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EP-4318129-B1 - IMPRINTING DEVICE AND IMPRINTING METHOD

EP4318129B1EP 4318129 B1EP4318129 B1EP 4318129B1EP-4318129-B1

Inventors

  • LIM, HYUNG JUN
  • KWON, SOON GEUN
  • CHOI, HAK JONG
  • AHN, JUN HYOUNG
  • KIM, GEE HONG
  • CHOI, KEE BONG
  • LEE, JAE JONG

Dates

Publication Date
20260506
Application Date
20220330

Claims (15)

  1. An imprinting device (100, 100', 100", 100‴) comprising: a stamp holder (121) configured such that a stamp (300) is mounted thereon; a substrate holder (111) arranged in a first direction with respect to the stamp holder (121) and configured such that a substrate (200) is mounted thereon; an ultraviolet emitter (150) configured to emit ultraviolet rays toward the substrate (200) mounted on the substrate holder (111); and a pressing module (130) configured to move at least one of the substrate holder (111) or the stamp holder (121), wherein the imprinting device (100, 100', 100", 100‴) is configured to allow the stamp (300) to be mounted on the stamp holder (121) in a state in which the substrate holder (111) and the stamp holder (121) are spaced apart from each other by a predetermined distance or more, characterized in that the pressing module (130) is configured to move the at least one of the substrate holder (111) or the stamp holder (121) such that the substrate holder (111) and the stamp (300) mounted on the stamp holder (121) come into contact with each other.
  2. The imprinting device (100, 100', 100", 100‴) of Claim 1, further comprising: a support (140) disposed in the first direction with respect to the substrate holder (111), the support (140) being configured to be brought into contact with and spaced apart from the substrate (200) mounted on the substrate holder (111) and configured to be capable of supporting the substrate (200) mounted on the substrate holder (111) to prevent the substrate (200) from being separated, wherein the imprinting device (100, 100', 100", 100‴) is configured to allow the substrate (200) to be mounted on the substrate holder (111) in a state in which the support (140) and the substrate holder (111) are spaced apart from each other.
  3. The imprinting device (100, 100', 100", 100‴) of Claim 2, wherein the pressing module (130), the stamp holder (121), the substrate holder (111), and the support (140) are sequentially arranged in the first direction, wherein the pressing module (130) is configured to be brought into contact with and spaced apart from the stamp holder (121) and configured to press the stamp holder (121) in the first direction, and wherein the pressing module (130) presses the stamp holder (121) in the first direction to move the stamp holder (121) in the first direction so that the stamp (300) mounted on the stamp holder (121) comes into contact with the substrate holder (111) and the substrate holder (111) moves in the first direction to come into contact with the support (140).
  4. The imprinting device (100, 100', 100", 100"') of Claim 1, wherein the pressing module (130) is configured to be brought into contact with and spaced apart from the stamp holder (121) and configured to press the stamp holder (121) in the first direction, and wherein, in a contact state in which the pressing module (130), the stamp holder (121), the stamp (300) mounted on the stamp holder (121), and the substrate holder (111) are in contact with one another, the stamp, the stamp holder (121), and the pressing module (130) are configured to be in close contact with one another to form a chamber space (170).
  5. The imprinting device of (100, 100', 100", 100"') Claim 4, wherein the pressing module (130) comprises a chamber cover (131) configured to be in contact with the stamp holder (121) in the contact state, and wherein the chamber space (170) is surrounded by the stamp (300), the stamp holder (121), and the chamber cover (131).
  6. The imprinting device (100, 100', 100", 100"') of Claim 5, wherein at least one of the stamp holder (121) or the chamber cover (131) comprises an elastic portion (122) formed of an elastic material to prevent fluid in the chamber space (170) from leaking.
  7. The imprinting device (100, 100", 100"') of Claim 1, wherein the ultraviolet emitter (150) is disposed in the first direction with respect to the substrate holder (111) so that the ultraviolet rays penetrate the substrate (200) and irradiate contact surfaces between the substrate (200) and the stamp (300).
  8. The imprinting device (100', 100", 100‴) of Claim 1, wherein the ultraviolet emitter (150) is disposed in a second direction opposite to the first direction with respect to the stamp holder (121) so that the ultraviolet rays penetrate the stamp (300) and irradiate contact surface between the substrate (200) and the stamp (300).
  9. The imprinting device (100', 100", 100‴) of Claim 8, wherein the pressing module (130) is disposed in the second direction with respect to the stamp holder (121), and wherein the ultraviolet emitter (150) is disposed in the pressing module (130).
  10. The imprinting device (100", 100‴) of Claim 1, wherein the ultraviolet emitter (150) comprises: a first ultraviolet emitter (150a) disposed in the first direction with respect to the substrate holder (111) so that the ultraviolet rays penetrate the substrate (200) and irradiate contact surfaces between the substrate (200) and the stamp (300); and a second ultraviolet emitter (150b) disposed in a second direction opposite to the first direction with respect to the stamp holder (121) so that the ultraviolet rays penetrate the stamp (300) and irradiate the contact surfaces between the substrate (200) and the stamp (300).
  11. The imprinting device (100, 100', 100", 100‴) of Claim 1, wherein at least one of the substrate holder (111) or the stamp holder (121) is configured to rotate or move in a direction transverse to the first direction.
  12. The imprinting device (100‴) of Claim 1, further comprising: an optical path guide (151) configured to guide a movement of ultraviolet rays to the ultraviolet emitter (150).
  13. The imprinting device (100‴) of Claim 12, wherein the ultraviolet emitter (150) and the optical path guide (151) are disposed in the pressing module (130), and wherein the imprinting device (100) further comprises a light source (152) located separately outside the pressing module (130) and configured to generate the ultraviolet rays moving along the optical path guide (151).
  14. An imprinting method comprising: mounting a substrate on a substrate holder (S100); mounting a stamp on a stamp holder spaced apart from the substrate holder by a predetermined distance or more (S200); moving, by a pressing module, the stamp holder by coming into contact with the stamp holder so that the substrate holder and the stamp come into contact with each other (S300); introducing fluid into a chamber space formed by the stamp, the stamp holder, and the pressing module which are in close contact with one another in a state in which the substrate holder and the stamp are in contact with each other (S400); and irradiating contact surfaces between the substrate and the stamp with ultraviolet rays in a state in which the stamp is in contact with the substrate by being deformed by pressure of the fluid in the chamber space after the introducing of the fluid (S500).
  15. The imprinting method of Claim 14, wherein, in the mounting of the substrate (S100), the substrate holder is spaced apart from a support disposed at an opposite side to the stamp holder with respect to the substrate holder, and wherein, in the moving of the stamp holder (S300), the pressing module comes into contact with the stamp holder and the stamp comes into contact with and moves the substrate holder such that the support and the substrate mounted on the substrate holder come into contact with each other.

Description

TECHNICAL FIELD The present disclosure relates to an imprinting device and an imprinting method. BACKGROUND In the related art, an imprinting device and an imprinting method that perform imprinting on a substrate by irradiating the substrate with ultraviolet rays are known. An imprinting device and an imprinting method have the advantage of being able to produce multiple substrates with a single stamp. Therefore, an imprinting device may be usefully used to manufacture devices with specific functions capable of controlling optical properties, fluid flow, electrical properties, and the like. US 2021/069960 A discloses an imprint apparatus 101 comprising a mold chuck 115 for holding a mold 107, a substrate chuck 119 for holding a substrate 111, an ultraviolet light source 109, and a mold driving mechanism 116 configured to move the mold chuck 115 while holding the mold 107 such as to impress the mold 107 to a resist material 114 on the substrate 111. An imprinting device in the related art needs to have a chamber that allows for ultraviolet irradiation and is sealed. Accordingly, the shapes that the imprinting device in the related art may have are very limited. In addition, when using an imprinting device in the related art, it may take a lot of processes and time to mount or detach the stamp and the substrate. For example, in order to mount the stamp to form the sealed chamber within the imprinting device, there may be inconvenience of having to additionally attach or detach a cover fixed along an edge of the stamp by a plurality of screws. Accordingly, there may be delays in performing imprinting, and process efficiency may decrease. SUMMARY Embodiments of the present disclosure provide an imprinting device that is capable of quickly and easily performing imprinting. Embodiments of the present disclosure provide an imprinting method that is capable of being quickly and easily performed. One aspect of the present disclosure provides embodiments of an imprinting device. The imprinting device according to a representative embodiment includes: a stamp holder configured such that a stamp is mounted thereon; a substrate holder arranged in a first direction with respect to the stamp holder and configured such that a substrate is mounted thereon; an ultraviolet emitter configured to emit ultraviolet rays toward the substrate mounted on the substrate holder; and a pressing module configured to move at least one of the substrate holder or the stamp holder such that the substrate holder and the stamp mounted on the stamp holder come into contact with each other, wherein the imprinting device is configured to allow the stamp to be mounted on the stamp holder in a state in which the substrate holder and the stamp holder are spaced apart from each other by a predetermined distance or more. In some embodiments, the imprinting device may further include a support disposed in a first direction with respect to the substrate holder, the support being configured to be brought into contact with and spaced apart from the substrate mounted on the substrate holder and configured to be capable of supporting the substrate mounted on the substrate holder to prevent the substrate from being separated. The imprinting device may be configured to allow the substrate to be mounted on the substrate holder in a state in which the support and the substrate holder are spaced apart from each other. In some embodiments, the pressing module, the stamp holder, the substrate holder, and the support may be sequentially arranged in the first direction, wherein the pressing module may be configured to be brought into contact with and spaced apart from the stamp holder and configured to press the stamp holder in the first direction, and the pressing module may press the stamp holder in the first direction to move the stamp holder in the first direction so that the stamp mounted on the stamp holder comes into contact with the substrate holder and the substrate holder moves in the first direction to come into contact with the support. In some embodiments, the pressing module may be configured to be brought into contact with and spaced apart from the stamp holder and configured to press the stamp holder in the first direction, and wherein, in a contact state in which the pressing module, the stamp holder, the stamp mounted on the stamp holder, and the substrate holder are in contact with one another, the stamp, the stamp holder, and the pressing module may be configured to be in close contact with one another to form a chamber space. In some embodiments, the imprinting device may further includes a pipe configured to guide fluid introduced into the chamber space. In some embodiments, the pressing module may include a chamber cover configured to be in contact with the stamp holder in the contact state, and the chamber space may be surrounded by the stamp, the stamp holder, and the chamber cover. In some embodiments, the imprinting device may further incl