of the movable table (204 i).
  5. 5. The four-batch feeding mechanism as set forth in claim 4, wherein the placement assembly (205) comprises a placement frame (205 a) movably connected to the surface of the connection housing (202), and a guide rail (205 b) fixedly mounted on the side wall of the placement frame (205 a).
  6. 6. The four-batch feeding mechanism as claimed in claim 5, wherein the placement assembly (205) further comprises a moving plate (205 c) slidably connected to the surface of the guide rail (205 b), and a top moving cylinder (205 d) fixedly installed at the bottom of the moving plate (205 c).
  7. 7. The four-batch feeding mechanism as set forth in claim 6, wherein the placement module (205) further comprises a placement plate (205 e) fixedly mounted on a side wall of the moving plate (205 c), and a dividing frame (205 f) fixedly mounted on a side wall of the moving plate (205 c).

Description

Four-batch feeding mechanism Technical Field The utility model belongs to the technical field of semiconductor production equipment, and particularly relates to a four-batch feeding mechanism. Background In the technical field of semiconductor production equipment, a chip feeding mechanism is one of key equipment for realizing automatic production, in the prior art, a common feeding mechanism generally adopts a single-shaft or double-shaft moving mode, conveying and positioning of a chip tray are realized through a conveying belt or a mechanical arm, part of equipment is also provided with a layered placement structure so as to meet the chip storage requirements of different batches, and the mechanisms generally comprise a motor driving system, a guide rail assembly and a clamping device and can complete the basic material transfer function. However, the existing feeding mechanism still has certain limitations in practical application, such as limited single-batch processing capability, difficulty in meeting the high-efficiency feeding requirements of multiple varieties and small batches of chips, insufficient positioning precision and stability, possibility of causing position deviation in the process of taking and placing the chips, frequent manual intervention and to-be-lifted degree of automation, and the problems influence the overall efficiency and yield of the semiconductor production line, so that the four-batch feeding mechanism is provided. Disclosure of utility model The utility model aims to provide four batches of feeding mechanisms and aims to solve the problems in the background technology. In order to achieve the above purpose, the present utility model provides the following technical solutions: The four-batch feeding mechanism comprises, The mounting mechanism comprises a mounting shell, a heat radiation door hinged to the side wall of the mounting shell, a warning lamp fixedly mounted at the top of the mounting shell, a fixing plate fixedly mounted on the inner wall of the mounting shell, a sliding rail fixedly mounted on the side wall of the fixing plate and a rack fixedly mounted on the side wall of the sliding rail; The moving mechanism comprises a sliding block, a connecting shell, a supporting frame, a feeding assembly and a placing assembly, wherein the sliding block is connected to the surface of the sliding rail, the connecting shell is fixedly arranged on the surface of the sliding block, the supporting frame is fixedly arranged on the inner wall of the connecting shell, the feeding assembly is arranged on the side wall of the supporting frame, and the placing assembly is arranged on the surface of the connecting shell. As a preferable scheme of the utility model, the feeding assembly comprises a first motor fixedly arranged on the side wall of the support frame, a second motor adaptively arranged on the side wall of the support frame, a driving gear fixedly arranged at the output end of the second motor, and a screw rod connected with the output end of the first motor through a belt. As a preferable scheme of the utility model, the feeding assembly further comprises a placing table connected to the surface of the screw rod through threads, a supporting rod fixedly arranged on the side wall of the placing table, and a third motor fixedly arranged on the side wall of the supporting rod. As a preferable scheme of the utility model, the feeding assembly further comprises a conveying belt sleeved at the output end of the third motor, a movable table fixedly connected to the surface of the conveying belt, and a clamping cylinder fixedly installed at the bottom of the movable table. As a preferable scheme of the utility model, the placing component comprises a placing frame movably connected to the surface of the connecting shell and a guide rail fixedly arranged on the side wall of the placing frame. As a preferred scheme of the utility model, the placement assembly further comprises a moving plate which is connected to the surface of the guide rail in a sliding manner, and a jacking cylinder which is fixedly arranged at the bottom of the moving plate. As a preferred aspect of the present utility model, the placement module further includes a placement plate fixedly installed on a side wall of the moving plate, and a division frame fixedly installed on a side wall of the moving plate. Compared with the prior art, the three-dimensional precise movement of the moving table is realized through the cooperation of the sliding rail, the rack and the screw rod, the second motor drives the gear to move horizontally along the rack, the first motor drives the placing table to lift through the screw rod, the third motor drives the conveying belt to move horizontally, the three motors work cooperatively to ensure accurate positioning, the clamping cylinder can grab and place the material tray quickly, the movement is stable and reliable, the placing frame adopts a four-layer design, each layer is