EP-4515175-A4 - 3D PROFILOMETRY WITH A LINNIK INTERFEROMETER
EP4515175A4EP 4515175 A4EP4515175 A4EP 4515175A4EP-4515175-A4
Inventors
- MANASSEN AMNON
- GRAUER YOAV
- EISENBACH SHLOMO
- HIEBERT STEPHEN
- SAFRANI AVNER
- GRONHEID ROEL
Assignees
- KLA CORP
Dates
- Publication Date
- 20260506
- Application Date
- 20230721
- Priority Date
- 20220801