EP-4457856-A4 - APPARATUS AND METHODS FOR SELF-ASSEMBLED MONOLAYER (SAM) DEPOSITION IN SEMICONDUCTOR EQUIPMENT
EP4457856A4EP 4457856 A4EP4457856 A4EP 4457856A4EP-4457856-A4
Inventors
- KASHEFI KEVIN
- HUSTON JOEL MINSTER
- MCSWINEY MICHAEL LEE
- LEAL CERVANTES CARMEN
- KIM YONGJIN
- PHILLIPS DREW WILLIAM
- SALY MARK JOSEPH
Assignees
- APPLIED MATERIALS INC
Dates
- Publication Date
- 20260506
- Application Date
- 20221208
- Priority Date
- 20211231