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DE-102025114962-B3 - Carrier material with magnetic field-modulating particles for adjustable sensitivity of optical NV sensor elements

DE102025114962B3DE 102025114962 B3DE102025114962 B3DE 102025114962B3DE-102025114962-B3

Abstract

The invention relates to a first substrate material for an optical sensor element (NV) configured to selectively influence the magnetic flux density at the sensor element. For this purpose, the first substrate material contains magnetic flux density (B(t))-modifying particles embedded in a matrix material. The particles are arranged, constructed, and/or manufactured such that they alter the sensitivity of the sensor element (NV), while still allowing at least one optical access window for optically controlling and reading the sensor element (NV). The sensitivity of the sensor element (NV) with respect to the intensity (Ifl(t)) of the fluorescence radiation (FL) emitted by the paramagnetic centers of the sensor element (NV) relative to the magnetic flux density (B(t)) at the respective location of the paramagnetic centers can be selectively adjusted by means of the first substrate material through its construction, construction, dimensioning, shaping, and/or arrangement.

Inventors

  • Miles Kuper
  • Bernd Burchard
  • Lutz Langguth

Assignees

  • ELMOS SEMICONDUCTOR SE
  • QUANTUM TECHNOLOGIES GMBH

Dates

Publication Date
20260513
Application Date
20250416

Claims (11)

  1. First support material for an optical sensor element (NV), wherein the first support material contains particles modifying the magnetic flux density (B(t)) which are embedded in a matrix material, and wherein these particles modifying the magnetic flux density (B(t)) are arranged and/or constructed and/or manufactured in such a way as to change the sensitivity of the sensor element (NV), and wherein these particles modifying the magnetic flux density (B(t)) leave at least one optical access window for optically driving and optically reading the sensor element (NV), characterized in that the sensitivity of the sensor element (NV) with respect to the intensity (I fl (t)) of the fluorescence radiation (FL) emitted by the paramagnetic centers of the sensor element (NV) relative to the value of the magnetic flux density (B(t)) at the respective location of the paramagnetic centers can be selectively adjusted by means of the first support material by means of construction and/or manufacturing and/or dimensioning and/or shaping and/or arrangement.
  2. First carrier material after Claim 1 , wherein the particles modifying the magnetic flux density (B(t)) include soft magnetic particles.
  3. First carrier material after one of the Claims 1 until 2 , wherein the particles modifying the magnetic flux density (B(t)) are arranged such that they enclose the sensor element (NV) except for at least one optical access window (OF1).
  4. First carrier material after one of the Claims 1 until 3 , wherein particles of the magnetic flux density (B(t)) modifying particles comprise ferrites and/or wherein particles of the magnetic flux density (B(t)) modifying particles comprise superparamagnetic nanoparticles and/or wherein particles of the magnetic flux density (B(t)) modifying particles comprise permalloy and/or wherein particles of the magnetic flux density (B(t)) modifying particles comprise metglas and/or wherein particles of the magnetic flux density (B(t)) modifying particles have a high magnetic susceptibility of at least 10³ and/or wherein particles of the magnetic flux density (B(t)) modifying particles have a low coercivity ( Hc ) of less than 10⁻¹⁰ A/m.
  5. First carrier material after one of the Claims 1 until 4 , wherein particles of the particles modifying the magnetic flux density (B(t)) are designed and/or manufactured and/or dimensioned and/or arranged such that they reduce the sensitivity of the sensor element (NV) to changes in the magnetic flux density (B(t)) at the location of the sensor element (NV) by weakening the flux density (B(t)) caused by the external magnetic field at the location of the sensor element (NV).
  6. Shielded sensor element (NV) with reduced or modified sensitivity and with a first carrier material (TM1) according to one of the Claims 1 until 5 , wherein the sensor element (NV) comprises a second support material (TM2) and wherein a plurality of magnetic field-sensitive particles, in particular crystals, in particular disordered, are embedded in the second support material (TM2) and wherein one or more or all of these magnetic field-sensitive particles have paramagnetic centers and wherein paramagnetic centers of these paramagnetic centers are configured to emit, upon irradiation with a pump radiation (LB) with a pump radiation intensity (I pmp (t)) other than 0 W and a pump radiation wavelength (λ pmp ), a fluorescence radiation (λ fl ) with a fluorescence radiation delay ( Δ fl ( t)), which may be 0 s, and a fluorescence wavelength (λ fl ) and a fluorescence radiation intensity (I fl (t)) of the value the magnetic flux density B(t) at the location of the paramagnetic centers and wherein the first support material (TM1) at least partially encloses the second support material (TM2) and wherein the magnetic field-sensitive particles comprise diamonds (DM) and wherein the paramagnetic centers comprise NV centers and/or ST1 centers and/or SiV centers and/or PbV centers and/or GeV centers, wherein NV centers are particularly suitable.
  7. Multi-sensor element module (MSEM) with a shielded sensor element according to Claim 6 , wherein the multi-sensor element module (MSEM) comprises at least two sensor elements, a first sensor element (NV 1 ) and a second sensor element (NV 2 ) and/or n sensor elements (NV 1 to NV n ) with n being a positive integer, and wherein at least one sensor element of these sensor elements (NV 1 , NV 2 ... NV 1 ) is the shielded sensor element according to Claim 6 is and wherein the sensor elements (NV 1 , NV 2 ... NV n ) each possess all the features of a respective shielded sensor element according to Claim 6 exhibiting without, except for at least one of these sensor elements (NV 1 , NV 2 ... NV n ), a first carrier material (TM1) corresponding to one of the Claims 1 until 5 to include.
  8. Multi-sensor element module (MSEM) according to Claim 7 , wherein the first sensitivity of the first intensity (I fl1 (t)) of the first fluorescence radiation (FL 1 ) of the first magnetic field sensitive particle of the first sensor element (NV 1 ) to the value of the magnetic flux density (B(t)) at the location of the paramagnetic centers of the first magnetic field sensitive particle of the first sensor element (NV 1 ) differs from the second sensitivity of the second intensity (I fl2 (t)) of the second fluorescence radiation (FL 2 ) of the second magnetic field sensitive particle of the second sensor element (NV 2 ) to the value of the magnetic flux density (B(t)) at the location of the paramagnetic centers of the second magnetic field sensitive particle of the second sensor element (NV 2 ).
  9. Device for detecting the magnetic flux density (B ext (t)) in a first air gap (ag 1 ) and/or in the first stray field of the first air gap (ag 1 ) of a disc rotor motor, wherein the disc rotor motor has a rotatable axis (AX) and wherein the disc rotor motor has at least one rotor disk (RS) that is sectionally magnetizable and/or sectionally magnetized and/or sectionally permanently magnetized and wherein the rotor disk (RS) is attached to the axis (AX) in such a way and at least temporarily forms a connection such that the axis (AX) is perpendicular to the rotor disk (RS) and the rotor disk (RS) rotates with the axis (AX) during rotation and the axis (AX) rotates with the rotor disk (RS) during rotation and wherein the disc rotor motor has at least one first stator coil assembly (SSP 1 ) which is flat on at least one side with a first surface and wherein the first stator coil assembly (SSP 1 ) with this first surface defines the first air gap (ag 1 ) forms between this first surface and a first surface of the rotor disk (RS) and wherein the assembly of rotor disk (RS) and axle (AX) is rotatably mounted relative to the first stator coil package (SSP 1 ) and wherein the disk rotor motor has at least one first multi-sensor element module (MSEM 1 ) according to one of the Claims 7 until 8 comprising and wherein the multi-sensor element module (MSEM 1 ) is located in the first air gap (ag 1 ) and/or in the area of influence of the magnetic flux density (B ext (t)) which forms in the first air gap (ag 1 ) and wherein the device is configured to generate, depending on fluorescence signals (FI 1 , FL 2 , FL 3 ) of the multi-sensor element module (MSEM 4 ), one or more measured values, in particular for the magnetic flux density B ext (t) to be detected, and/or one or more measured value signals, in particular for the magnetic flux density (B ext (t)) to be detected, and/or control signals, in particular for one or more half-bridges (HB 1 , HB 2 , HB 3 ).
  10. Quantum sensor controlled disc rotor motor wherein the quantum sensor controlled disc rotor motor comprises a disc rotor motor and wherein the quantum sensor controlled disc rotor motor comprises at least a first device for detecting a first magnetic flux density (B ext (t)) in the first air gap (ag 1 ) of the disc rotor motor according to Claim 9 comprising and wherein the control and evaluation device (CTR) of the first device for detecting a first magnetic flux density (B ext (t)) in the first air gap (ag 1 ) of the disc rotor motor is configured to: - irradiate the respective first sensor elements (NV 1 , NV 2 ) of the first multi-sensor element module (MSEM 1 ) with one or more first pump radiations (LB 1 , LB 2 , LB 3 ) and - receive the respective first fluorescence radiations (FL1, FL2, FL3) of the respective first sensor elements (NV 1 , NV 2 ) of the first multi-sensor element module (MSEM 1 ) by means of respective first photodetectors (PD 1 , PD 2 , PD 3 ) and - transmit respective first receiver output signals (S0 1 , S0 2 , S0 3 ) of these respective first sensor elements (NV 1 , NV 2 ) to evaluate the first photodetectors (PD 1 , PD 2 , PD 3 ) assigned to the first multi-sensor element module (MSEM 1 ) and, depending on these first receiver output signals (S0 1 , S0 2 , S0 3 ), to generate one or more first half-bridge control signals (HSL), wherein these one or more first half-bridge control signals (HSL) control the first electronic switches (T HU , T LU , T HV , T LV , T HW , T LW ) of one or more first half-bridges (HB 1 , HB 2 , HB 3 ), and wherein these one or more first half-bridges (HB 1 , HB 2 , HB 3 ) control the first stator coils (SL 1 , SL 2 , SI 3 ) of the respective first motor phases (motor connection lines) (MPH U , MPH V , MPH W ) of the to energize the first stator coil package (SSP 1 ) of the disc rotor motor with respective first electrical currents (I U , I V , I W ) depending on the one or more first half-bridge control signals (HSL) and thus depending on the first receiver output signals (S0 1 , S0 2 , S0 3 ) and thus depending on the first intensities (I fl1 (t) , I fl2 (t) , I fl3 (t) ) of the first fluorescence radiations (FI 1 , FL 2 , FL 3 ) of the first sensor elements (NV 1 , NV 2 , NV 3 ) of the first multi-sensor element module (MSEM 1 ).
  11. Quantum sensor controlled disc rotor motor according to Claim 10 , wherein the quantum sensor controlled disc rotor motor at least a second device for detecting a first magnetic flux density (B ext (t)) in a second air gap (ag 2 ) of the disc rotor motor according to Claim 9 comprising and wherein the control and evaluation device (CTR) of the second device for detecting a second magnetic flux density (B ext (t)) in the second air gap (ag 2 ) of the disc rotor motor is configured to - to irradiate the respective sensor elements (NV 1 , NV 2 ) of the second multi-sensor element module (MSEM 2 ) with one or more pump radiations (LB 1 , LB 2 , LB 3 ) and - to receive the respective fluorescence radiations (FL 1 , FL 2 , FL 3 ) of the respective sensor elements (NV 1 , NV 2 ) of the second multi-sensor element module (MSEM 2 ) by means of respective photodetectors (PD 1 , PD 2 , PD 3 ) and - to evaluate the respective receiver output signals (S0 1 , S0 2 , S0 3 ) of these respective photodetectors (PD 1 , PD 2 , PD 3 ) assigned to the respective sensor elements (NV 1 , NV 2 ) of the second multi-sensor element module (MSEM 2 ) and - depending on these second receiver output signals ( S01 , S02 , S03 ) to generate one or more second half-bridge control signals (HSL), wherein these one or more second half-bridge control signals (HSL) control the second electronic switches ( THU , TLU , THV , TLV , THW , TLW ) of one or more second half-bridges ( HB1 , HB2 , HB3 ), and wherein these one or more second half-bridges ( HB1 , HB2 , HB3 ) control the second stator coils ( SL1 , SL2 , SL3 ) of the second stator coil pack ( SSP2 ) of the disc rotor motor via respective second motor phases (motor connection lines) ( MPHU , MPHV, MPHW ) with respective second electrical currents ( IU , IV , IW ) depending on the one or more second to power the second half-bridge control signals (HSL) and thus depending on the second receiver output signals (S0 1 , S0 2 , S0 3 ) and thus depending on the second intensities (I fl1 (t), I fl2 (t), I fl3 (t)) of the second fluorescence radiations (Fl 1 , FL 2 , FL 3 ) of the second sensor elements (NV 1 , NV 2 , NV 3 ) of the second multi-sensor element module (MSEM 2 ).

Description

Field of invention The claimed invention relates to a first substrate material for an optical sensor element (NV). This first substrate material contains particles that modify the magnetic flux density (B(t)) and are embedded in a matrix material. The particles modifying the magnetic flux density (B(t)) are arranged, designed, and/or manufactured such that they alter the sensitivity of the sensor element (NV). The particles modifying the magnetic flux density (B(t)) leave at least one optical access window for optically driving and optically reading the sensor element (NV). The invention is characterized in that the sensitivity of the sensor element (NV) with respect to the intensity (Ifl(t)) of the fluorescence radiation (FL) emitted by the paramagnetic centers of the sensor element (NV) relative to the value of the magnetic flux density (B(t)) at the respective location of the paramagnetic centers can be selectively adjusted by means of the design, design, dimensioning, shaping, and/or arrangement of the first substrate material. State of the art From the DE 10 2020 129 367 A1 A system is known in which the evaluation electronics of a similar system are intended to be positioned directly on the stator. In developing the proposal presented in this document, it was recognized that the technical teaching of DE 10 2020 129 367 A1 It is susceptible to EMC interference and causes problems with galvanic isolation and temperature stress. The proposal presented here solves these problems. The state of the art is determined based on the 1 explained for a non-axial motor. Figure 1 1 This document presents a simplified, exemplary, and schematically illustrated prior art system for a non-axial motor. The document presented here refers in particular to the document [document name missing in original text]. WO 2024 041 703 A1 Reading the document WO 2024 041 703 A1 and DE 10 2022 005 094 A1 This is assumed here. The non-axial motor of the 1 The stator housing GH is included. The stator housing GH has a [feature/description] in the 1 the magnetic stator circuit is attached. The magnetic stator circuit can, for example, include a ferrite body. The non-axial motor of the 1 It also includes the stator coil windings SL. The non-axial motor of the 1 The system also includes the axis AX, which the stator preferably rotatably mounts. Preferably, the axis AX is rotatably mounted in the stator about its longitudinal axis. Preferably, the axis AX is secured against displacement along its longitudinal axis. A rotor housing GHR is preferably attached to the axis AX. A magnetic rotor circuit RMK is preferably attached to the rotor housing and/or the axis AX. The magnetic rotor circuit RMK preferably comprises a ferromagnetic laminated core or the like. Several permanent magnets PM are typically attached to the magnetic rotor circuit RMK and/or to the rotor housing GHR. An air gap LS is typically located between the stator coils SL and the permanent magnets PM. A half-bridge controller uses half-bridge control lines (HSL) to control several half-bridges (HB). The half-bridges (HB) energize the motor phases (MPH U , MPH V , MPH W ) which are connected to the stator coils (SL). In the example of the 1 The exemplary motor is three-phase. This exemplary motor preferably comprises N*3 stator coils, where N is a positive integer greater than 0. The half-bridges HB commutate the control of the stator coils as a function of the half-bridge control lines HSL using the motor phases MPH U , MPH V , MPH W. The generator G generates in the 1 The transmit pre-signal. Preferably, the transmit pre-signal is pulse-modulated with a pulse frequency. Particularly preferably, it is a square wave signal with a duty cycle of preferably 50%. Other duty cycles are conceivable. The offset addition OFF1 adds in the 1 Preferably, an offset to the value of the transmit pre-signal is used to enable the use of the pump radiation source PL. Preferably, the resulting transmit signal S5 has no negative signal components. The pump radiation source PL generates a modulated pump radiation LB depending on the transmit signal S5. In the example of the 1 The pump radiation source transmits the pump radiation LB through a dichroic mirror F1 and radiates the pump radiation into the optical fiber LWL. The motor housing has at least one opening OF through which the optical fiber LWL enters the housing GH. At the end of the light wave The sensor element NV is located in the fiber optic conductor. In technical teaching, the sensor element NV comprises... WO 2024 041 703 A1 and DE 10 2022 005 094 A1 Preferably, a multitude of nanodiamonds, which preferably have a statistically uniformly distributed different crystal orientation and are embedded in a matrix material. Typically, the matrix material (also referred to as the support material in the referenced literature) mechanically connects these nanodiamonds to the end of the optical fiber LWL. Preferably, the actual optical fiber