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EP-4293135-B1 - STAGE FOR HEATING AND COOLING OBJECT

EP4293135B1EP 4293135 B1EP4293135 B1EP 4293135B1EP-4293135-B1

Inventors

  • MASUDA, YUJI

Dates

Publication Date
20260513
Application Date
20220203

Claims (7)

  1. A stage (1) installed in a chamber for heating and cooling an object, the stage (1) comprising: a stage body (5) with a mount surface for mounting the object; a first tubular part (7) that causes a first fluid to flow for temperature adjustment of the mount surface; and a first tube support part (9) for supporting the first tubular part (7), wherein the stage body (5) includes: a first groove part (11) for accommodating the first tubular part (7); and paired notches (13a and 13b) facing each other across the first groove part (11), and the first tube support part (9) includes a connection part (15) for connecting the paired notches (13a and 13b), the first fluid is a fluid for raising a temperature of the mount surface, the stage body (5) further includes: a second tubular part (21) that causes a second fluid to flow for lowering a temperature of the mount surface; a second groove part (23) for accommodating the second tubular part (21); and a second tube support part for supporting the second tubular part (21), the second tube support part being separate from the first tube support part (9), the stage body (5) includes second paired notches facing each other across the second groove part (23), and the second tube support part includes a second connection part (25) for connecting the second paired notches.
  2. The stage according to claim 1, wherein a heat conductive medium exists in a clearance between the first tubular part (7) and the first groove part (11).
  3. The stage according to claim 2, wherein the heat conductive medium is silver, grease, metal fiber, or gas.
  4. A vacuum device comprising the stage according to any one of claims 1 to 3 as a susceptor.
  5. The vacuum device according to claim 4, which is used for manufacturing a semiconductor integrated circuit, a flat display panel, or a solar cell panel.
  6. A method for manufacturing a semiconductor integrated circuit, a flat display panel, or a solar cell panel using the vacuum device according to claim 4.
  7. The stage according to claim 1, wherein the connection part (15) includes: a quadrangular prism-shaped body part; a flat surface part centrally located on an upper surface of the body part; and two walls existing on both sides of the flat surface part, the two walls correspond to the paired notches (13a and 13b), the second connection part (25) includes: a second body part having a quadrangular prism shape; a second flat surface part centrally located on an upper surface of the second body part; and two second walls existing on both sides of the second flat surface part, and the two second walls correspond to the second paired notches.

Description

TECHNICAL FIELD The present invention relates to a stage for heating and cooling an object. BACKGROUND ART Japanese Patent No. 5427367 discloses a rectangular susceptor. Susceptors are used, for example, as stages in the manufacturing of semiconductor integrated circuits, flat display panels, and solar photovoltaic power generation panels. Susceptors heat substrates, for example, in manufacturing processes. At that time, it is required to heat the substrates rapidly and uniformly. It is also desirable that the substrates can be cooled. Therefore, it is conceivable to use a cooling tube and a heating tube for stage temperature control. In this case, when the tubes are simply in contact with the stage, there is a problem that the tubes may come out and the efficiency of temperature control will be lowered. On the other hand, in the case of inserting the tubes into the stage, there is a problem that the processing is difficult and no modification is feasible. CITATION LIST PATENT LITERATURE Patent Literature 1: Japanese Patent No. 5427367 US 2007/056953 discloses a stage according to the prior art. SUMMARY OF INVENTION TECHNICAL PROBLEM The present invention intends to provide a stage with a tube provided therein, in which the tube can be permanently in contact with the stage by a simple method and modifications can be facilitated. SOLUTION TO PROBLEM The above-described problems can be solved by a stage that includes not only a heating part for heating a mount surface of the stage but also a cooling part. Further, the above-described problems can be solved by filling a clearance of a groove that accommodates the heating part or the cooling part with a heat conductive medium. A first invention relates to a stage 1 installed in a chamber for heating and cooling an object. The stage 1 includes: a stage body 5 with a mount surface for mounting the object; a first tubular part 7 that causes a first fluid to flow for temperature adjustment of the mount surface; and a first tube support part 9 for supporting the first tubular part 7. Further, the stage body 5 includes: a first groove part 11 for accommodating the first tubular part 7; and paired notches 13a and 13b facing each other across the first groove part 11. Further, the first tube support part 9 includes a connection part 15 for connecting the paired notches 13a and 13b. In a preferable example of this stage, a heat conductive medium exists in a clearance between the first tubular part 7 and the first groove part 11. A preferable example of the heat conductive medium is silver, grease, metal fiber, or gas. As a preferable example of this stage, in the stage according to the first aspect of the invention, the first fluid is a fluid for raising a temperature of the mount surface. The stage further includes: a second tubular part 21 that causes a second fluid to flow for lowering a temperature of the mount surface; a second groove part 23 for accommodating the second tubular part 21; and a second tube support part 25 for supporting the second tubular part 23. A second invention relates to a vacuum device that includes the above-described stage as a susceptor. This vacuum device is used, for example, for manufacturing a semiconductor integrated circuit, a flat display panel, or a solar cell panel. A third invention relates to a method for manufacturing a semiconductor integrated circuit, a flat display panel, or a solar cell panel using the above-described vacuum device. ADVANTAGEOUS EFFECTS OF INVENTION The present invention can provide a stage including a groove part for accommodating a tubular part, paired notches facing each other across the groove part, and a tube support part including a connection part for connecting the paired notches. Therefore, a tube provided in the stage can be permanently in contact with the stage by a simple method, and modifications can be facilitated. BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a conceptual diagram illustrating how a stage is installed.FIG. 2 is a schematic diagram illustrating the stage.FIG. 3 is a partial cross-sectional diagram illustrating the stage.FIG. 4 is a conceptual diagram illustrating a connection part.FIG. 5 is a reference diagram illustrating the stage during manufacturing.FIG. 6 is a conceptual diagram illustrating an exemplary use of a heat conductive medium.FIG. 7 is a photograph in lieu of a drawing showing a back surface of a stage on which grooves and notched parts are formed.FIG. 8 is a photograph in lieu of a drawing showing how a tube support part is welded. DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described with reference to attached drawings. The present invention is not limited to the embodiments described below and encompasses appropriate modifications within the scope obvious to those skilled in the art from the following embodiments. FIG. 1 is a conceptual diagram illustrating how a stage is installed. A stage 1 is usually installe