EP-4463256-C0 - TRANSFER DEVICE, METHOD, AND USE OF A TRANSFER DEVICE FOR TRANSFERRING AT LEAST ONE FUNCTIONAL ELEMENT INTO A PROCESS CHAMBER
EP4463256C0EP 4463256 C0EP4463256 C0EP 4463256C0EP-4463256-C0
Inventors
- TONDERA MARC
- SCHNEIDLER TOBIAS JAN
- CARLI JULIA ANNETTE
- MÜLLER MATHIEU
- LEUENBERGER PHILIPP
- RETHORET CHRISTOPHE
- ZELLER MIKE
Assignees
- TT INNOVATION AG
Dates
- Publication Date
- 20260311
- Application Date
- 20230111
- Priority Date
- 20220112