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DE-102025118086-A1 - Vibration damper for an optical module

DE102025118086A1DE 102025118086 A1DE102025118086 A1DE 102025118086A1DE-102025118086-A1

Abstract

A vibration damper (30) for an optical module, used to hold at least one optical component, is designed to dampen at least one natural frequency of the optical module. The vibration damper (30) has a support body (31) via which the vibration damper (30) can be connected to the optical module. A mass element (38) of the vibration damper (30) is connected to the support body (31) via an elastic damping element. Translational and/or rotational movement of the mass element (35) relative to the support body (31) is limited by at least one translational degree of freedom and/or by at least one rotational degree of freedom via at least one guide element ( 39i ) of the vibration damper (30). This results in a vibration damper that ensures, in particular, adjustable damping of natural frequencies of the optical module.

Inventors

  • Martin Mahlmann
  • Markus Hauf
  • Jakob Koehler-Baumann
  • Matthijs van Gastel

Assignees

  • CARL ZEISS SMT GMBH

Dates

Publication Date
20260513
Application Date
20250512

Claims (18)

  1. Vibration damper (30; 42) for an optical module (29) for holding at least one optical component (26), designed to dampen at least one natural frequency of the optical module (29), wherein the vibration damper (30; 42) comprises: - a support body (31; 43) via which the vibration damper (30; 42) can be connected to the optical module (29), - a mass body (35, 38; 35, 44), and - an elastic damping element (34) via which the mass body (35, 38; 35, 44) is connected to the support body (31; 34), - at least one guide body (39 i ) via which a translational movement and/or a rotational movement of the mass body (35, 38; 35, 44) relative to the support body (31; 43) along at least one translational degree of freedom and/or about at least one rotational degree of freedom is limited.
  2. Vibration dampers according to Claim 1 , characterized in that the mass body (35, 38; 35, 44) is made up of multiple parts.
  3. Vibration dampers according to Claim 1 or 2 , characterized in that the damping element (34) is arranged in the region of a center of gravity (COG) of the mass body (35, 38; 35, 44).
  4. Vibration damper according to one of the Claims 1 until 3 , characterized in that the damping body (44) has a conical shape.
  5. Vibration dampers according to Claim 4 , characterized by a cone opening angle greater than 90°.
  6. Vibration damper according to one of the Claims 1 until 5 , characterized by a plurality of guide bodies (39 1 to 39 3 ; 39 1 to 39 4 ).
  7. Vibration dampers according to Claim 6 , characterized in that the mass body (35, 38; 35, 44) is arranged between the guide bodies (39 i ).
  8. Optical module (29) for holding at least one optical component (26), - with a mounting frame (24) having a receptacle (25) for the optical component (26), - with at least one vibration damper (30; 42) according to one of the Claims 1 until 7 to dampen at least one natural frequency of the optical module.
  9. Optical module according to Claim 8 , characterized by a plurality of vibration dampers (30; 42) according to one of the Claims 1 until 7 .
  10. Optical module according to Claim 9 , characterized in that the vibration dampers (30 1 ; 30 i , 42 i ) are oriented such that they limit a vibration amplitude of the optical module in different degrees of freedom and/or in different groups of degrees of freedom.
  11. Optical module according to Claim 9 or 10 , characterized in that the vibration dampers (30; 42) belong to several types with different damping properties.
  12. Optical module according to one of the Claims 8 until 11 , characterized in that the retaining frame (24) has at least one retaining arm (27) with a free arm end (28), wherein at least one of the vibration dampers (30; 42) is attached to the free arm end (28).
  13. Lighting optics (4) for illuminating an object field (5) in which an object (7) to be illuminated can be arranged, comprising an optical module (29) according to one of the Claims 8 until 12 .
  14. Projection optics (10) for imaging an object field (5), in which an object (7) to be illuminated can be arranged, into an image field (11), in which a substrate (13) to be exposed can be arranged, comprising an optical module (29) according to one of the Claims 8 until 12 .
  15. Optical system with a lighting optic according to Claim 13 and/or with a projection optics Claim 14 and with a light source (3) for illumination (16).
  16. Projection exposure system (1) with an optical system according to Claim 15 .
  17. Method for producing structured components comprising the following steps: - providing a wafer (13) on which at least a layer of photosensitive material is applied, - providing a reticulum (7) that has structures to be imaged, - providing a projection exposure system (1) according to Claim 16 , - Projecting at least part of the reticulum (7) onto an area of the layer of the wafer (13) using the projection exposure system (1).
  18. Structured component, manufactured according to a process according Claim 17 .

Description

The invention relates to a vibration damper for an optical module. Furthermore, the invention relates to an optical module for holding at least one optical component with at least one such vibration damper, an illumination optic with such an optical module, a projection optic with such an optical module, an optical system with such an illumination optic or such a projection optic, a projection exposure system with such an optical system, a method for manufacturing a structured component using such a projection exposure system, and a micro- or nanostructured component manufactured using such a method. A vibration damper is known from Verbaan, CAM (2015), “Robust Mass Damper Design for Bandwidth Increase of Motion Stages”, Eindhoven University of Technology An optical module for holding at least one optical component is known, for example, from the DE 10 2011 114 123 A1 . It is an object of the present invention to create a vibration damper with which a damping of movement amplitudes of certain eigenmodes of an optical module is ensured, in particular a predefinable damping, which in particular meets the high requirements of projection lithography for the production of micro- or nanostructured components. This problem is solved according to the invention by a vibration damper having the features specified in claim 1. According to the invention, it has been recognized that vibration damping via an elastically damped mass element makes it possible to provide a tunable damping characteristic for the vibration damper. This damping characteristic can be tuned to meet the specific damping requirements of a mounting frame for an optical module in which the vibration damper is used. In particular, the vibration damper can be adapted to a vibration mode of the optical module, characterized by its vibration shape and natural frequency, by appropriately selecting its geometry, damping material, thickness, mass, and/or geometry, as well as, in particular, the stiffness values of the at least one guide element. The elastic damping element can be made of an elastomer material, for example a fluorocarbon elastomer (FKM). Other fluorinated elastomers or even other types of rubber can also be used. The mass can be made of metal, for example steel or a steel and/or tungsten alloy. The tungsten content of such an alloy can be greater than 90%. The metal can be a heavy metal or a heavy metal alloy. The guide body, at least one of which can be made of metal, for example steel or a steel alloy, can also be made of aluminum. The optical component to be held can be at least one mirror and/or at least one lens. The at least one guide body ensures that the damping effect of the vibration damper is adapted to a specific mode of motion, in particular to both a vibration mode and the corresponding natural frequency of the optical module. The at least one guide body can limit the translational and/or rotational movement of the mass along or through several degrees of freedom. The at least one guide body can also perform the additional function of supporting the mass, at least partially, in addition to the supporting body, and/or generating at least part of the vibration damper's stiffness in addition to the damping element. This prevents unwanted creep of the damping element. Furthermore, it prevents the entire mass of the mass from resting on the damping element. A multi-part mass body according to claim 2 allows for the adaptation of a mass or geometry of the mass body by replacing a part of the mass body with a replacement part having a different geometry and/or mass. This enables a simple adaptation of the damping characteristics of the vibration damper to the optical module to be damped, in particular to the natural frequencies of the optical module that are to be damped. An arrangement of the damping body according to claim 3 enables particularly effective damping. A damping element according to claim 4 enables the damping element to provide damping with respect to several mutually perpendicular degrees of freedom of movement, or also with respect to combinations of at least one translational and/or at least one rotational degree of freedom of movement of the mass relative to the support body. The damping element can be designed as a disk with conical disk surfaces, i.e., in particular as a disk with a concave conical boundary surface and with a convex conical boundary surface. An outer boundary of the damping element can be circular or polygonal, for example, rectangular or square. A conical arrangement of the damping element relative to the support body can be such that a cone opens away from the support body. As an alternative to a conical shape, the damping element can also be designed as a disk overall, i.e., as a disk with planar and, in particular, mutually parallel disk surfaces. One embodiment of the cone opening angle according to claim 5 has proven particularly suitable for damping motion with respect to multiple degrees