EP-4508254-A4 - COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAINING FILMS
EP4508254A4EP 4508254 A4EP4508254 A4EP 4508254A4EP-4508254-A4
Inventors
- MAYORGA STEVEN GERARD
- CHANDRA HARIPIN
- LEI XINJIAN
Assignees
- VERSUM MAT US LLC
Dates
- Publication Date
- 20260506
- Application Date
- 20230510
- Priority Date
- 20220513