EP-4260109-A4 - ACTIVELY CLAMPED CARRIER ASSEMBLY FOR PROCESSING TOOLS
EP4260109A4EP 4260109 A4EP4260109 A4EP 4260109A4EP-4260109-A4
Inventors
- RIORDON BENJAMIN B
- STRASSNER JAMES D
Assignees
- APPLIED MATERIALS INC
Dates
- Publication Date
- 20260506
- Application Date
- 20211201
- Priority Date
- 20201211