EP-4515216-A4 - INSPECTION OF ADAPTIVE PATTERNED WORKPIECES WITH DYNAMIC DESIGN AND DEEP LEARNING-BASED RENDERING
EP4515216A4EP 4515216 A4EP4515216 A4EP 4515216A4EP-4515216-A4
Inventors
- Perali Pavan Kumar
- MUTHUKRISHNAN SANKAR
- BHATT HEMANG
- SAHADEVAREDDY ADITHYA SWAROOP
Assignees
- KLA CORP
Dates
- Publication Date
- 20260506
- Application Date
- 20230929
- Priority Date
- 20220930