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CN-224234172-U - Multi-station front opening wafer box loading device

CN224234172UCN 224234172 UCN224234172 UCN 224234172UCN-224234172-U

Abstract

The utility model provides a multi-station front opening type wafer box loading device which comprises a mounting substrate, at least one operating platform and at least one pressing and fixing mechanism, wherein the operating platform is arranged on one side surface of the mounting substrate and used for placing a wafer box, the pressing and fixing mechanism is arranged on one side surface of the mounting substrate, the pressing and fixing mechanism is arranged in one-to-one correspondence with the wafer box placing positions and is positioned above the corresponding wafer box placing positions, and the pressing and fixing mechanism is used for restraining the wafer box or releasing the restraint of the wafer box. The wafer box is provided with the pressing mechanism for each wafer box, the pressing mechanism is used for pressing and fixing the wafer box in the unlocking or locking process of the wafer box, the limiting effect on the wafer box is achieved, the problem that the position of the wafer box is deviated in the unlocking or locking process is solved, and when the pressing mechanism is used for releasing the pressing of the wafer box, the wafer box can still be freely taken and placed.

Inventors

  • CHANG ZHIYONG
  • HOU SHUANGMING
  • MENG JUNYAN

Assignees

  • 中科芯微智能装备(沈阳)有限公司

Dates

Publication Date
20260512
Application Date
20250530

Claims (10)

  1. 1. A multi-station front opening wafer cassette loading apparatus, comprising: A mounting substrate; at least one operation table arranged on one side surface of the mounting substrate and used for placing a wafer box; The pressing and fixing mechanism is arranged on one side surface of the mounting substrate, is arranged in one-to-one correspondence with the placement positions of the wafer boxes and is positioned above the corresponding placement positions of the wafer boxes, and is used for restraining the wafer boxes or releasing the restraint of the wafer boxes.
  2. 2. The multi-station front opening wafer cassette loading device according to claim 1, wherein a pressing hole is formed in the top of the wafer cassette; The press-fixing mechanism comprises: The driving assembly is arranged on one side surface of the mounting substrate; The pressing head is arranged at the driving end of the driving assembly corresponding to the pressing fixing hole, and can be driven to move towards the direction close to or far away from the pressing fixing hole through the driving assembly, so that the pressing head is inserted into the pressing fixing hole to press and fix the wafer box, or the pressing head is separated from the pressing fixing hole to release the pressing fixing of the wafer box.
  3. 3. The multi-station front opening wafer cassette loading apparatus of claim 2, wherein the press-fit mechanism further comprises: the sliding rail is arranged on one side surface of the mounting substrate; the sliding piece is arranged on the sliding rail in a sliding way and is connected with the driving end of the driving assembly, the driving assembly drives the sliding piece to enable the sliding piece to move along the extending direction of the sliding rail, and the pressure head is arranged on the sliding piece.
  4. 4. The multi-station front opening wafer cassette loading apparatus of claim 3, wherein the press-fit mechanism further comprises: The lifting plate is provided with a first end part and a second end part which are oppositely arranged, the first end part is arranged on the sliding part, the second end part is arranged corresponding to the pressing fixing hole, and the pressing head is arranged on the second end part.
  5. 5. The multi-station front opening wafer cassette loading apparatus of claim 4, wherein the press-fit mechanism further comprises a connecting plate having one end connected to the driving end of the driving assembly and the other end connected to the lift plate.
  6. 6. The apparatus of claim 4, wherein the lifting plate is bent, and a reinforcing plate is provided at a bent portion of the lifting plate, or The lifting plate is in a bent shape, and a reinforcing plate is arranged at the bent part of the lifting plate.
  7. 7. The multi-station front opening wafer cassette loading device of claim 3, wherein the press-fixing mechanism further comprises a limiting block arranged at the end of the sliding rail.
  8. 8. The apparatus of claim 3, wherein the press-fit mechanism further comprises a base disposed on a side of the mounting substrate, and the drive assembly and the slide rail are disposed on the base.
  9. 9. The multi-station front opening wafer cassette loading apparatus of claim 8, wherein the press-fit mechanism further comprises a top seat disposed on the base, and the driving assembly is disposed on the top seat.
  10. 10. The apparatus of any one of claims 2 to 9, wherein the pressing head has a tapered shape and the cross-sectional dimension of the pressing head gradually decreases from top to bottom, and the press-fit hole has a tapered shape adapted to the pressing head, or The pressure head is in a truncated cone shape, the cross section size of the pressure head is gradually reduced from top to bottom, and the pressing hole is in a truncated cone shape matched with the pressure head.

Description

Multi-station front opening wafer box loading device Technical Field The utility model relates to the technical field of semiconductor equipment, in particular to a multi-station front opening wafer box loading device. Background The wafer box mainly plays a role in placing and conveying wafers in semiconductor production, temporarily stores the wafers in the wafer transferring process and maintains the storage equipment in a closed state. However, the position of the wafer box is easy to deviate in the unlocking or locking process of the current wafer box, so that the problem that the wafer box cannot be unlocked or locked is caused. In view of the foregoing, there is a need for a multi-station front opening wafer cassette loading apparatus that solves the above-mentioned problems. Disclosure of utility model The utility model aims to provide a multi-station front opening wafer box loading device which is used for solving the problem that the position of the existing wafer box is easy to deviate in the unlocking or locking process. The utility model provides a multistation front opening wafer box loading device, which comprises: A mounting substrate; at least one operation table arranged on one side surface of the mounting substrate and used for placing a wafer box; The pressing and fixing mechanism is arranged on one side surface of the mounting substrate, is arranged in one-to-one correspondence with the placement positions of the wafer boxes and is positioned above the corresponding placement positions of the wafer boxes, and is used for restraining the wafer boxes or releasing the restraint of the wafer boxes. The multi-station front opening type wafer box loading device has the advantages that the pressing and fixing mechanisms are arranged for each wafer box, the wafer boxes are pressed and fixed through the pressing and fixing mechanisms in the unlocking or locking process of the wafer boxes, the limiting effect on the wafer boxes is achieved, the problem that the positions of the wafer boxes are deviated in the unlocking or locking process is solved, and when the pressing and fixing mechanisms are used for releasing the pressing and fixing of the wafer boxes, the wafer boxes can be still freely taken and placed. In one possible embodiment, the top of the wafer box is provided with a pressing hole; The press-fixing mechanism comprises: The driving assembly is arranged on one side surface of the mounting substrate; The pressing head is arranged at the driving end of the driving assembly corresponding to the pressing fixing hole, and can be driven to move towards the direction close to or far away from the pressing fixing hole through the driving assembly, so that the pressing head is inserted into the pressing fixing hole to press and fix the wafer box, or the pressing head is separated from the pressing fixing hole to release the pressing fixing of the wafer box. The wafer box pressing device has the advantages that when the wafer box needs to be pressed and fixed, the driving assembly drives the pressing head to move towards the direction close to the pressing and fixing hole, so that the pressing head is inserted into the pressing and fixing hole of the wafer box to press and fix the wafer box, and when the wafer box needs to be released, the driving assembly drives the pressing head to move towards the direction away from the pressing and fixing hole, so that the pressing head is separated from the pressing and fixing hole to release the pressing and fixing of the wafer box. In one possible embodiment, the press-fixing mechanism further includes: The sliding rail is arranged on one side surface of the mounting substrate, and the arrangement direction of the sliding rail is consistent with the moving direction of the pressure head; the sliding piece is arranged on the sliding rail in a sliding way and is connected with the driving end of the driving assembly, the driving assembly drives the sliding piece to enable the sliding piece to move along the extending direction of the sliding rail, and the pressure head is arranged on the sliding piece. The sliding component has the advantages that the pressing head is arranged on the sliding component, plays a guiding role through the matching of the sliding rail and the sliding component, and is driven by the driving component to always move along the extending direction of the sliding rail, so that the moving stability of the pressing head is ensured, and the deviation between the pressing head and the pressing fixing hole is avoided. In one possible embodiment, the press-fixing mechanism further includes: The lifting plate is provided with a first end part and a second end part which are oppositely arranged, the first end part is arranged on the sliding part, the second end part is arranged corresponding to the pressing fixing hole, and the pressing head is arranged on the second end part. The lifting plate is arranged on the sliding piece, and the pre