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DE-102025119977-A1 - FLUI-FLOWING SYSTEM AND PROJECTION LIGHTING SYSTEM

DE102025119977A1DE 102025119977 A1DE102025119977 A1DE 102025119977A1DE-102025119977-A1

Abstract

A fluid-carrying system (100A, 100B, 100C) for a projection exposure system (1), comprising a first component (106) having a first fluid channel (108) passing through the first component (106), a second component (114) having a second fluid channel (116) passing through the second component (114) and in fluid communication with the first fluid channel (108), and a sealing device (128A, 128B, 128C) configured to seal the first component (106) and the second component (114) against each other in a fluid-tight manner, wherein the sealing device (128A, 128B, 128C) comprises a plastically deformable metal sealing element (130, 136) and a counter-sealing element (142, 172) that can be applied to the metal sealing element (130, 136). has, and wherein the counter-sealing element (142, 172) has a deformation contour (144, 146, 174) facing the metal sealing element (130, 136), with the help of which the metal sealing element (130, 136) can be plastically deformed in such a way that the metal sealing element (130, 136) assumes at least section by section a geometry of the deformation contour (144, 146, 174).

Inventors

  • Martin Schilling

Assignees

  • CARL ZEISS SMT GMBH

Dates

Publication Date
20260513
Application Date
20250522

Claims (10)

  1. Fluid-carrying system (100A, 100B, 100C) for a projection exposure system (1), comprising: a first component (106) having a first fluid channel (108) passing through the first component (106); a second component (114) having a second fluid channel (116) passing through the second component (114) and in fluid communication with the first fluid channel (108); and a sealing device (128A, 128B, 128C) configured to seal the first component (106) and the second component (114) against each other in a fluid-tight manner; the sealing device (128A, 128B, 128C) comprising a plastically deformable metal sealing element (130, 136) and a counter-sealing element (142) that can be applied to the metal sealing element (130, 136). 172), and whereby the counter-sealing element (142, 172) has a deformation contour (144, 146, 174) facing the metal sealing element (130, 136), with the help of which the metal sealing element (130, 136) is plastically deformable in such a way that the metal sealing element (130, 136) assumes at least section by section a geometry of the deformation contour (144, 146, 174).
  2. Fluid-carrying system according to Claim 1 , wherein the metal sealing element (130, 136) has a higher ductility than the counter-sealing element (142, 172).
  3. Fluid-carrying system according to Claim 1 or 2 , wherein the deformation contour (144, 146, 174) is rib-shaped and completely surrounds a central axis (102) of the fluid-carrying system (100A, 100B, 100C), and wherein the deformation contour (144, 146, 174) is convexly curved.
  4. Fluid-carrying system according to one of the Claims 1 - 3 , wherein the counter-sealing element (142) has a first deformation contour (144) and a second deformation contour (146) which are attached to the counter-sealing element (142) pointing away from each other, and wherein the first deformation contour (144) and the second deformation contour (146) are arranged at different radial positions with respect to a radial direction (104) of the fluid-carrying system (100A, 100B, 100C).
  5. Fluid-carrying system according to Claim 4 , wherein the sealing device (128A, 128B) comprises a first metal sealing element (130) and a second metal sealing element (136), wherein the counter-sealing element (142) is arranged between the first metal sealing element (130) and the second metal sealing element (136), wherein the first deformation contour (144) faces the first metal sealing element (130) so that the first metal sealing element (130) assumes a geometry of the first deformation contour (144) at least section by section, and wherein the second deformation contour (146) faces the second metal sealing element (136) so that the second metal sealing element (136) assumes a geometry of the second deformation contour (146) at least section by section.
  6. Fluid-carrying system according to Claim 5 , wherein, by means of a reversal of the counter-sealing element (142), the second deformation contour (146) rests against the first metal sealing element (130), so that a plastic re-deformation of the first metal sealing element (130) takes place, and the first deformation contour (144) rests against the second metal sealing element (136), so that a plastic re-deformation of the second metal sealing element (136) takes place.
  7. Fluid-carrying system according to one of the Claims 1 - 6 , wherein the metal sealing element (130, 136) is fixed to the first component (106) or to the second component (114) by means of a clamping element (132, 138), or wherein the metal sealing element (130, 136) is materially bonded to the first component (106) or to the second component (114).
  8. Fluid-carrying system according to one of the Claims 1 - 7 , wherein the sealing device (128A, 128B, 128C) has a force application device (122) for applying a deformation force to the counter-sealing element (142, 172).
  9. Fluid-carrying system according to one of the Claims 1 - 3 , wherein the sealing device (128C) has a first flange section (112) attached to the first component (106) which accommodates the metal sealing element (130) and a second flange section (120) attached to the second component (114), and wherein the counter-sealing element (172) is part of the second flange section (120).
  10. Projection exposure system (1) with a fluid-carrying system (100A, 100B, 100C) according to one of the Claims 1 - 9 .

Description

The present invention relates to a fluid-carrying system for a projection exposure system and a projection exposure system with such a fluid-carrying system. Microlithography is used to manufacture microstructured components, such as integrated circuits. The microlithography process is carried out using a lithography system, which includes an illumination system and a projection system. The image of a mask (reticule) illuminated by the illumination system is projected by the projection system onto a substrate, such as a silicon wafer, coated with a photosensitive layer (photoresist) and positioned in the image plane of the projection system. This transfers the mask structure onto the photosensitive coating of the substrate. Driven by the pursuit of ever smaller structures in the fabrication of integrated circuits, EUV lithography systems are currently being developed that utilize light with wavelengths ranging from 0.1 nm to 30 nm, particularly 13.5 nm. Due to the high absorption of most materials of light at these wavelengths, such EUV lithography systems require reflective optics, i.e., mirrors, instead of the previously used refracting optics, i.e., lenses. In a projection system like the one mentioned above, it may be necessary to connect several components, through which fluid channels pass, in a fluid-tight manner. To ensure tightness, especially for EUV-relevant vacuum applications, sealing concepts with high tightness, low permeation, and high mechanical and chemical stability are required. For sealing concepts mentioned earlier, elastic sealing materials are currently used, for example. Such sealing materials can contain per- and polyfluoroalkyl substances (PFAS) or perfluorooctanoic acids (PFOA/PFOS), which are among the so-called "perpetual chemicals." It is foreseeable that these materials will no longer be usable in the future for occupational safety and environmental reasons. Alternatively, metal gaskets can be used. Such metal gaskets, like VCR-Ni sealing discs, Cu-CF sealing rings, C-rings, or similar products, are only suitable for single use when high sealing requirements exist, as they are irreversibly deformed during compression. This results in high material costs and therefore high overall expense. Such metal gaskets are also unsuitable for applications where the connection between components needs to be frequently opened and closed. Against this background, one object of the present invention is to provide an improved fluid-carrying system. Accordingly, a fluid-carrying system for a projection exposure system is proposed. The fluid-carrying system comprises a first component having a first fluid channel passing through the first component, a second component having a second fluid channel passing through the second component and in fluid communication with the first fluid channel, and a sealing device configured to seal the first component and the second component against each other in a fluid-tight manner, wherein the sealing device comprises a plastically deformable metal sealing element and a counter-sealing element that can be applied to the metal sealing element, and wherein the counter-sealing element has a deformation contour facing the metal sealing element, by means of which the metal sealing element can be plastically deformed such that the metal sealing element assumes a geometry of the deformation contour at least section by section. Due to the plastic deformability of the metal sealing element, it is possible to repeatedly disconnect and reconnect the first and second components, with the counter-sealing element and the metal sealing element always maintaining a fluid-tight seal against each other. The sealing device is therefore reusable. The fluid-carrying system can be, for example, a water-carrying system, particularly a cooling system, or a gas-carrying system. Specifically, the fluid-carrying system can be part of the projection optics of the projection exposure system. The first and second components can be any elements, assemblies, or parts of the projection exposure system. For example, the first component can be an optical element, particularly a mirror, and the second component a force frame or the like. However, the first and second components can also be gas or cooling lines. Any number of fluid channels can pass through both the first and second components. In this particular case, the first fluid channel of the first component and the second fluid channel of the second component are connected in such a way that a fluid, for example water (especially demineralized water) or a gas, which is carried through the fluid-carrying system during operation, can flow from the first fluid channel into the second fluid channel or vice versa. The first fluid channel and the second fluid channel are thus in fluid communication with each other or are fluidically connected. The sealing device is arranged, in particular, between the first component and the second component. W