EP-4515335-A4 - SYSTEM AND METHOD FOR SUPPRESSION OF TOOL INDUCED SHIFT IN SCANNING OVERLAY METROLOGY
EP4515335A4EP 4515335 A4EP4515335 A4EP 4515335A4EP-4515335-A4
Inventors
- GDOR ITAY
- LUBASHEVSKY YUVAL
- LEVINSKI VLADIMIR
- NEGRI DARIA
- YAGIL ALON
- ISAKOVITCH NICKOLAI
Assignees
- KLA CORP
Dates
- Publication Date
- 20260506
- Application Date
- 20231027
- Priority Date
- 20221123