EP-4448831-A4 - DEPOSITION OF METALS IN RECESSED FEATURES WITH THE USE OF HALOGEN-CONTAINING DEPOSITION INHIBITORS
EP4448831A4EP 4448831 A4EP4448831 A4EP 4448831A4EP-4448831-A4
Inventors
- MANDIA DAVID JOSEPH
- KARIM ISHTAK
- BLAKENEY KYLE JORDAN
- GRIFFITHS MATTHEW BERTRAM EDWARD
- LAI CHIUKIN STEVEN
Assignees
- LAM RES CORP
Dates
- Publication Date
- 20260506
- Application Date
- 20221130
- Priority Date
- 20211216