EP-4100992-C0 - METHOD FOR PRODUCING A SEMICONDUCTOR STRUCTURE
EP4100992C0EP 4100992 C0EP4100992 C0EP 4100992C0EP-4100992-C0
Inventors
- JANZ STEFAN
- BETT ANDREAS
Assignees
- FRAUNHOFER GES FORSCHUNG
Dates
- Publication Date
- 20260311
- Application Date
- 20210205
- Priority Date
- 20200207