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DE-102025118445-A1 - MEMS mirror module, lighting system, assembly method for a MEMS mirror module

DE102025118445A1DE 102025118445 A1DE102025118445 A1DE 102025118445A1DE-102025118445-A1

Abstract

A MEMS mirror module comprising a support frame (30), a MEMS multi-mirror unit (40), and a bridge component (48). The MEMS multi-mirror unit (40) is inserted into a socket (46) of the support frame (30), such that a structural body (41) of the MEMS multi-mirror unit (40) is located in the socket (46). A first fluid channel (51) is formed in the support frame (30). A second fluid channel (52) is formed in the structural body (41). A channel section (58) is formed in the bridge component (48). The bridge component (48) forms a connection between the first fluid channel (51) and the second fluid channel (52). The invention also relates to a lighting system and an assembly method for a MEMS mirror module.

Inventors

  • Matthias Assum
  • Stefan Seitz
  • Hermann Bieg
  • Andreas Grimm
  • David Metz

Assignees

  • CARL ZEISS SMT GMBH

Dates

Publication Date
20260513
Application Date
20250514

Claims (13)

  1. MEMS mirror module comprising a support frame (30), a MEMS multi-mirror unit (40) and a bridge component (48), wherein the MEMS multi-mirror unit (40) is inserted into a socket (46) of the support frame (30) such that a structural body (41) of the MEMS multi-mirror unit (40) is located in the socket (46), wherein a first fluid channel (51) is formed in the support frame (30), wherein a second fluid channel (52) is formed in the structural body (41), wherein a channel section (58) is formed in the bridge component (48), and wherein the bridge component (48) forms a connection between the first fluid channel (51) and the second fluid channel (52).
  2. MEMS mirror module according to Claim 1 , wherein the bridge component (48) has a first connection opening (61) and a second connection opening (62) for connection to the first fluid channel (51) and to the second fluid channel (52).
  3. MEMS mirror module according to Claim 2 , wherein the bridge component (48) is tensioned against the supporting frame (30) and/or against the structural body (41) to generate a tension force acting between the first connection opening (61) and the first fluid channel (51).
  4. MEMS mirror module according to Claim 2 or 3 , wherein the first connection opening (61) is provided with a sealing element (49) which extends around the first connection opening (61).
  5. MEMS mirror module according to one of the Claims 2 until 4 , wherein the bridge component (48) is tensioned against the support frame (30) and/or against the structural body (41) to generate a tension force acting between the second connection opening (62) and the second fluid channel (52).
  6. MEMS mirror module according to one of the Claims 2 until 5 , wherein the first connection opening (61) and the second connection opening (62) lie in planes parallel to each other.
  7. MEMS mirror module according to one of the Claims 2 until 4 , wherein the second connection opening (62) lies in a plane (72) which forms a right angle with the plane (71) of the first connection opening (61).
  8. MEMS mirror module according to one of the Claims 2 until 4 or 7 , wherein the second fluid channel (52) is connected to the first fluid channel (51) and/or to the second fluid channel (52) via an annular space (73, 74).
  9. MEMS mirror module according to Claim 8 , wherein the annular space (73, 74) extends around a pin (67) which is formed by the structural body (41).
  10. MEMS mirror module according to Claim 8 or 9 , wherein each annular space (73, 74) is enclosed between two sealing rings (68).
  11. MEMS mirror module according to one of the Claims 1 until 10 , wherein the bridge component (48) comprises a first channel section (58) and a second channel section (59), wherein the first channel section (58) is connected to the first fluid channel (51) via a first connection opening (61), wherein the first channel section (58) is connected to an inlet opening of the second fluid channel (52) via a second connection opening (62), wherein the second channel section (59) is connected to an outlet opening of the second fluid channel (52) via a third connection opening (63), and wherein the second channel section (59) is connected to the third fluid channel (53) via a fourth connection opening (64).
  12. Illumination system for a semiconductor technology system, comprising a first faceted mirror (18) and a second faceted mirror (19) designed to define a beam path such that an object (13) arranged in an object plane (12) is illuminated with uniform brightness by electromagnetic radiation emitted from a radiation source (14), wherein at least one of the faceted mirrors (18, 19) is a MEMS mirror module according to one of the Claims 1 until 11 is trained.
  13. Assembly method for a MEMS mirror module, in which a MEMS multi-mirror unit (40) is inserted into a socket (46) of a support frame (30), such that a structural body (41) of the MEMS multi-mirror unit (40) lies in the socket (46), and in which the MEMS multi-mirror unit (40) is mechanically fixed to the support frame (30), wherein a first fluid channel (51) is formed in the support frame (30), wherein a second fluid channel (52) is formed in the structural body (41), and wherein a bridge component (48) is arranged on the support frame (30) and on the structural body (41), such that a connection between the first fluid channel (51) and the second fluid channel (52) is formed via a channel section (58) formed in the bridge component (48).

Description

The invention relates to a MEMS mirror module and an illumination system, for example for use in semiconductor technology systems. The invention also relates to an assembly method for a MEMS mirror module. Semiconductor technology equipment refers to systems used for the fabrication or inspection of microstructured devices or the components required for their production. Examples of such equipment include microlithographic projection exposure systems, mask inspection systems, and wafer inspection systems. Microlithographic projection exposure systems are used to manufacture microstructured components, such as integrated circuits. The projection exposure system comprises an illumination system and a projection lens. The projection lens projects a photomask, illuminated by the illumination system, onto a lithographic object positioned in the image plane of the projection lens. The lithographic object, which may be a silicon wafer, for example, is coated with a photosensitive layer. A structure formed on the photomask is transferred to the photosensitive coating of the lithographic object. The illumination system can be used to direct electromagnetic radiation emitted from a radiation source onto the photomask in such a way that the photomask is illuminated with uniform brightness. Two faceted mirrors can be positioned in the beam path between the radiation source and the photomask, homogenizing the radiation in a manner similar to the principle of a honeycomb condenser. The radiation source can be an EUV source emitting electromagnetic radiation in the extreme ultraviolet spectral range, particularly with wavelengths between 5 nm and 30 nm. In order to provide different distributions of intensity and/or angles of incidence of the radiation incident on the photomask, the facets of at least one of the two faceted mirrors can be formed by electromechanically individually pivotable mirror elements. WO 2012/130768 A2 . A small size for the individual mirror elements of a faceted mirror can be achieved by forming groups of mirror elements in the form of a so-called MEMS mirror array, i.e., a mirror array made of microelectromechanical systems (MEMS). In a MEMS mirror array, a large number of small mirror elements are mounted on a common base body and are each individually movable. Each mirror element has an actuated mechanism that allows its orientation relative to the base body to be adjusted. Often, the mirror elements can be pivoted about two axes that are perpendicular to each other and parallel to the base body. To monitor the orientation of the mirrors, sensors can be provided for each individual mirror element to determine its position relative to the base body. An example of a MEMS mirror array is shown in DE 10 2015 204 874 A1 A method for manufacturing a MEMS mirror array is described in DE 10 2015 220 018 A1 revealed. The faceted mirror of a lighting system can be designed as a MEMS mirror module whose optical surface is composed of a plurality of such MEMS mirror arrays. The MEMS mirror module can have a support frame that carries a plurality of MEMS multi-mirror units, with each of the MEMS multi-mirror units having a MEMS mirror array. In EUV operation, some of the incident EUV radiation is absorbed by a MEMS mirror array, which means that heat is added to the MEMS mirror array. Ensuring effective heat dissipation from the MEMS mirror array has proven to be quite challenging. The invention is based on the objective of presenting a MEMS mirror module, an illumination system, and a mounting method for a MEMS mirror module, in which the aforementioned disadvantages are reduced. This objective is achieved by the features of the independent claims. Advantageous embodiments are specified in the dependent claims. A MEMS mirror module according to the invention comprises a support frame, a MEMS multi-mirror unit, and a bridge component. The MEMS multi-mirror unit is inserted into a socket of the support frame, such that a structural body of the MEMS multi-mirror unit is located in the socket. A first fluid channel is formed in the support frame. A second fluid channel is formed in the structural body. A channel section is formed in the bridge component. The bridge component forms a connection between the first fluid channel and the second fluid channel. The invention relates to a cooling concept in which a cooling fluid is guided through a fluid channel in the support frame and through a fluid channel in the structural body of the MEMS multi-mirror unit. The invention proposes connecting the first fluid channel in the support frame and the second fluid channel in the structural body using a bridge component. This achieves functional separation and reduces the potential for errors compared to a procedure where inserting the MEMS multi-mirror unit into the support frame simultaneously creates a connection between the fluid channels. This functional separation allows the assembly steps of the MEMS mirror module